公开(公告)号：US11569793B2

公开(公告)日：2023-01-31

申请号：US16692142

申请日：2019-11-22

Applicant: Samsung Electro-Mechanics., Co., Ltd.

Inventor： Tae Yoon Kim ,  Jong Woon Kim ,  Dae Hun Jeong ,  Moon Chul Lee

IPC: H03H9/02 ,  H01L41/047 ,  H03H9/15 ,  H03H9/13

Abstract: An acoustic resonator includes: a resonating unit including a resonating unit including a piezoelectric layer and first and second electrodes disposed on a lower side and an upper side of the piezoelectric layer, respectively; a substrate disposed on a lower side of the resonating unit; a support unit providing a cavity between the substrate and the resonating unit; and an intermediate metal layer separated from the second electrode and disposed in the resonating unit such that at least a portion thereof is surrounded by the piezoelectric layer and the second electrode.

公开(公告)号：US11271543B2

公开(公告)日：2022-03-08

申请号：US16193529

申请日：2018-11-16

Applicant: Samsung Electro-Mechanics Co., Ltd.

Inventor： Won Han ,  Sang Uk Son ,  Tae Yoon Kim ,  Jong Woon Kim

IPC: H03H9/17 ,  H03H9/13 ,  H03H9/02

Abstract: A bulk acoustic wave resonator includes: a substrate; a first electrode disposed above the substrate; a piezoelectric layer disposed above at least a portion of the first electrode; and a second electrode disposed above at least a portion of the piezoelectric layer. A first gap is formed between the piezoelectric layer and one of the first and second electrodes. The first gap includes a first inner gap disposed in an active area of the bulk acoustic wave resonator, and having a first spacing distance between the piezoelectric layer and the one of the first and second electrodes, and a first outer gap disposed outwardly of the active area and having a second spacing distance, different than the first spacing distance, between the piezoelectric layer and the one of the first and second electrodes.

公开(公告)号：US10778179B2

公开(公告)日：2020-09-15

申请号：US15788062

申请日：2017-10-19

Applicant: Samsung Electro-Mechanics Co., Ltd.

Inventor： Tae Kyung Lee ,  Tae Yoon Kim ,  Sang Kee Yoon ,  Chang Hyun Lim ,  Jong Woon Kim ,  Moon Chul Lee

IPC: H03H9/02 ,  H03H9/54 ,  H03H9/17 ,  H03H9/13 ,  H03H3/02 ,  H01L41/053 ,  H01L41/29 ,  H01L41/31

Abstract: An acoustic wave resonator includes a resonating part disposed on and spaced apart from a substrate by a cavity, the resonating part including a membrane layer, a first electrode, a piezoelectric layer, and a second electrode that are sequentially stacked. 0 Å≤ΔMg≤170 Å may be satisfied, ΔMg being a difference between a maximum thickness and a minimum thickness of the membrane layer disposed in the cavity.

公开(公告)号：US10734968B2

公开(公告)日：2020-08-04

申请号：US15647660

申请日：2017-07-12

Applicant: Samsung Electro-Mechanics Co., Ltd.

Inventor： Tae Kyung Lee ,  Tae Yoon Kim ,  Dae Ho Kim ,  Chang Hyun Lim ,  Tae Hun Lee ,  Sang Kee Yoon ,  Jong Woon Kim ,  Won Han ,  Moon Chul Lee

IPC: H03H9/02 ,  H03H9/56 ,  H03H3/02 ,  H03H9/17 ,  H03H9/60 ,  H01L41/047 ,  H03H9/54

Abstract: A bulk acoustic resonator includes: a substrate including an upper surface on which a substrate protection layer is disposed; and a membrane layer forming a cavity together with the substrate, wherein a thickness deviation of either one or both of the substrate protection layer and the membrane layer is 170 Å or less.

公开(公告)号：US20150096374A1

公开(公告)日：2015-04-09

申请号：US14499183

申请日：2014-09-28

Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.

Inventor： Jong Woon Kim ,  Jae Chang Lee ,  Sang Kee Yoon ,  Hyun Kee Lee ,  Yeong Gyu Lee ,  Seung Mo Lim

IPC: G01P15/09

CPC classification number: G01C19/5747 ,  G01C19/5769

Abstract: Disclosed herein is an angular velocity sensor, including: a mass body part; an internal frame supporting the mass body part; a first flexible part each connecting the mass body part to the internal frame; a second flexible part each connecting the mass body part to the internal frame; an external frame supporting the internal frame; a third flexible part connecting the internal frame and the external frame to each other; and a fourth flexible part connecting the internal frame and the external frame to each other, wherein the internal frame, the second flexible part, and the fourth flexible part have an oxide layer formed thereon.

Abstract translation: 本文公开了一种角速度传感器，包括：质量体部分; 支撑质量体部分的内部框架; 第一柔性部，每个将所述质量体部分连接到所述内部框架; 第二柔性部，每个将所述质量体部分连接到所述内部框架; 支撑内框的外框; 连接内部框架和外部框架的第三柔性部件; 以及将所述内部框架和所述外部框架彼此连接的第四柔性部件，其中，所述内部框架，所述第二柔性部件和所述第四柔性部件具有形成在其上的氧化物层。

公开(公告)号：US20130319115A1

公开(公告)日：2013-12-05

申请号：US13899204

申请日：2013-05-21

Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.

