公开(公告)号：US20230130913A1

公开(公告)日：2023-04-27

申请号：US17859623

申请日：2022-07-07

Applicant: Samsung Display Co., LTD.

Inventor： Inkyo KIM ,  Sukwon JUNG ,  Eunsoo LEE ,  Hyunwoo JOO

IPC: H01J37/32

Abstract: A plasma monitoring apparatus includes a flow control portion including a first port through which an emission light emitted from a plasma is introduced or discharged, and a second port through which the emission light emitted from the plasma is introduced or discharged and has a shape different from a shape of the first port, a transparent glass window extended to the flow control portion and passing an emission light, and a spectroscopic apparatus optically connected to the transparent glass window through an optical fiber and detecting an intensity of the emission light.