公开(公告)号：US20170352599A1

公开(公告)日：2017-12-07

申请号：US15429525

申请日：2017-02-10

Applicant: Samsung Electronics Co.,Ltd.

Inventor： Jun-bum PARK ,  Kyung-sik KANG ,  Byeong-hwan JEON ,  Jae-chol JOO ,  Tae-joong KIM

IPC: H01L21/66 ,  G01N21/95 ,  G01N21/956 ,  G01J3/42 ,  H01L21/3205 ,  G01N21/27 ,  G01N21/25 ,  G01J3/28

Abstract: Manufacturing a device may include inspecting a surface of an inspection target device. The inspecting may include forming a metal layer on a surface of the inspection target device on which a minute pattern is formed, directing a beam of light to be incident and normal to the surface of the inspection target device, determining a spectrum of light reflected from the surface of the inspection target device, and generating, via the spectrum, information associated with a structural characteristic of the minute pattern formed on the inspection target device. The inspection target device may be selectively incorporated into the manufactured device based on the generated information.