公开(公告)号：US11811185B2

公开(公告)日：2023-11-07

申请号：US17367802

申请日：2021-07-06

Applicant: Samsung Electronics Co., Ltd.

Inventor： Young-chul Kwon ,  Dong-woo Kang ,  Man-hee Han

IPC: H01S3/00 ,  G02B27/28 ,  G02B5/30 ,  G02B27/09

CPC classification number: H01S3/0085 ,  G02B5/3083 ,  G02B27/0927 ,  G02B27/286

Abstract: A laser dicing device includes: a Gaussian laser beam emitter configured to emit a Gaussian laser beam having a Gaussian energy distribution; a laser beam modulator configured to modulate a shape of the emitted Gaussian laser beam by reducing intensity in a region surrounding a first line parallel with a laser dicing direction of the emitted Gaussian beam, the first line crossing a center of the Gaussian laser beam in a plan view; a focusing lens configured to focus a modulated Gaussian laser beam modulated by the laser beam modulator; and a substrate support configured that a substrate to be diced is seated on the support, wherein the focusing lens is configured to collect the modulated Gaussian laser beam inside the substrate seated on the substrate support.

公开(公告)号：US20200006909A1

公开(公告)日：2020-01-02

申请号：US16354686

申请日：2019-03-15

Applicant: Samsung Electronics Co., Ltd.

Inventor： Young-chul Kwon ,  Dong-woo Kang ,  Man-hee Han

IPC: H01S3/00 ,  G02B27/09 ,  G02B5/30 ,  G02B27/28

Abstract: A laser dicing device includes: a Gaussian laser beam emitter configured to emit a Gaussian laser beam having a Gaussian energy distribution; a laser beam modulator configured to modulate a shape of the emitted Gaussian laser beam by reducing intensity in a region surrounding a first line parallel with a laser dicing direction of the emitted Gaussian beam, the first line crossing a center of the Gaussian laser beam in a plan view; a focusing lens configured to focus a modulated Gaussian laser beam modulated by the laser beam modulator; and a substrate support configured that a substrate to be diced is seated on the support, wherein the focusing lens is configured to collect the modulated Gaussian laser beam inside the substrate seated on the substrate support.

公开(公告)号：US20210336401A1

公开(公告)日：2021-10-28

申请号：US17367802

申请日：2021-07-06

Applicant: Samsung Electronics Co., Ltd.

Inventor： Young-chul Kwon ,  Dong-woo Kang ,  Man-hee Han

IPC: H01S3/00 ,  G02B27/28 ,  G02B5/30 ,  G02B27/09

Abstract: A laser dicing device includes: a Gaussian laser beam emitter configured to emit a Gaussian laser beam having a Gaussian energy distribution; a laser beam modulator configured to modulate a shape of the emitted Gaussian laser beam by reducing intensity in a region surrounding a first line parallel with a laser dicing direction of the emitted Gaussian beam, the first line crossing a center of the Gaussian laser beam in a plan view; a focusing lens configured to focus a modulated Gaussian laser beam modulated by the laser beam modulator; and a substrate support configured that a substrate to be diced is seated on the support, wherein the focusing lens is configured to collect the modulated Gaussian laser beam inside the substrate seated on the substrate support.

公开(公告)号：US11075496B2

公开(公告)日：2021-07-27

申请号：US16354686

申请日：2019-03-15

Applicant: Samsung Electronics Co., Ltd.

Inventor： Young-chul Kwon ,  Dong-woo Kang ,  Man-hee Han

IPC: H01S3/00 ,  G02B27/09 ,  G02B5/30 ,  G02B27/28

Abstract: A laser dicing device includes: a Gaussian laser beam emitter configured to emit a Gaussian laser beam having a Gaussian energy distribution; a laser beam modulator configured to modulate a shape of the emitted Gaussian laser beam by reducing intensity in a region surrounding a first line parallel with a laser dicing direction of the emitted Gaussian beam, the first line crossing a center of the Gaussian laser beam in a plan view; a focusing lens configured to focus a modulated Gaussian laser beam modulated by the laser beam modulator; and a substrate support configured that a substrate to be diced is seated on the support, wherein the focusing lens is configured to collect the modulated Gaussian laser beam inside the substrate seated on the substrate support.

公开(公告)号：US09577400B2

公开(公告)日：2017-02-21

申请号：US14218059

申请日：2014-03-18

Applicant: SAMSUNG ELECTRONICS CO., LTD. ,  Seoul National University R&DB Foundation

Inventor： Hong-sig Kim ,  Yoon-chan Jeong ,  Young-chul Kwon ,  Luis Alonso Vazquez Zuniga ,  Woo-young Jang

IPC: H01S3/00 ,  G02F1/35 ,  H01S3/30 ,  H01S3/10 ,  G01B9/02 ,  G02F1/365 ,  H01S3/23 ,  H01S3/067 ,  H01S3/16 ,  A61B3/10 ,  A61B5/00

CPC classification number: H01S3/0092 ,  A61B3/102 ,  A61B5/0066 ,  G01B9/02091 ,  G02F1/3513 ,  G02F1/353 ,  G02F1/365 ,  H01S3/0057 ,  H01S3/0078 ,  H01S3/0085 ,  H01S3/06754 ,  H01S3/06758 ,  H01S3/10046 ,  H01S3/1618 ,  H01S3/2308 ,  H01S3/302

Abstract: Provided is a frequency shifting optical swept light source system. The system includes a light source that emits light; an amplifier that amplifies the light output from the light source; an optical converter that shifts a frequency of the amplified light and compresses a spectrum of the amplified light; and a controller that controls a current signal applied to the light source such that a repetition rate of the light output from the light source is adjusted, so that an intensity of the amplified light is adjusted, to thereby adjust a position of the compressed spectrum with respect to a predetermined frequency band.

Abstract translation: 提供了一种变频光扫描光源系统。 该系统包括发光的光源; 放大器，其放大从光源输出的光; 光转换器，其移位放大的光的频率并压缩放大的光的光谱; 以及控制器，其控制施加到光源的电流信号，使得从光源输出的光的重复率被调节，使得调节放大的光的强度，从而调整压缩光谱的位置， 相对于预定频带。