Inventor： Jong Woon Kim ,  Jun Lim ,  Seung Mo Lim ,  Sang Jin Kim

IPC: G01P3/44

CPC classification number: G01P3/44 ,  G01C19/00 ,  G01C19/56 ,  G01P15/09 ,  G01P15/123 ,  G01P2015/084

Abstract: Disclosed herein is a sensor. A sensor according to the present invention includes a mass body, a fixing part disposed so as to be spaced apart from the mass body, a first flexible part connecting the mass body with the fixing part in a Y-axis direction, a second flexible part connecting the mass body with the fixing part in an X-axis direction, and a membrane disposed over the second flexible part and having a width in a Y-axis direction larger than a width in a Y-axis direction of the second flexible part. Here, a width of an X-axis direction of the first flexible part is larger than a thickness in a Z-axis direction thereof and a thickness in a Z-axis direction of the second flexible part is larger than a width in a Y-axis direction thereof.

Abstract translation: 这里公开了一种传感器。 根据本发明的传感器包括质量体，与质量体隔开设置的固定部，将质量体与固定部在Y轴方向连接的第一柔性部，第二挠性部 将所述质量体与所述固定部在X轴方向上连接，以及设置在所述第二柔性部上并具有比所述第二柔性部的Y轴方向的宽度大的Y轴方向的膜。 这里，第一柔性部的X轴方向的宽度大于其Z轴方向的厚度，第二柔性部的Z轴方向的厚度大于Y轴方向的宽度， 轴方向。

公开(公告)号：US20130118258A1

公开(公告)日：2013-05-16

申请号：US13650532

申请日：2012-10-12

Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.

Inventor： Jong Woon Kim ,  Yun Sung Kang

IPC: G01P15/00 ,  H01L41/22

CPC classification number: G01C19/5755 ,  G01C19/5769 ,  G01P15/0802 ,  G01P15/09 ,  Y10T29/42

Abstract: Disclosed herein are an inertial sensor and a method of manufacturing the same. The inertial sensor includes: a flexible part; a mass body movably supported by the flexible part and including a metal; a post supporting the flexible part; piezoelectric elements driving the mass body or sensing displacement of the mass body; and a package enclosing the flexible part, the mass body, and the post, wherein the metal has a melting point lower than the Curie temperature of the piezoelectric elements and higher than that of a solder forming connection parts for a surface mounting technology (SMT) provided on the package.

Abstract translation: 这里公开了惯性传感器及其制造方法。 惯性传感器包括：柔性部件; 由柔性部件可移动地支撑并包括金属的质量体; 支撑柔性部件的支柱; 驱动质量体的压电元件或感测体块的位移; 以及封装柔性部件，质量体和柱的封装，其中金属的熔点低于压电元件的居里温度，并且高于用于表面安装技术（SMT）的焊料形成连接部件的熔点， 在包装上提供。

公开(公告)号：US12057822B2

公开(公告)日：2024-08-06

申请号：US17307055

申请日：2021-05-04

Applicant: Samsung Electro-Mechanics Co., Ltd.

Inventor： Sang Uk Son ,  Sung Wook Kim ,  Won Han ,  Jong Woon Kim ,  Jeong Hoon Ryou ,  Sang Heon Han

IPC: H03H9/17 ,  H03H9/02 ,  H03H9/13

CPC classification number: H03H9/173 ,  H03H9/02015 ,  H03H9/02157 ,  H03H9/131 ,  H03H9/132

Abstract: A bulk acoustic resonator includes a first electrode disposed on an upper side of a substrate, a piezoelectric layer disposed on an upper surface of the first electrode, and a second electrode disposed on an upper surface of the piezoelectric layer, wherein an upper surface of at least one of the first electrode and the second electrode has a recess region, wherein a depth of the recess region is D, a width of the recess region is W, and a resonance frequency is F, and ln is a natural logarithm, and wherein [{ln(D*W)}/(−0.59*F)] is [[ln{0.008 (μm)2}]/{−0.59*(3.5 GHz)}] or more and [[ln{0.022 (μm)2}]/{−0.59*(3.5 GHz)}] or less.

公开(公告)号：US11323088B2

公开(公告)日：2022-05-03

申请号：US16989129

申请日：2020-08-10

Applicant: Samsung Electro-Mechanics Co., Ltd.

Inventor： Tae Kyung Lee ,  Tae Yoon Kim ,  Sang Kee Yoon ,  Chang Hyun Lim ,  Jong Woon Kim ,  Moon Chul Lee

IPC: H03H9/02 ,  H03H9/54 ,  H03H9/17 ,  H03H9/13 ,  H01L41/053 ,  H01L41/29 ,  H01L41/31 ,  H03H3/02

Abstract: An acoustic wave resonator includes a resonating part disposed on and spaced apart from a substrate by a cavity, the resonating part including a membrane layer, a first electrode, a piezoelectric layer, and a second electrode that are sequentially stacked. 0 Å≤ΔMg≤170 Å may be satisfied, ΔMg being a difference between a maximum thickness and a minimum thickness of the membrane layer disposed in the cavity.

公开(公告)号：US09625484B2

公开(公告)日：2017-04-18

申请号：US14446269

申请日：2014-07-29

Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.

Inventor： Jong Woon Kim ,  Jung Won Lee ,  Seung Joo Shin ,  Won Kyu Jeung

IPC: G01C19/00 ,  G01P3/44 ,  G01C15/08 ,  G01C19/56 ,  G01C19/5712

CPC classification number: G01P9/04 ,  G01C19/5712

Abstract: An angular velocity sensor comprises a mass body part including a first mass body and a second mass body, an internal frame supporting the first mass body and the second mass body, one or more first flexible parts connecting the first mass body or the second mass body to the internal frame, one or more second flexible parts connecting the first mass body or the second mass body to the internal frame, an external frame supporting the internal frame, at least one third flexible part connecting the internal frame to the external frame, and at least one fourth flexible part connecting the internal frame to the external frame. At least one of the second flexible parts is connected to the first mass body in line with the center of gravity of the first mass body. At least one other of the second flexible parts is connected to an eccentric portion of the second mass body.