公开(公告)号：US20240271267A1

公开(公告)日：2024-08-15

申请号：US18504026

申请日：2023-11-07

Applicant: Samsung Display Co., Ltd.

Inventor： JUNGHYUN AHN ,  JAESUK MOON ,  SEUNGJIN LEE

IPC: C23C14/04 ,  H10K71/16

CPC classification number: C23C14/042 ,  H10K71/166

Abstract: A deposition apparatus includes a mask frame having a frame shape, masks disposed on the mask frame, extending in a selected direction, disposed in an intersection direction intersecting the selected direction, and including cell areas, a magnet plate disposed on the masks, and magnet parts connected to a lower surface of the magnet plate. At least one of the plurality of magnet parts moves in the selected direction.

公开(公告)号：US20200259126A1

公开(公告)日：2020-08-13

申请号：US16723687

申请日：2019-12-20

Applicant: Samsung Display Co., Ltd.

Inventor： JAESUK MOON ,  Junghyun AHN ,  JONGBUM KIM ,  SEUNGJIN LEE

IPC: H01L51/56 ,  C23C14/04

Abstract: A mask assembly includes a frame in which an opening is defined, a support portion on the frame and overlapping with the opening, and a mask on the support portion and covering at least a portion of the opening. The support portion may include a central layer, a first outer layer on a first surface of the central layer, and a second outer layer on a second surface of the central layer, the second surface being opposite to the first surface.

公开(公告)号：US20230317492A1

公开(公告)日：2023-10-05

申请号：US18104453

申请日：2023-02-01

Applicant: Samsung Display Co., Ltd.

Inventor： EUIGYU KIM ,  SANG MIN YI ,  JUNHYEUK KO ,  JONGBUM KIM ,  JAESUK MOON ,  HONG-KYUN AHN ,  KYUNGHOON CHUNG

IPC: H01L21/683

CPC classification number: H01L21/6833

Abstract: Disclosed is a deposition mask stage comprising a stage frame, chucks combined with the stage frame, and support blocks on a back side of the stage frame. The chucks are spaced apart from each other in a first direction and a second direction that are defined in an extending direction of the stage frame. The first and second directions intersect each other. The support blocks are spaced apart from each other in the first direction and the second direction on the back side of the stage frame.

公开(公告)号：US20230058121A1

公开(公告)日：2023-02-23

申请号：US18048686

申请日：2022-10-21

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： JAESUK MOON ,  Junghyun AHN ,  JONGBUM KIM ,  SEUNGJIN LEE

IPC: H01L51/56 ,  C23C14/04

Abstract: A mask assembly includes a frame in which an opening is defined, a support portion on the frame and overlapping with the opening, and a mask on the support portion and covering at least a portion of the opening. The support portion may include a central layer, a first outer layer on a first surface of the central layer, and a second outer layer on a second surface of the central layer, the second surface being opposite to the first surface.

公开(公告)号：US20240384390A1

公开(公告)日：2024-11-21

申请号：US18609717

申请日：2024-03-19

Applicant: Samsung Display Co., LTD.

Inventor： YONGHWAN KIM ,  JAESUK MOON ,  SANGSHIN LEE ,  SEUNGJIN LEE

IPC: C23C14/04 ,  H10K71/16

Abstract: A mask assembly includes: a mask and a mask frame, which supports the mask. The mask includes: a plurality of sub-masks, which are arranged in a first direction and each include a short side that extends in the first direction and a long side that extends in a second direction crossing the first direction; and a connecting stick, which overlaps the long side in a plan view and connects two sub-masks adjacent to each other among the plurality of sub-masks. Each of the plurality of sub-masks includes: a central part including a cell region defining a plurality of holes therein; and a welding part disposed along the long side. The connecting stick and the welding part are connected with each other through a plurality of welding agents.

公开(公告)号：US20240093347A1

公开(公告)日：2024-03-21

申请号：US18468863

申请日：2023-09-18

Applicant: Samsung Display Co., LTD.

