公开(公告)号：US20220352194A1

公开(公告)日：2022-11-03

申请号：US17557501

申请日：2021-12-21

申请人： Samsung Electronics Co., Ltd.

发明人： Youngmo Ku ,  Wookhyoung Lee ,  Kang-Sup Roh ,  Seongjun Seo ,  Yongin Cho

IPC分类号： H01L27/11556 ,  H01L27/11582 ,  H01L27/11524 ,  H01L27/1157 ,  H01L23/522

摘要： Disclosed is a semiconductor device comprising a substrate including a cell array region and a connection region, an electrode structure extending in a first direction on the substrate and including vertically stacked electrodes having pad sections arranged stepwise on the connection region, a first contact plug connected to a first one of the pad sections, a pair of first vertical structures that penetrate the first one of the pad sections and are spaced apart from each other in a first direction by a first distance, a second contact plug connected to a second one of the pad section and having a vertical length that is greater than that of the first contact plug, and a pair of second vertical structures that penetrate the second one of the pad sections and are spaced apart from each other in the first direction by a second distance that is greater than the first distance.

公开(公告)号：US12082404B2

公开(公告)日：2024-09-03

申请号：US17557501

申请日：2021-12-21

申请人： Samsung Electronics Co., Ltd.

发明人： Youngmo Ku ,  Wookhyoung Lee ,  Kang-Sup Roh ,  Seongjun Seo ,  Yongin Cho

IPC分类号： H10B41/27 ,  H01L23/522 ,  H10B41/35 ,  H10B43/27 ,  H10B43/35 ,  H01L23/00 ,  H01L25/065 ,  H01L25/10

CPC分类号： H10B41/27 ,  H01L23/5226 ,  H10B41/35 ,  H10B43/27 ,  H10B43/35 ,  H01L24/32 ,  H01L25/0657 ,  H01L25/105 ,  H01L2224/32145 ,  H01L2924/14511

摘要： Disclosed is a semiconductor device comprising a substrate including a cell array region and a connection region, an electrode structure extending in a first direction on the substrate and including vertically stacked electrodes having pad sections arranged stepwise on the connection region, a first contact plug connected to a first one of the pad sections, a pair of first vertical structures that penetrate the first one of the pad sections and are spaced apart from each other in a first direction by a first distance, a second contact plug connected to a second one of the pad section and having a vertical length that is greater than that of the first contact plug, and a pair of second vertical structures that penetrate the second one of the pad sections and are spaced apart from each other in the first direction by a second distance that is greater than the first distance.