摘要:
A physical quantity sensor includes a substrate, a first detection electrode that includes a first electrode finger, a first spring that supports the first detection electrode in a displaceable manner in a first direction with respect to the substrate, a second detection electrode that includes a second electrode finger which is disposed at a distance from the first electrode finger in the first direction, and a second spring that supports the second detection electrode in a displaceable manner in the first direction with respect to the substrate. A spring constant of the first spring in the first direction is equal to a spring constant of the second spring in the first direction.
摘要:
A physical quantity sensor includes a driven section and a drive spring that supports the driven section so that the driven section is displaceable in a first direction. The drive spring has a serpentine shape and includes a plurality of spring structures extending in a second direction that intersects a first direction. At least one of the spring structures has a thin section that is thinner in a third direction that intersects the first and second directions than the other portions of the drive spring.
摘要:
A gyro sensor includes a substrate, an oscillation member, fixed driving electrodes and a movable driving electrode that oscillated the oscillation member, fixed detection electrodes and a movable detection electrode that id detected a signal that varies in accordance with oscillation by Coriolis' force of the oscillation member, a bias voltage application unit that applies a bias voltage to the oscillation member, and a storage unit, and the bias voltage application unit sets a value of the bias voltage based on information stored in the storage unit.
摘要:
A composite sensor includes an angular velocity sensor element, an acceleration sensor element, and a drive circuit adapted to generate a first signal used to excite a vibration of the angular velocity sensor element, and the drive circuit supplies the acceleration sensor element with a second signal based on the first signal.
摘要:
A gyro sensor includes a first detection mass unit provided with a drive mass unit, a drive unit, a first detection unit and a first vibrating body; and a second detection mass unit provided with a second detection unit and a second vibrating body, the first vibrating body extends in the direction of the first axis and one end thereof is connected to the first detection mass unit, the second vibrating body extends in a direction that is opposite to an extension direction of the first vibrating body, and one end thereof is connected to the second detection mass unit, and the vibrating bodies vibrate in the direction of a third axis, along with the vibration in the direction of the first axis.
摘要:
An information processing device includes an image acquisition unit configured to acquire spectroscopic images for a plurality of spectral wavelengths as a captured image of an imaging target, a spectrum calculation unit configured to calculate an optical spectrum in each of pixels, based on the plurality of spectroscopic images, a feature wavelength detection unit configured to detect a feature wavelength of the optical spectrum in each of the pixels, a color set unit configured to calculate a feature angle corresponding to the feature wavelength in each of the pixels and set, as a feature color of a corresponding pixel, a color in the hue circle corresponding to the feature angle, and an image generation unit configured to generate a feature detection image obtained by converting each of the pixels of the captured image into the feature color corresponding to the pixel.
摘要:
A vibration device includes a substrate that contains movable ions, an element unit that has a movable portion which is displaceable from the substrate, and a conductor layer that is disposed on a side of the substrate which is opposite to the element unit. When a potential of the movable portion is set to E1 and a potential of the conductor layer is set to E2, |E1−E2|
摘要:
An angular velocity detection circuit includes: a first conversion unit that includes a first operational amplifier, and converts a first detection signal, which is output from a first detection electrode and is input to a first input terminal of the first operational amplifier, into a voltage; an angular velocity signal generation unit that generates an angular velocity signal on the basis of an output signal of the first conversion unit; and a first correction signal generation unit that generates a first correction signal for reducing an offset of the angular velocity signal which occurs due to a leakage signal included in the first detection signal on the basis of a signal based on drive oscillation of the angular velocity detection element. The first correction signal is input to the first input terminal or a second input terminal of the first operational amplifier directly or through a resistor.
摘要:
A drive circuit includes a first converter that includes a first operational amplifier and a first capacitance, accumulates first signals output from a first electrode of an angular velocity detection element and input to the first operational amplifier in the first capacitance, and then, converts the signals to a voltage, a first phase adjustment portion that adjusts a phase of the drive signal which drives the angular velocity detection element and limits a frequency band of the drive signal based on the output signals from the first converter, and a drive signal generation portion that generates the drive signal based on the output signals from the first phase adjustment portion.
摘要:
A gyro sensor includes: a substrate; a first drive section; and a first detection section and a second detection section that detect angular velocity. The first detection section includes a first movable body including a first movable electrode that vibrates by vibration of the first drive section and is displaced in response to the angular velocity, and a first fixed electrode fixed to the substrate and facing the first movable electrode. The second detection section includes a second movable body including a second movable electrode that vibrates by vibration of the first drive section and is displaced in response to the angular velocity, and a second fixed electrode fixed to the substrate and facing the second movable electrode. The first movable body and the second movable body are coupled together by a first coupling section.