公开(公告)号：US20240271267A1

公开(公告)日：2024-08-15

申请号：US18504026

申请日：2023-11-07

Applicant: Samsung Display Co., Ltd.

Inventor： JUNGHYUN AHN ,  JAESUK MOON ,  SEUNGJIN LEE

IPC: C23C14/04 ,  H10K71/16

CPC classification number: C23C14/042 ,  H10K71/166

Abstract: A deposition apparatus includes a mask frame having a frame shape, masks disposed on the mask frame, extending in a selected direction, disposed in an intersection direction intersecting the selected direction, and including cell areas, a magnet plate disposed on the masks, and magnet parts connected to a lower surface of the magnet plate. At least one of the plurality of magnet parts moves in the selected direction.

公开(公告)号：US20240026520A1

公开(公告)日：2024-01-25

申请号：US18323346

申请日：2023-05-24

Applicant: Samsung Display Co., Ltd.

Inventor： JUNGHYUN AHN ,  JAESUK MOON ,  SEUNGJIN LEE

IPC: C23C14/04 ,  C23C14/24

CPC classification number: C23C14/042 ,  C23C14/24 ,  H10K71/166

Abstract: Disclosed is a deposition apparatus comprising a mask frame having a frame shape, masks on the mask frame, a magnet plate on the masks, rotating parts connected to a lower portion of the magnet plate, and magnet units connected to the rotating parts, and configured to be rotated by the rotating parts such that polarities of the magnet units are arranged in a direction crossing an extension direction of the masks.

公开(公告)号：US20240352570A1

公开(公告)日：2024-10-24

申请号：US18443710

申请日：2024-02-16

Applicant: Samsung Display Co., Ltd.

Inventor： JUNGHYUN AHN ,  JAESUK MOON ,  SEUNGJIN LEE

IPC: C23C14/04 ,  H10K59/12 ,  H10K71/16

CPC classification number: C23C14/042 ,  H10K59/12 ,  H10K71/166

Abstract: A deposition apparatus includes a mask frame, a plurality of masks disposed on the mask frame, a first plate disposed on the masks, a second plate disposed on the first plate, a plurality of upper driving units disposed between the first plate and the second plate, a plurality of lower driving units disposed between the upper driving units and the first plate, and a plurality of magnet units respectively disposed in magnet unit accommodation spaces. The upper driving units extend in a first direction and are arranged in a second direction intersecting the first direction, and the lower driving units extend in the second direction and are arranged in the first direction.

公开(公告)号：US20230323527A1

公开(公告)日：2023-10-12

申请号：US18096300

申请日：2023-01-12

Applicant: Samsung Display Co., Ltd.

Inventor： JUNGHYUN AHN ,  JAESUK MOON ,  SEUNGJIN LEE

IPC: C23C16/04

CPC classification number: C23C16/042

Abstract: A mask assembly manufacturing apparatus for manufacturing a mask assembly, including a frame through which an opening is defined and a support bar disposed above the frame, includes a stage on which the frame is placed, an alignment unit disposed above the stage and including magnetic units, and a fixing unit disposed between the stage and the alignment unit and including a first sub-fixing unit which fixes one end of the support bar and a second sub-fixing unit which fixes another end of the support bar and spaced apart from the first sub-fixing unit in a first direction. The magnetic units includes first magnetic units disposed above the support bar and second magnetic units disposed above the support bar, spaced apart from the first magnetic units in a second direction perpendicular to the first direction, and having a polarity opposite to a polarity of the first magnetic units.