Deposition apparatus and method for manufacturing organic light emitting diode display using the same
    6.
    发明授权
    Deposition apparatus and method for manufacturing organic light emitting diode display using the same 有权
    用于制造有机发光二极管显示器的沉积设备和方法

    公开(公告)号:US08709837B2

    公开(公告)日:2014-04-29

    申请号:US13666768

    申请日:2012-11-01

    Abstract: A deposition apparatus includes: a deposition source including a spray nozzle linearly arranged in a first direction and discharging a deposition material; and a pair of angle control members disposed at both sides of the deposition source and controlling a discharging direction angle of the deposition material. Each angle control member includes a rotation axis parallel to the first direction, and a plurality of shielding plates installed about the rotation axis and separated from each other by a predetermined interval around the rotation axis. Although the deposition angle is changed according to the increasing of the process time, the deposition angle is compensated to form a uniform thin film. Also, the organic thin film may be uniformly deposited through each pixel of an organic light emitting diode (OLED) display, thereby increasing luminance uniformity for each pixel.

    Abstract translation: 沉积设备包括:沉积源,包括沿第一方向线性排列并排出沉积材料的喷嘴; 以及设置在所述沉积源的两侧并控制所述沉积材料的排出方向角度的一对角度控制构件。 每个角度控制构件包括平行于第一方向的旋转轴线和围绕旋转轴线安装并围绕旋转轴线彼此隔开预定间隔的多个屏蔽板。 尽管沉积角度根据处理时间的增加而改变,但沉积角度被补偿以形成均匀的薄膜。 此外,有机薄膜可以通过有机发光二极管(OLED)显示器的每个像素均匀地沉积,从而增加每个像素的亮度均匀性。

    Deposition Apparatus and Method for Manufacturing Organic Light Emitting Diode Display Using the Same
    7.
    发明申请
    Deposition Apparatus and Method for Manufacturing Organic Light Emitting Diode Display Using the Same 有权
    用于制造使用其的有机发光二极管显示器的沉积装置和方法

    公开(公告)号:US20130323868A1

    公开(公告)日:2013-12-05

    申请号:US13666768

    申请日:2012-11-01

    Abstract: A deposition apparatus includes: a deposition source including a spray nozzle linearly arranged in a first direction and discharging a deposition material; and a pair of angle control members disposed at both sides of the deposition source and controlling a discharging direction angle of the deposition material. Each angle control member includes a rotation axis parallel to the first direction, and a plurality of shielding plates inst7lled about the rotation axis and separated from each other by a predetermined interval around the rotation axis. Although the deposition angle is changed according to the increasing of the process time, the deposition angle is compensated to form a uniform thin film. Also, the organic thin film may be uniformly deposited through each pixel of an organic light emitting diode (OLED) display, thereby increasing luminance uniformity for each pixel.

    Abstract translation: 沉积设备包括:沉积源,包括沿第一方向线性排列并排出沉积材料的喷嘴; 以及设置在所述沉积源的两侧并控制所述沉积材料的排出方向角度的一对角度控制构件。 每个角度控制构件包括平行于第一方向的旋转轴线,并且围绕旋转轴线设置并围绕旋转轴线彼此隔开预定间隔的多个屏蔽板。 尽管沉积角度根据处理时间的增加而改变,但沉积角度被补偿以形成均匀的薄膜。 此外,有机薄膜可以通过有机发光二极管(OLED)显示器的每个像素均匀地沉积,从而增加每个像素的亮度均匀性。

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