公开(公告)号：US20180133842A1

公开(公告)日：2018-05-17

申请号：US15814231

申请日：2017-11-15

Applicant: Samsung Display Co., Ltd.

Inventor： Ilyoung Jeong ,  Gyoowan Han ,  Jaeil Kim ,  Kuhyun Kang ,  Soobum Park

IPC: B23K26/38 ,  B23K26/04 ,  B23K26/0622

CPC classification number: B23K26/38 ,  B23K26/03 ,  B23K26/04 ,  B23K26/0622 ,  B23K26/082 ,  B23K26/0853 ,  B23K26/0876 ,  B23K26/402 ,  B23K2103/54 ,  C03B33/04 ,  C03B33/091

Abstract: A laser cutting apparatus and a laser cutting method are provided. A laser cutting method includes: preparing an object on a stage; cutting the object into a set shape by relatively moving and irradiating a laser beam along the set shape with respect to the object; and performing uniform heating compensation to reduce accumulation of thermal energy of the laser beam resulting from a change of speed at a shift point where a travelling direction of the laser beam with respect to the object changes.

公开(公告)号：US10751838B2

公开(公告)日：2020-08-25

申请号：US15814231

申请日：2017-11-15

Applicant: Samsung Display Co., Ltd.

Inventor： Ilyoung Jeong ,  Gyoowan Han ,  Jaeil Kim ,  Kuhyun Kang ,  Soobum Park

IPC: B23K26/38 ,  B23K26/082 ,  B23K26/03 ,  B23K26/08 ,  B23K26/402 ,  C03B33/04 ,  C03B33/09 ,  B23K26/0622 ,  B23K26/04 ,  B23K103/00

Abstract: A laser cutting apparatus and a laser cutting method are provided. A laser cutting method includes: preparing an object on a stage; cutting the object into a set shape by relatively moving and irradiating a laser beam along the set shape with respect to the object; and performing uniform heating compensation to reduce accumulation of thermal energy of the laser beam resulting from a change of speed at a shift point where a travelling direction of the laser beam with respect to the object changes.

公开(公告)号：US12059743B2

公开(公告)日：2024-08-13

申请号：US16746563

申请日：2020-01-17

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Seunghwan Jung ,  Seokhwan Kim ,  Sanghyun Jung ,  Woodong Kim ,  Jaeil Kim ,  Ilyoung Jeong ,  Jongkil Han

IPC: B23K26/03 ,  B23K26/04 ,  B23K26/08 ,  B23K37/04 ,  G05B19/402

CPC classification number: B23K26/032 ,  B23K26/04 ,  B23K26/083 ,  B23K37/04 ,  G05B19/402 ,  G05B2219/36199

Abstract: An apparatus for laser machining is provided including a stage for supporting a substrate and a controller for generating an error compensation table, a motor driver for moving the stage, and an error compensation unit for generating a table to compensate for an error. The error compensation unit includes a grid plate disposed on the stage and an imaging unit for imaging the grid plate. The motor driver outputs a position synchronization signal to the imaging unit according to a position of the stage. The imaging unit receives the position synchronization signal from the motor driver and images the grid plate while moving the stage.