公开(公告)号：US09882120B2

公开(公告)日：2018-01-30

申请号：US14956766

申请日：2015-12-02

Applicant: Samsung Electronics Co., Ltd.

Inventor： Sungmin Ahn ,  Jisu Ryu

IPC: H01L43/08 ,  G11C11/16 ,  H01L43/12 ,  H01L27/22

CPC classification number: H01L43/08 ,  G11C11/161 ,  H01L27/228 ,  H01L43/12

Abstract: A magnetic memory device can include an upper electrode, a lower electrode and a Magnetic Tunnel Junction (MTJ). The MTJ can include a reference magnetic pattern configured to generate a fixed magnetization and a free magnetic pattern on the reference magnetic pattern configured to generate a switchable magnetization that switches direction between parallel and anti-parallel to the fixed magnetization. A metal pattern can be on the free magnetic pattern and can be configured to conduct an in-plane current and a perpendicular-to-plane to/from the upper electrode.

公开(公告)号：US20230392925A1

公开(公告)日：2023-12-07

申请号：US18123788

申请日：2023-03-20

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Jiyoung Chu ,  Hyungjin Kim ,  Minhwan Seo ,  Wondon Joo ,  Dongyoon Koo ,  Sangwoo Bae ,  Sungmin Ahn ,  Jungyu Lee ,  Yunpyo Hong

IPC: G01B11/27 ,  G02B27/28 ,  G02B5/08

CPC classification number: G01B11/272 ,  G02B27/283 ,  G02B27/286 ,  G02B5/0808

Abstract: A method of bonding a die to a wafer using a die bonding system measures, using an obtained image showing interference fringes, a parallelism between the die and the wafer. In some embodiments, parallelism and die deformation are detected using interference fringes produced by an optical apparatus of the die bonding system. A parallelism measurement optical apparatus includes a light source, an optical assembly configured to control polarization of a reference light and a measurement light. In some embodiments, the measurement light is sequentially incident on and reflected from a first measurement surface and a second measurement surface that are spaced apart along a vertical direction to face each other, and is emitted to have information on parallelism between the first and second measurement surfaces. In some embodiments, a first polarizer is configured to interfere the reference light and the measurement light emitted from the optical assembly with each other. A light detector is configured to detect an interference signal of lights including the interference fringes.