公开(公告)号：US20220214531A1

公开(公告)日：2022-07-07

申请号：US17509300

申请日：2021-10-25

Applicant: Samsung Display Co., LTD.

Inventor： Akifumi SANGU ,  Je Kil RYU ,  Cheol Ho PARK ,  Hae Sook LEE ,  Jin Hong JEUN ,  Young Su CHAE ,  Gyoo Wan HAN

IPC: G02B17/00 ,  H01L21/67 ,  B23K26/50

Abstract: A laser crystallization apparatus according to an embodiment includes: a light source unit which irradiates a laser beam; and a path conversion unit which converts the laser beam incident from the light source unit into a linear beam having a long axis parallel to a first direction and a short axis parallel to a second direction. The linear beam propagates in a third direction perpendicular to the first direction and the second direction, the path conversion unit includes an incident window extending parallel to a first length direction, an emission window extending parallel to a second direction, a first reflection unit disposed at the same side with the incident window, and a second reflection unit disposed at the same side with the emission window, and the second length direction extends parallel to the first direction in a view of the third direction.