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10 条记录 (耗时 0.018 秒)

    Method and apparatus for maintaining focus and magnification of a projected image
    1.
    发明申请
    Method and apparatus for maintaining focus and magnification of a projected image 审中-公开
    用于保持投影图像的聚焦和放大的方法和装置

    公开(公告)号：US20060007554A1

    公开(公告)日：2006-01-12

    申请号：US11175247

    申请日：2005-07-06

    申请人： Joerg Ferber ,  Berthold Burghardt ,  Frank Simon

    发明人： Joerg Ferber ,  Berthold Burghardt ,  Frank Simon

    IPC分类号： G02B27/14

    CPC分类号： G03F7/70308 ,  G02B7/008 ,  G02B26/06 ,  G03F9/7026 ,  G03F9/7034

    摘要： A method for operating an optical projection system including projection optics is disclosed. The projection optics project an image of the object on the substrate at an image distance from the projection optics. The image has a size dependent on the size of the object and the ratio of the image distance to the optical distance of the object from the projection optics. The image distance can change with changes in the condition of the projection optics such as changes in the temperature of elements of the projection optics. The image distance is monitored. If the image distance changes, the substrate is moved to the new image distance and the optical distance of the object is correspondingly changed such that the ratio of the image distance to the object distance stays the same.

    摘要翻译： 公开了一种用于操作包括投影光学器件的光学投影系统的方法。 投影光学器件在投影光学器件的图像距离处投射基板上的物体的图像。 图像的尺寸取决于对象的尺寸以及图像距离与物体与投影光学器件的光学距离的比率。 图像距离可以随投影光学元件状态的变化而变化，例如投影光学元件的温度变化。 监视图像距离。 如果图像距离变化，则将基板移动到新的图像距离，并且对象的光学距离相应地改变，使得图像距离与对象距离的比率保持不变。

    Optics for forming a sharp illuminating line of a laser beam
    4.
    发明授权
    Optics for forming a sharp illuminating line of a laser beam 失效
    用于形成激光束的尖锐照明线的光学

    公开(公告)号：US5721416A

    公开(公告)日：1998-02-24

    申请号：US653047

    申请日：1996-05-28

    申请人： Berthold Burghardt ,  Hans-Jurgen Kahlert

    发明人： Berthold Burghardt ,  Hans-Jurgen Kahlert

    IPC分类号： G02B13/22 ,  B23K26/066 ,  B23K26/073 ,  G02B27/09 ,  B23K26/06 ,  G02B13/08

    CPC分类号： G02B27/0966 ,  B23K26/066 ,  B23K26/0738 ,  G02B27/09 ,  G02B27/0911

    摘要： An optical device is described for generating a sharp illuminating line on an illuminating plane from a high-power laser beam. The sharp illuminating line includes long and short axes. The optical device comprises an anamorphic setup of imaging and homogenizing optical systems for the separate imaging and homogenizing of the laser beam in the directions of the long and short axes. For imaging and homogenizing the laser beam in the direction of the short axes, a slit is illuminated homogeneously and the slit is imaged on the illumination plane by reducing optics.

    摘要翻译： 描述了用于在大功率激光束的照明平面上产生尖锐的照明线的光学装置。 尖锐的照明线包括长轴和短轴。 光学装置包括成像和均化光学系统的变形装置，用于在长轴和短轴的方向上分离成像和均化激光束。 为了使激光束沿短轴方向成像和匀化，狭缝被均匀地照射，狭缝通过减少光学器件在照明平面上成像。

    Small line width tunable laser
    5.
    发明授权
    Small line width tunable laser 失效
    小线宽度可控激光

    公开(公告)号：US5226050A

    公开(公告)日：1993-07-06

    申请号：US646674

    申请日：1991-01-25

    申请人： Berthold Burghardt

    发明人： Berthold Burghardt

    IPC分类号： H01S3/137 ,  H01S3/213

    CPC分类号： H01S3/137 ,  H01S3/213

    摘要： For small line width tuning of a laser, especially a pulsed dye laser, a reference beam is uncoupled from the laser resonator (10,18) and directed to a beam position photosensor such as an adjacent pair of photo diodes. A control signal for synchronizing the movements of a grating (10) and an etalon (18) of the laser resonator is derived from a local change of the reference beam in order that synchronism may be achieved in the movement of both the etalon and the grating.

    摘要翻译： 对于激光器（特别是脉冲染料激光器）的小线宽调谐，参考光束与激光谐振器（10,18）分离并且被引导到光束位置光电传感器，例如相邻的一对光电二极管。 用于使激光谐振器的光栅（10）和标准具（18）的运动同步的控制信号从参考光束的局部变化导出，以便在标准具和光栅两者的运动中可以实现同步 。

    DEVICE FOR CONVERTING THE INTENSITY DISTRIBUTION OF A LASER BEAM AND A DEVICE AND METHOD FOR GENERATING A LASER BEAM WITH AN INTENSITY WHICH FALLS CONSTANTLY ALONG AN AXIS FROM ONE SIDE OF THE BEAM TO THE OTHER
    6.
    发明授权
    DEVICE FOR CONVERTING THE INTENSITY DISTRIBUTION OF A LASER BEAM AND A DEVICE AND METHOD FOR GENERATING A LASER BEAM WITH AN INTENSITY WHICH FALLS CONSTANTLY ALONG AN AXIS FROM ONE SIDE OF THE BEAM TO THE OTHER 有权
    用于转换激光束的强度分布的装置和装置以及用于产生激光束的方法，所述激光束具有从光束的一侧到另一侧的轴上的任意一个的强度

