公开(公告)号：US20180340258A1

公开(公告)日：2018-11-29

申请号：US15990051

申请日：2018-05-25

Applicant: Samsung Display Co., Ltd.

Inventor： Jaihyuk CHOI ,  Jong-hoon PARK ,  Kyungjoo MIN ,  Wonwoong PARK ,  Sukwon JUNG ,  Hyunwoo JOO ,  Myungsoo HUH

IPC: C23C16/50 ,  C23C16/458 ,  H01J37/32

Abstract: A chemical vapor deposition (CVD) system may include a chamber, a susceptor provided in the chamber to support a substrate, a gas distribution part provided over the susceptor, a first ground strap bar provided on a down-side surface of the chamber and electrically connected to the chamber, a second ground strap bar provided on a bottom surface of the susceptor and electrically connected to the susceptor, and a plurality of ground straps electrically connected to the first and second ground strap bars, each of the plurality of ground straps including two opposite portions that are fastened to the first and second ground strap bars, respectively.

公开(公告)号：US20230130913A1

公开(公告)日：2023-04-27

申请号：US17859623

申请日：2022-07-07

Applicant: Samsung Display Co., LTD.

Inventor： Inkyo KIM ,  Sukwon JUNG ,  Eunsoo LEE ,  Hyunwoo JOO

IPC: H01J37/32

Abstract: A plasma monitoring apparatus includes a flow control portion including a first port through which an emission light emitted from a plasma is introduced or discharged, and a second port through which the emission light emitted from the plasma is introduced or discharged and has a shape different from a shape of the first port, a transparent glass window extended to the flow control portion and passing an emission light, and a spectroscopic apparatus optically connected to the transparent glass window through an optical fiber and detecting an intensity of the emission light.

公开(公告)号：US20190081121A1

公开(公告)日：2019-03-14

申请号：US15949614

申请日：2018-04-10

Applicant: Samsung Display Co., Ltd.

Inventor： Jaihyuk CHOI ,  Sukwon JUNG ,  Myungsoo HUH ,  Seok-jin KO ,  Hyunwoo JOO

IPC: H01L27/32

CPC classification number: H01L27/3262 ,  H01L27/1229 ,  H01L27/1274 ,  H01L29/78675 ,  H01L29/78684 ,  H01L29/78696 ,  H01L2227/323

Abstract: Provided is a display apparatus. The display apparatus includes a base substrate, a first transistor disposed on the base substrate and including a first semiconductor layer including a first layer and a second layer disposed to come into contact with a first layer and including a compound made of at least two materials of a Group IV elements, a first control electrode overlapping the first semiconductor layer, a first input electrode connected to the first semiconductor layer, and a first output electrode connected to the first semiconductor layer, a second transistor and an organic light emitting diode.