Inventor： Jung Hyun AHN ,  JAESUK MOON ,  Seung Jin LEE

IPC: C23C14/04 ,  C23C14/12 ,  C23C14/50 ,  H10K71/16

CPC classification number: C23C14/042 ,  C23C14/12 ,  C23C14/50 ,  H10K71/166

Abstract: An embodiment provides a deposition device including a magnet part that includes magnets; and a substrate support that faces the magnet part and that supports a substrate, the substrate support includes a support plate and patterns formed on a first surface of the support plate, and each of the patterns corresponds to a space between neighboring magnets among the magnets or corresponds to the magnets.

公开(公告)号：US20240026520A1

公开(公告)日：2024-01-25

申请号：US18323346

申请日：2023-05-24

Applicant: Samsung Display Co., Ltd.

Inventor： JUNGHYUN AHN ,  JAESUK MOON ,  SEUNGJIN LEE

IPC: C23C14/04 ,  C23C14/24

CPC classification number: C23C14/042 ,  C23C14/24 ,  H10K71/166

Abstract: Disclosed is a deposition apparatus comprising a mask frame having a frame shape, masks on the mask frame, a magnet plate on the masks, rotating parts connected to a lower portion of the magnet plate, and magnet units connected to the rotating parts, and configured to be rotated by the rotating parts such that polarities of the magnet units are arranged in a direction crossing an extension direction of the masks.

公开(公告)号：US20240352570A1

公开(公告)日：2024-10-24

申请号：US18443710

申请日：2024-02-16

Applicant: Samsung Display Co., Ltd.

Inventor： JUNGHYUN AHN ,  JAESUK MOON ,  SEUNGJIN LEE

IPC: C23C14/04 ,  H10K59/12 ,  H10K71/16

CPC classification number: C23C14/042 ,  H10K59/12 ,  H10K71/166

Abstract: A deposition apparatus includes a mask frame, a plurality of masks disposed on the mask frame, a first plate disposed on the masks, a second plate disposed on the first plate, a plurality of upper driving units disposed between the first plate and the second plate, a plurality of lower driving units disposed between the upper driving units and the first plate, and a plurality of magnet units respectively disposed in magnet unit accommodation spaces. The upper driving units extend in a first direction and are arranged in a second direction intersecting the first direction, and the lower driving units extend in the second direction and are arranged in the first direction.

公开(公告)号：US20240026519A1

公开(公告)日：2024-01-25

申请号：US18311389

申请日：2023-05-03

Applicant: Samsung Display Co., LTD.

Inventor： Jung Hyun AHN ,  JAESUK MOON ,  Seung Jin LEE

IPC: C23C14/04 ,  H01F7/02 ,  C23C16/04

CPC classification number: C23C14/042 ,  H01F7/02 ,  C23C16/042

Abstract: A deposition device includes a magnet portion including a plurality of magnets, and a substrate support that supports a substrate and faces the magnet portion. The substrate support includes a plurality of holes, and each of the plurality of holes is disposed on the substrate support corresponding to a space between corresponding adjacent ones of the plurality of magnets.

公开(公告)号：US20230323527A1

公开(公告)日：2023-10-12

申请号：US18096300

申请日：2023-01-12

Applicant: Samsung Display Co., Ltd.

Inventor： JUNGHYUN AHN ,  JAESUK MOON ,  SEUNGJIN LEE

IPC: C23C16/04

CPC classification number: C23C16/042

Abstract: A mask assembly manufacturing apparatus for manufacturing a mask assembly, including a frame through which an opening is defined and a support bar disposed above the frame, includes a stage on which the frame is placed, an alignment unit disposed above the stage and including magnetic units, and a fixing unit disposed between the stage and the alignment unit and including a first sub-fixing unit which fixes one end of the support bar and a second sub-fixing unit which fixes another end of the support bar and spaced apart from the first sub-fixing unit in a first direction. The magnetic units includes first magnetic units disposed above the support bar and second magnetic units disposed above the support bar, spaced apart from the first magnetic units in a second direction perpendicular to the first direction, and having a polarity opposite to a polarity of the first magnetic units.