公开(公告)号：US20230317492A1

公开(公告)日：2023-10-05

申请号：US18104453

申请日：2023-02-01

Applicant: Samsung Display Co., Ltd.

Inventor： EUIGYU KIM ,  SANG MIN YI ,  JUNHYEUK KO ,  JONGBUM KIM ,  JAESUK MOON ,  HONG-KYUN AHN ,  KYUNGHOON CHUNG

IPC: H01L21/683

CPC classification number: H01L21/6833

Abstract: Disclosed is a deposition mask stage comprising a stage frame, chucks combined with the stage frame, and support blocks on a back side of the stage frame. The chucks are spaced apart from each other in a first direction and a second direction that are defined in an extending direction of the stage frame. The first and second directions intersect each other. The support blocks are spaced apart from each other in the first direction and the second direction on the back side of the stage frame.

公开(公告)号：US20230058121A1

公开(公告)日：2023-02-23

申请号：US18048686

申请日：2022-10-21

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： JAESUK MOON ,  Junghyun AHN ,  JONGBUM KIM ,  SEUNGJIN LEE

IPC: H01L51/56 ,  C23C14/04

Abstract: A mask assembly includes a frame in which an opening is defined, a support portion on the frame and overlapping with the opening, and a mask on the support portion and covering at least a portion of the opening. The support portion may include a central layer, a first outer layer on a first surface of the central layer, and a second outer layer on a second surface of the central layer, the second surface being opposite to the first surface.

公开(公告)号：US20240068082A1

公开(公告)日：2024-02-29

申请号：US18218485

申请日：2023-07-05

Applicant: Samsung Display Co., LTD.

Inventor： JUNHYEUK KO ,  MINGOO KANG ,  EUIGYU KIM ,  JONGBUM KIM ,  Sukha RYU ,  SANG MIN YI ,  KYUNGHOON CHUNG

IPC: C23C14/04 ,  H10K71/10

CPC classification number: C23C14/042 ,  H10K71/191 ,  H01L21/682

Abstract: A deposition apparatus includes a mask, a mask frame, a stage disposed on a rear surface of the mask frame, and first to third external force applying parts disposed on the stage. Each of the first portion and the second portion includes a support and a driving part which moves the support. The first to third external force applying parts applies external force to the mask frame to control a shape of the mask frame.

公开(公告)号：US20210391541A1

公开(公告)日：2021-12-16

申请号：US17206757

申请日：2021-03-19

Applicant: Samsung Display Co., Ltd.

Inventor： SANGHOON KIM ,  JONGBUM KIM ,  YEONJU KANG ,  JONGSUNG PARK ,  SANGSHIN LEE ,  SEUNGJIN LEE ,  EUNJOUNG JUNG

IPC: H01L51/00 ,  C23C14/04 ,  H01L51/56

Abstract: A mask assembly includes a mask and a blocking stick. The mask includes a pattern region formed therein with openings and extends in a first direction. The blocking stick is disposed under the mask and overlaps a first side portion of the mask. The mask further includes dummy opening regions and opening regions. The dummy opening regions are arranged in the first direction in the first side portion of the mask, and are formed therein with openings. The opening regions are arranged in the first direction in a second side portion which is opposite to the first side portion of the mask and correspond to the dummy opening regions, respectively. The number of the openings per a unit area in each of the dummy opening region and the opening region is smaller than the number of the openings per a unit area in the pattern region.

公开(公告)号：US20200259126A1

公开(公告)日：2020-08-13

申请号：US16723687

申请日：2019-12-20

Applicant: Samsung Display Co., Ltd.

Inventor： JAESUK MOON ,  Junghyun AHN ,  JONGBUM KIM ,  SEUNGJIN LEE

IPC: H01L51/56 ,  C23C14/04

Abstract: A mask assembly includes a frame in which an opening is defined, a support portion on the frame and overlapping with the opening, and a mask on the support portion and covering at least a portion of the opening. The support portion may include a central layer, a first outer layer on a first surface of the central layer, and a second outer layer on a second surface of the central layer, the second surface being opposite to the first surface.