公开(公告)号：US20160126068A1

公开(公告)日：2016-05-05

申请号：US14827347

申请日：2015-08-17

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Dong-soo LEE ,  Sung-ho JANG ,  Byeong-hee KIM ,  Doug-yong SUNG ,  Dong-ok SHIN

IPC: H01J37/32 ,  H01J37/244 ,  G01J1/44

CPC classification number: H01J37/32146 ,  G01J1/44 ,  G01J2001/4238 ,  G01J2001/4453 ,  H01J37/32091 ,  H01J37/32935 ,  H01J37/32972

Abstract: A diagnosis system for pulsed plasma includes an optical emission sensor (OES) to receive light generated the pulsed plasma, the pulsed plasma having been generated in accordance with a pulse signal, a digitizer to synchronize the electrical signal with the pulse signal, and an analyzer to analyze the synchronized electrical signal.

Abstract translation: 用于脉冲等离子体的诊断系统包括用于接收产生脉冲等离子体的光的光发射传感器（OES），根据脉冲信号产生的脉冲等离子体，使电信号与脉冲信号同步的数字化仪，和分析仪 分析同步电信号。

公开(公告)号：US20210153333A1

公开(公告)日：2021-05-20

申请号：US17158380

申请日：2021-01-26

Applicant: Samsung Electronics Co., Ltd.

Inventor： Ho YU ,  Chae-mook LIM ,  Sung-ho JANG ,  Min-seok CHOI

IPC: H05G2/00 ,  G03F7/20

Abstract: An extreme ultraviolet (EUV) light concentrating apparatus including a main body having a concave inner portion and configured to rotate, a tin generator configured to generate tin drops and spray the tin drops, a tin catcher configured to process the sprayed tin drops, a protective cover configured to block the tin drops from falling into the main body, and a rotation guide configured to rotate the main body may be provided.

公开(公告)号：US20200184624A1

公开(公告)日：2020-06-11

申请号：US16444719

申请日：2019-06-18

Applicant: Samsung Electronics Co., Ltd.

Inventor： Sung-ho JANG ,  Yasuhiro HIDAKA ,  Young-kyu PARK ,  Ye-eun PARK ,  Yu-sin YANG

IPC: G06T7/00 ,  G02B27/09 ,  G02B26/12 ,  H04N13/239 ,  G02B5/30

Abstract: Provided is a hyperspectral imaging (HSI)-based inspection apparatus capable of quickly and stably performing two-dimensional (2D) HSI for an inspection object, and accordingly, capable of quickly and accurately inspecting the inspection object. The HSI-based inspection apparatus includes: a stage on which an inspection object is arranged; an optical system configured to allow light to be incident on the inspection object and emit the light reflected from the inspection object; a scan mirror configured to reflect the emitted light from the optical system while rotating; and a hyperspectral camera configured to obtain an image having a wavelength direction and a line direction as two axes for light reflected from the scan mirror, wherein, by using the rotation of the scan mirror, the hyperspectral camera is configured to perform the 2D HSI for the inspection object.

公开(公告)号：US20150280836A1

公开(公告)日：2015-10-01

申请号：US14674459

申请日：2015-03-31

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Ho JIN ,  Jong-baek KIM ,  Sung-ho JANG

IPC: H04B11/00 ,  G06F3/041 ,  G06F3/0484

CPC classification number: H04B11/00 ,  H04M1/215 ,  H04M1/7253

Abstract: A method of sharing information by an information-providing device, the method including: determining, by the information-providing device, information of interest based on a first input to the information-providing device; generating, by the information-providing device, a sound signal including object information; and outputting, by the information-providing device, the sound signal, wherein the object information includes object identification information configured to be used to identify the information of interest.

Abstract translation: 一种由信息提供装置共享信息的方法，所述方法包括：基于信息提供装置的第一输入，由信息提供装置确定感兴趣的信息; 由信息提供装置产生包括对象信息的声音信号; 并且由所述信息提供装置输出所述声音信号，其中所述对象信息包括被配置为用于识别所述感兴趣的信息的对象识别信息。