公开(公告)号：US20150104608A1

公开(公告)日：2015-04-16

申请号：US14320835

申请日：2014-07-01

Applicant: Samsung Display Co., Ltd.

Inventor： Doh-Hyoung Lee ,  Da Hee Jeong

IPC: B23K26/38 ,  B23K26/36

CPC classification number: B23K26/362 ,  B23K26/361 ,  B23K26/382 ,  C23C14/042 ,  H01L51/0011 ,  H01L51/56 ,  Y10T428/24273

Abstract: A manufacturing method of a metal mask including a plurality of pattern openings includes forming a first depression portion by radiating a first laser beam focused on a plane beyond a subject under processing, and then forming the plurality of pattern openings at a bottom part of the first depression portion by radiating a second laser beam focused on the bottom part of the first depression portion. Because the energy of the second laser beam is less than the first laser beam, manufacturing time of the mask is reduced while the sidewalls of the pattern opening are smooth and may be inclined, to allow for a better deposition of organic emission material onto a large display.

Abstract translation: 包括多个图形开口的金属掩模的制造方法包括：通过将聚焦在超过加工对象的平面上的第一激光束照射形成第一凹陷部分，然后在第一凹部的底部形成多个图案孔 通过照射聚焦在第一凹陷部分的底部上的第二激光束来抑制凹陷部分。 因为第二激光束的能量小于第一激光束，所以掩模的制造时间减小，而图案开口的侧壁是平滑的并且可以倾斜，以便有机发射材料更好地沉积到大的 显示。

公开(公告)号：US09656291B2

公开(公告)日：2017-05-23

申请号：US14477427

申请日：2014-09-04

Applicant: Samsung Display Co., Ltd.

Inventor： Choong Ho Lee ,  Tong-Jin Park ,  Doh-Hyoung Lee ,  Sung Sik Yun ,  Da Hee Jeong ,  Jun Ho Jo

IPC: B05C21/00 ,  B23K26/382 ,  C23C14/04 ,  B23K26/082 ,  B23K26/0622 ,  B23K103/02

CPC classification number: B05C21/005 ,  B23K26/0624 ,  B23K26/082 ,  B23K26/382 ,  B23K2103/02 ,  C23C14/042

Abstract: Disclosed is a method of manufacturing a metal mask. A method of manufacturing a metal mask in accordance with an exemplary embodiment of the present invention includes forming through holes in a plate using a laser, by scanning the laser onto sequentially smaller overlapping portions of the plate.

公开(公告)号：US20150068455A1

公开(公告)日：2015-03-12

申请号：US14477427

申请日：2014-09-04

Applicant: Samsung Display Co., Ltd.

Inventor： Choong Ho LEE ,  Tong-Jin Park ,  Doh-Hyoung Lee ,  Sung Sik Yun ,  Da Hee Jeong ,  Jun Ho Jo

IPC: H01L21/033 ,  B05C21/00

CPC classification number: B05C21/005 ,  B23K26/0624 ,  B23K26/082 ,  B23K26/382 ,  B23K2103/02 ,  C23C14/042

Abstract: Disclosed is a method of manufacturing a metal mask. A method of manufacturing a metal mask in accordance with an exemplary embodiment of the present invention includes forming through holes in a plate using a laser, by scanning the laser onto sequentially smaller overlapping portions of the plate.

Abstract translation: 公开了一种制造金属掩模的方法。 根据本发明的示例性实施例的金属掩模的制造方法包括通过将激光扫描到板的顺序地较小的重叠部分上，使用激光在板中形成通孔。

公开(公告)号：US09676063B2

公开(公告)日：2017-06-13

申请号：US14320835

申请日：2014-07-01

Applicant: Samsung Display Co., Ltd.

Inventor： Doh-Hyoung Lee ,  Da Hee Jeong

IPC: B23K26/38 ,  C23C14/04 ,  B23K26/382 ,  B23K26/362 ,  H01L51/56 ,  H01L51/00

CPC classification number: B23K26/362 ,  B23K26/361 ,  B23K26/382 ,  C23C14/042 ,  H01L51/0011 ,  H01L51/56 ,  Y10T428/24273

Abstract: A manufacturing method of a metal mask including a plurality of pattern openings includes forming a first depression portion by radiating a first laser beam focused on a plane beyond a subject under processing, and then forming the plurality of pattern openings at a bottom part of the first depression portion by radiating a second laser beam focused on the bottom part of the first depression portion. Because the energy of the second laser beam is less than the first laser beam, manufacturing time of the mask is reduced while the sidewalls of the pattern opening are smooth and may be inclined, to allow for a better deposition of organic emission material onto a large display.