公开(公告)号：US12122702B2

公开(公告)日：2024-10-22

申请号：US18094820

申请日：2023-01-09

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Jongha Yun ,  Seyoon Kim ,  Juhui Park ,  Jiyeon Lee ,  Cheolmin Shin

IPC: C02F9/00 ,  B01D15/36 ,  B01D61/02 ,  B01D61/08 ,  B01D61/14 ,  B01D63/02 ,  B08B3/02 ,  B08B3/14 ,  B08B13/00 ,  C02F1/28 ,  C02F1/42 ,  C02F1/44 ,  H01L21/67 ,  C02F103/04 ,  C02F103/34

CPC classification number: C02F9/00 ,  B01D15/361 ,  B01D61/02 ,  B01D61/025 ,  B01D61/026 ,  B01D61/08 ,  B01D61/14 ,  B01D63/02 ,  B08B3/022 ,  B08B3/14 ,  B08B13/00 ,  C02F1/283 ,  C02F1/42 ,  C02F1/441 ,  C02F1/444 ,  H01L21/67017 ,  B01D2313/083 ,  B01D2313/18 ,  B01D2313/60 ,  C02F2103/04 ,  C02F2103/346 ,  C02F2201/005 ,  C02F2209/03 ,  C02F2209/05 ,  C02F2209/40 ,  C02F2301/043 ,  C02F2301/046 ,  H01L21/67063 ,  H01L21/67092

Abstract: Ultrapure water supply apparatuses, substrate processing systems, and substrate processing methods are provided. An ultrapure water supply apparatus includes: a first supply device that produces first ultrapure water; a second supply device that produces second ultrapure water; a first reserved supply device that provides the second supply device with a portion of fluid in the first supply device; and a second reserved supply device that provides the first supply device with a portion of fluid in the second supply device. The first supply device includes a first front-side filtering part, a first rear-side filtering part, and a first connection part. The second supply device includes a second front-side filtering part, a second rear-side filtering part, and a second connection part. Each of the first and second reserved supply devices connects the first connection part and the second connection part to each other.

公开(公告)号：US20230303416A1

公开(公告)日：2023-09-28

申请号：US18065857

申请日：2022-12-14

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jongha Yun ,  Gwangwon Son ,  Jieun Jang ,  Wuyoung Choi ,  Eunhye Park

IPC: B08B3/14 ,  C02F9/00 ,  B01D63/02 ,  H01L21/67 ,  B01D15/36 ,  B01D61/02 ,  B01D61/08 ,  B08B3/02 ,  B08B13/00 ,  H01L21/306

CPC classification number: C02F9/00 ,  B01D15/361 ,  B01D61/025 ,  B01D61/08 ,  B01D63/02 ,  B08B3/022 ,  B08B3/14 ,  B08B13/00 ,  H01L21/30604 ,  H01L21/6708 ,  C02F2103/04

Abstract: An ultrapure water supply apparatus includes a first filtering device, a second filtering device, a first tank between the first and second filtering devices, a third filtering device, a second tank between the second and third filtering devices, a fourth filtering device, a third tank between the third and fourth filtering devices, and a gas supply device connected to each of the first to third tanks and configured to supply an inert gas. Each of the first to third tanks includes a tank body and a breather valve coupled to the tank body and connected to a storage space in the tank body. Each of the first to fourth filtering devices includes at least one selected from an activated carbon filter device, an ion exchange resin device, a reverse osmosis membrane device, and a hollow fiber membrane device.