Roll to roll light exposure system

    公开(公告)号:US09835951B2

    公开(公告)日:2017-12-05

    申请号:US14933896

    申请日:2015-11-05

    Abstract: Embodiments of the present invention provide a roll-to-roll exposure system having a reference mark array and alignment scope units for precisely measuring the position and orientation of an object on a flexible multilayered circuit film. A roll-to-roll exposure system according to an exemplary embodiment of the present invention includes: a plurality of rolls configured to move a flexible multilayered circuit film having an object positioned thereon; alignment scope units positioned so as to be spaced apart from each other and proximate to the rolls; and at least one exposure unit positioned so as to be spaced proximate to the rolls and spaced apart from sides of the alignment scope units, in which one of the rolls has a reference mark array on its surface.

    Maskless exposure device
    5.
    发明授权
    Maskless exposure device 有权
    无掩模曝光装置

    公开(公告)号:US09383651B2

    公开(公告)日:2016-07-05

    申请号:US14189663

    申请日:2014-02-25

    CPC classification number: G03F7/70158 G03F7/70291

    Abstract: In an aspect, a grating light valve module including: a substrate; and a plurality of ribbons disposed on the substrate, wherein each of the ribbons includes an insulating layer, a conductive layer disposed on the insulating layer, and an anti-oxidation layer disposed on the conductive layer is provided.

    Abstract translation: 一方面,一种光栅光阀模块,包括:基板; 以及设置在基板上的多个带,其中每个带包括绝缘层,设置在绝缘层上的导电层和设置在导电层上的抗氧化层。

    MASKLESS EXPOSURE DEVICE
    6.
    发明申请
    MASKLESS EXPOSURE DEVICE 有权
    MASKLESS曝光装置

    公开(公告)号:US20140340662A1

    公开(公告)日:2014-11-20

    申请号:US14189663

    申请日:2014-02-25

    CPC classification number: G03F7/70158 G03F7/70291

    Abstract: In an aspect, a grating light valve module including: a substrate; and a plurality of ribbons disposed on the substrate, wherein each of the ribbons includes an insulating layer, a conductive layer disposed on the insulating layer, and an anti-oxidation layer disposed on the conductive layer is provided.

    Abstract translation: 一方面,一种光栅光阀模块,包括:基板; 以及设置在基板上的多个带,其中每个带包括绝缘层,设置在绝缘层上的导电层和设置在导电层上的抗氧化层。

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