公开(公告)号：US20150188399A1

公开(公告)日：2015-07-02

申请号：US14505712

申请日：2014-10-03

Applicant: Samsung Display Co., Ltd.

Inventor： Takayuki Fukasawa ,  Yeon-Keon Moon ,  Sang-woo Sohn ,  Katsushi Kishimoto ,  Sang-Won Shin

IPC: H02K41/02 ,  H02K7/09

CPC classification number: H02K41/031 ,  H01L21/677 ,  H01L21/67709 ,  H01L21/67712 ,  H01L21/6776 ,  H02K7/09

Abstract: Disclosed is an apparatus for transferring substrates capable of stably transferring substrates by using magnetic levitation. The apparatus includes a substrate stage including a substrate loading unit, a first guide block disposed at a first end of the substrate stage and including a first magnet generator, a second guide block disposed at a second end of the substrate stage and including a second magnet generator, a first guide rail accommodating the first magnet generator and including a third magnet generator, and a second guide rail accommodating the second magnet generator and including a fourth magnet generator. The first magnet generator and the third magnet generator exert repulsive force on each other, and the second magnet generator and the fourth magnet generator exert repulsive force on each other.

Abstract translation: 公开了一种通过磁悬浮转移能够稳定地转移衬底的衬底的装置。 该装置包括：衬底台，包括衬底装载单元，设置在衬底台的第一端处的第一引导块，并且包括第一磁体发生器，设置在衬底台的第二端处的第二引导块，并且包括第二磁体 发电机，容纳所述第一磁体发生器并包括第三磁体发生器的第一导轨和容纳所述第二磁体发生器并包括第四磁体发生器的第二导轨。 第一磁体发生器和第三磁体发生器相互施加排斥力，第二磁体发生器和第四磁体发生器相互施加排斥力。

公开(公告)号：US09246377B2

公开(公告)日：2016-01-26

申请号：US14505712

申请日：2014-10-03

Applicant: Samsung Display Co., Ltd.

Inventor： Takayuki Fukasawa ,  Yeon-Keon Moon ,  Sang-woo Sohn ,  Katsushi Kishimoto ,  Sang-Won Shin

IPC: B65G35/00 ,  H02K41/03 ,  H01L21/677 ,  H02K7/09

CPC classification number: H02K41/031 ,  H01L21/677 ,  H01L21/67709 ,  H01L21/67712 ,  H01L21/6776 ,  H02K7/09

Abstract: Disclosed is an apparatus for transferring substrates capable of stably transferring substrates by using magnetic levitation. The apparatus includes a substrate stage including a substrate loading unit, a first guide block disposed at a first end of the substrate stage and including a first magnet generator, a second guide block disposed at a second end of the substrate stage and including a second magnet generator, a first guide rail accommodating the first magnet generator and including a third magnet generator, and a second guide rail accommodating the second magnet generator and including a fourth magnet generator. The first magnet generator and the third magnet generator exert repulsive force on each other, and the second magnet generator and the fourth magnet generator exert repulsive force on each other.

Abstract translation: 公开了一种通过磁悬浮转移能够稳定地转移衬底的衬底的装置。 该装置包括：衬底台，包括衬底装载单元，设置在衬底台的第一端处的第一引导块，并且包括第一磁体发生器，设置在衬底台的第二端处的第二引导块，并且包括第二磁体 发电机，容纳所述第一磁体发生器并包括第三磁体发生器的第一导轨和容纳所述第二磁体发生器并包括第四磁体发生器的第二导轨。 第一磁体发生器和第三磁体发生器相互施加排斥力，第二磁体发生器和第四磁体发生器相互施加排斥力。