公开(公告)号：US11733077B2

公开(公告)日：2023-08-22

申请号：US17504212

申请日：2021-10-18

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sanga Bang ,  Geunhyung Kim ,  Sangmin Kim ,  Gi-Nam Park ,  Chul-Jun Park ,  Yong-Jun Ahn ,  JongJin Ahn ,  Min Kyun Lee ,  Sangkyung Lee ,  Kyubum Cho

IPC: G01F1/42 ,  G01F1/37

CPC classification number: G01F1/42 ,  G01F1/37

Abstract: A measurement carrier includes a housing having an internal space, and a flow-rate measuring device located within the internal space. A bottom surface of the housing includes a first inflow hole, a second inflow hole, and an outflow hole, which provide fluid communication between the internal space and an outer space. The flow-rate measuring device may include a first flow-rate measuring sensor in fluid communication with the first inflow hole, and a second flow-rate measuring sensor in fluid communication with the second inflow hole.

公开(公告)号：US20220336241A1

公开(公告)日：2022-10-20

申请号：US17543025

申请日：2021-12-06

Applicant: Samsung Electronics Co., Ltd.

Inventor： Young Wook Kim ,  Sang Min Kim ,  Ji Hun Kim ,  Gi-Nam Park ,  Chul-Jun Park ,  Yong-Jun Ahn ,  Youn Gon Oh ,  Byung Kook Yoo ,  Hyun Woo Lee ,  Jeong Hun Lim

IPC: H01L21/67 ,  H01L21/677

Abstract: A substrate transfer device includes a transfer unit configured to transfer, in a first direction, a carrier in which substrates are stored, an upper interface unit configured to move the transfer unit, a lower interface unit configured to receive the carrier from the transfer unit, and a controller configured to control the upper interface unit and the lower interface unit integrally such that the transfer unit and the carrier move in the first direction at the same time.

公开(公告)号：US12283502B2

公开(公告)日：2025-04-22

申请号：US17543025

申请日：2021-12-06

Applicant: Samsung Electronics Co., Ltd.

Inventor： Young Wook Kim ,  Sang Min Kim ,  Ji Hun Kim ,  Gi-Nam Park ,  Chul-Jun Park ,  Yong-Jun Ahn ,  Youn Gon Oh ,  Byung Kook Yoo ,  Hyun Woo Lee ,  Jeong Hun Lim

IPC: G06F7/00 ,  H01L21/67 ,  H01L21/677

Abstract: A substrate transfer device includes a transfer unit configured to transfer, in a first direction, a carrier in which substrates are stored, an upper interface unit configured to move the transfer unit, a lower interface unit configured to receive the carrier from the transfer unit, and a controller configured to control the upper interface unit and the lower interface unit integrally such that the transfer unit and the carrier move in the first direction at the same time.

公开(公告)号：US10964570B2

公开(公告)日：2021-03-30

申请号：US16529082

申请日：2019-08-01

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sangkyung Lee ,  Yong-Jun Ahn ,  Taijo Jeon ,  Kyubum Cho ,  Jongsam Kim ,  Gi-Nam Park ,  Chul-Jun Park ,  Junyong Lee

IPC: H01L21/673 ,  H01L21/67 ,  B05B1/30

Abstract: A semiconductor wafer storage system includes a container that provides a space in which a semiconductor wafer is to be stored, a fluid supply that provides a fluid to the container, a connection part that receives the fluid from the fluid supply and transfers the fluid to the container, and a nozzle part that connects the connection part to the container. The container may include a coupling plate to which the nozzle part is coupled, and the nozzle part may include a first nozzle and a second nozzle.

公开(公告)号：US12068185B2

公开(公告)日：2024-08-20

申请号：US17854681

申请日：2022-06-30

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Young Wook Kim ,  Sang Min Kim ,  Chul-Jun Park ,  Jae Sung Byun ,  Yong-Jun Ahn ,  Sang Kyung Lee ,  Hyun Woo Lee ,  Jeong Hun Lim ,  Jun Hyuk Chang ,  Kyu Bum Cho

IPC: H01L21/677 ,  B65G1/06

CPC classification number: H01L21/67712 ,  B65G1/06 ,  H01L21/67736 ,  B65G2201/0297

Abstract: An article transfer system includes a plurality of stage modules respectively provided at a plurality of layers, an interlayer transfer apparatus configured to transfer an article to each of the plurality of stage modules, and a plurality of loading and unloading apparatus respectively provided on each stage module of the plurality of stage modules, the plurality of loading and unloading apparatus configured to load an article onto respective stage modules of the plurality of stage modules. The interlayer transfer apparatus includes a mast frame extending so as to intersect each stage module of the plurality of stage modules, and a plurality of carriage units configured to move along a length direction of the mast frame, transfer articles, and move in a parallel manner with each other.

公开(公告)号：US20230099726A1

公开(公告)日：2023-03-30

申请号：US17854681

申请日：2022-06-30

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Young Wook Kim ,  Sang Min Kim ,  Chul-Jun Park ,  Jae Sung Byun ,  Yong-Jun Ahn ,  Sang Kyung Lee ,  Hyun Woo Lee ,  Jeong Hun Lim ,  Jun Hyuk Chang ,  Kyu Bum Cho

IPC: H01L21/677 ,  B65G1/06

Abstract: An article transfer system includes a plurality of stage modules respectively provided at a plurality of layers, an interlayer transfer apparatus configured to transfer an article to each of the plurality of stage modules, and a plurality of loading and unloading apparatus respectively provided on each stage module of the plurality of stage modules, the plurality of loading and unloading apparatus configured to load an article onto respective stage modules of the plurality of stage modules. The interlayer transfer apparatus includes a mast frame extending so as to intersect each stage module of the plurality of stage modules, and a plurality of carriage units configured to move along a length direction of the mast frame, transfer articles, and move in a parallel manner with each other.