公开(公告)号：US11465163B2

公开(公告)日：2022-10-11

申请号：US16699796

申请日：2019-12-02

Applicant: Samsung Display Co. Ltd.

Inventor： Jun Ho Jo ,  Min Ho Moon ,  Young Ho Park ,  Young Suck Choi

IPC: C23C16/04 ,  C23C14/04 ,  B05B12/20

Abstract: A deposition mask unit includes a deposition mask sheet including a plurality of openings, and a deposition mask frame including a raised portion at which the deposition mask sheet is attachable to the deposition mask frame. The raised portion includes a support portion, and a bonding portion protruding from an upper surface of the support portion, an upper surface of the bonding portion being curved.

公开(公告)号：US20150068455A1

公开(公告)日：2015-03-12

申请号：US14477427

申请日：2014-09-04

Applicant: Samsung Display Co., Ltd.

Inventor： Choong Ho LEE ,  Tong-Jin Park ,  Doh-Hyoung Lee ,  Sung Sik Yun ,  Da Hee Jeong ,  Jun Ho Jo

IPC: H01L21/033 ,  B05C21/00

CPC classification number: B05C21/005 ,  B23K26/0624 ,  B23K26/082 ,  B23K26/382 ,  B23K2103/02 ,  C23C14/042

Abstract: Disclosed is a method of manufacturing a metal mask. A method of manufacturing a metal mask in accordance with an exemplary embodiment of the present invention includes forming through holes in a plate using a laser, by scanning the laser onto sequentially smaller overlapping portions of the plate.

Abstract translation: 公开了一种制造金属掩模的方法。 根据本发明的示例性实施例的金属掩模的制造方法包括通过将激光扫描到板的顺序地较小的重叠部分上，使用激光在板中形成通孔。

公开(公告)号：US09377681B2

公开(公告)日：2016-06-28

申请号：US14021489

申请日：2013-09-09

Applicant: Samsung Display Co., Ltd.

Inventor： Doh-Hyoung Lee ,  Jun Ho Jo

IPC: B23K26/00 ,  B23K26/16 ,  G03F1/76 ,  G03F7/20 ,  B23K26/067

CPC classification number: G03F1/76 ,  B23K26/067 ,  G03F7/2053 ,  G03F7/70383 ,  G03F7/70875

Abstract: A mask manufacturing apparatus includes a laser irradiator, a stage, a frame, and a heat spreader sheet. The laser irradiator divides a laser beam into a plurality of sub-laser beams and irradiates the sub-laser beams to a shadow mask material which is placed over a stage. The frame is disposed over the stage to support the shadow mask material. The heat spreader sheet makes contact with the shadow mask material, absorbs heat generated from the shadow mask material, and dissipates the heat to surroundings of the shadow mask material. Accordingly, the shadow mask material is protected from overheating.

Abstract translation: 掩模制造装置包括激光照射器，台架，框架和散热片。 激光照射器将激光束分割成多个子激光束，并将副激光束照射到放置在台上的荫罩材料。 框架设置在舞台上以支撑荫罩材料。 散热片与荫罩材料接触，吸收由荫罩材料产生的热量，并将热量散发到荫罩材料的周围。 因此，防止荫罩材料过热。

公开(公告)号：US09656291B2

公开(公告)日：2017-05-23

申请号：US14477427

申请日：2014-09-04

Applicant: Samsung Display Co., Ltd.

Inventor： Choong Ho Lee ,  Tong-Jin Park ,  Doh-Hyoung Lee ,  Sung Sik Yun ,  Da Hee Jeong ,  Jun Ho Jo

IPC: B05C21/00 ,  B23K26/382 ,  C23C14/04 ,  B23K26/082 ,  B23K26/0622 ,  B23K103/02

CPC classification number: B05C21/005 ,  B23K26/0624 ,  B23K26/082 ,  B23K26/382 ,  B23K2103/02 ,  C23C14/042

Abstract: Disclosed is a method of manufacturing a metal mask. A method of manufacturing a metal mask in accordance with an exemplary embodiment of the present invention includes forming through holes in a plate using a laser, by scanning the laser onto sequentially smaller overlapping portions of the plate.

公开(公告)号：US09457426B2

公开(公告)日：2016-10-04

申请号：US14021700

申请日：2013-09-09

Applicant: Samsung Display Co., Ltd.

Inventor： Doh-Hyoung Lee ,  Jun Ho Jo

IPC: B23K26/00 ,  C23C16/04 ,  B23K26/06 ,  B23K26/08 ,  B23K26/12 ,  C23C14/04 ,  B23K26/40

CPC classification number: B23K26/0093 ,  B23K26/0648 ,  B23K26/082 ,  B23K26/0853 ,  B23K26/127 ,  B23K26/364 ,  B23K26/40 ,  B23K2101/18 ,  B23K2103/04 ,  B23K2103/05 ,  B23K2103/50 ,  C23C14/042 ,  C23C16/042

Abstract: A mask substrate that includes a first area and a second area surrounding the first area is provided. Then, a laser beam is irradiated on the mask substrate to at least partly remove a material of the second area. After that, a physical force is applied to the mask substrate to separate the first area from the mask substrate thereby forming an opening through the mask substrate.

Abstract translation: 提供了包括第一区域和围绕第一区域的第二区域的掩模基板。 然后，将激光束照射在掩模基板上，以至少部分地去除第二区域的材料。 之后，对掩模基板施加物理力以将第一区域与掩模基板分离，从而形成通过掩模基板的开口。