    公开(公告)号：US06621639B2

    公开(公告)日：2003-09-16

    申请号：US09960801

    申请日：2001-09-21

    申请人： Hans-Jürgen Kahlert ,  Berthold Burghardt

    发明人： Hans-Jürgen Kahlert ,  Berthold Burghardt

    IPC分类号： G02B2710

    CPC分类号： G02B27/0927 ,  B23K26/0608 ,  B23K26/0673 ,  B23K26/073 ,  G02B3/005 ,  G02B3/0062 ,  G02B27/09 ,  G02B27/0961 ,  G02B27/123 ,  H01S5/005 ,  H01S5/4025

    摘要： A device is obtained for converting the intensity distribution of a laser beam in particular into an intensity distribution which falls constantly along an axis from one side to the other in that a homogenizer (10), which mutually superimposes the sub-beams of the laser beam such that when a laser beam with a specific intensity distribution passes through the homogenizer, a homogenization of the intensity distribution of the laser beam is promoted, is combined with at least one inverter (24, 26) which inverts the intensity distribution of a sub-region, in particular a sub-beam or a plurality of adjacent sub-beams, along at least one axis along which the intensity is to be converted. The extent of the fall in intensity from one side to the other can be controlled by means of the number of the inverters.

    摘要翻译： 获得用于将激光束的强度分布特别地转换成从一侧到另一侧沿轴线不断下降的强度分布的装置，即均匀器（10），其将激光束的子光束 使得当具有特定强度分布的激光束通过均化器时，促进激光束的强度分布的均匀化，与至少一个逆变器（24,26）组合，该逆变器反转子像素的强度分布， 区域，特别是子光束或多个相邻的子光束，沿着强度要被转换的至少一个轴。 可以通过逆变器的数量来控制从一侧到另一侧的强度下降的程度。

    Optical apparatus for the homogenization of laser radiation and the generation of several lighting fields
    7.
    发明授权
    Optical apparatus for the homogenization of laser radiation and the generation of several lighting fields 失效
    用于激光辐射均匀化的光学装置和几个照明领域的产生

    公开(公告)号：US5796521A

    公开(公告)日：1998-08-18

    申请号：US895755

    申请日：1997-07-17

    申请人： Hans-Jurgen Kahlert ,  Berthold Burghardt

    发明人： Hans-Jurgen Kahlert ,  Berthold Burghardt

    IPC分类号： G02B27/09 ,  G02B27/12 ,  G02B27/10

    CPC分类号： G02B27/0961 ,  G02B27/09 ,  G02B27/0905 ,  G02B27/0966 ,  G02B27/123

    摘要： An optical apparatus for the homogenization of laser radiation, in particular of an excimer laser, and for the generation of several lighting fields (F1, F2) from this radiation comprises a plurality of acentric lens segments (G1a, G1b, G1c, G1d; G2a, G2b, G2c, G2d). The acentric lens segments are characterized in that they are segments of cylindrical lenses with an axis of symmetry and that the portion of the cylindrical lens which contains the axis of symmetry is not part of the acentric lens segment. Several groups (G1, G2) of acentric cylindrical lens segments are provided, with each group generating a lighting field (F1, F2) of homogeneous energy density. A collecting lens (S) is arranged downstream of the acentric lens segments, which generates the lighting fields (F1, F2) on a work plane (E).

    摘要翻译： 用于激光辐射的均匀化，特别是准分子激光器的光学装置和用于从该辐射产生几个照明场（F1，F2）的光学装置包括多个中心透镜段（G1a，G1b，G1c，G1d; G2a ，G2b，G2c，G2d）。 中心透镜段的特征在于它们是具有对称轴的柱面透镜的部分，并且包含对称轴的柱面透镜的部分不是中心透镜段的一部分。 提供了中心柱状透镜段的几个组（G1，G2），每个组产生均匀能量密度的照明场（F1，F2）。 收集透镜（S）布置在中心透镜段的下游，其在工作平面（E）上产生照明场（F1，F2）。

    Ablated laser feature shape reproduction control
    10.
    发明授权
    Ablated laser feature shape reproduction control 失效
    消除激光特征形状再现控制

    公开(公告)号：US06172329B2

    公开(公告)日：2001-01-09

    申请号：US09198160

    申请日：1998-11-23

    申请人： Curtis L. Shoemaker ,  Daniel J. Treadwell ,  Berthold Burghardt ,  Sergei V. Govorkov

    发明人： Curtis L. Shoemaker ,  Daniel J. Treadwell ,  Berthold Burghardt ,  Sergei V. Govorkov

    IPC分类号： B23K2600

    CPC分类号： B23K26/066

    摘要： This invention concerns a process useful for increasing the accuracy of the shape of a laser ablated feature formed on a substrate, especially where the substrate is a polymeric article. The process includes irradiating the polymeric article with laser light that has passed through a retardation plate selected from stationary adjustable plates, rotating plates or spinning plates, preferable in multiples of quarter-waves or half-waves. This invention also concerns a laser apparatus useful for making ablated features in a substrate having a radiation source; a mask positioned between the radiation source and a substrate to be irradiated, and a retardation plate which is stationary and adjustable, rotating or spinning plates.

    摘要翻译： 本发明涉及一种可用于提高形成在基底上的激光烧蚀特征的形状精度的方法，特别是在基底是聚合物制品的情况下。 该方法包括用激光照射聚合物，该激光已经通过选自固定的可调节板，旋转板或纺丝板的延迟板，优选为四分之一波或半波的倍数。 本发明还涉及一种用于在具有辐射源的衬底中制造烧蚀特征的激光装置; 位于辐射源和待照射基板之间的掩模，以及静止和可调节的旋转或旋转板的延迟板。