公开(公告)号：US20190035806A1

公开(公告)日：2019-01-31

申请号：US15955256

申请日：2018-04-17

Applicant: Samsung Electronics Co., Ltd.

Inventor： Kwangyoung Jung ,  Jongwon Kim ,  Dongseong Eun ,  Joonhee Lee

IPC: H01L27/11582 ,  H01L27/11568 ,  H01L23/528 ,  H01L23/522 ,  H01L21/768

CPC classification number: H01L27/11582 ,  H01L21/76816 ,  H01L21/76877 ,  H01L23/5226 ,  H01L23/528 ,  H01L27/11565 ,  H01L27/11568 ,  H01L27/11575

Abstract: Semiconductor devices are provided. A semiconductor device includes a substrate. The semiconductor device includes a stack structure including conductive layers stacked on the substrate. Moreover, the semiconductor device includes a dummy structure penetrating a stepped region of the stack structure. A portion of the dummy structure includes a first segment and a second segment. The first segment extends in a first direction in a plane parallel to an upper surface of the substrate. The second segment protrudes from the first segment in a second direction, in the plane, that intersects the first direction.