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公开(公告)号：US20220214531A1
公开(公告)日：2022-07-07
申请号：US17509300
申请日：2021-10-25
Applicant: Samsung Display Co., LTD.
Inventor： Akifumi SANGU , Je Kil RYU , Cheol Ho PARK , Hae Sook LEE , Jin Hong JEUN , Young Su CHAE , Gyoo Wan HAN
Abstract: A laser crystallization apparatus according to an embodiment includes: a light source unit which irradiates a laser beam; and a path conversion unit which converts the laser beam incident from the light source unit into a linear beam having a long axis parallel to a first direction and a short axis parallel to a second direction. The linear beam propagates in a third direction perpendicular to the first direction and the second direction, the path conversion unit includes an incident window extending parallel to a first length direction, an emission window extending parallel to a second direction, a first reflection unit disposed at the same side with the incident window, and a second reflection unit disposed at the same side with the emission window, and the second length direction extends parallel to the first direction in a view of the third direction.
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公开(公告)号：US20200083449A1
公开(公告)日：2020-03-12
申请号：US16406250
申请日：2019-05-08
Applicant: Samsung Display Co., Ltd.
Inventor： Joon Hyung KIM , Young Su CHAE , Woo Hyun KIM , Seung Jun LEE
Abstract: A laser ablation apparatus includes: a laser beam generator including beam sources for generating laser beams, the laser beam generator using a solid-state laser; an output beam generator for generating an output beam using the laser beams; and a substrate stage including at least one stage on which a carrier substrate formed on the front of a panel substrate is disposed. The output beam generator may include: mixers for generating mixed laser beams having two linear-polarizations orthogonal to each other by mixing the laser beams; and a photo molding machine for generating the output beam using the mixed laser beams.
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