公开(公告)号：US20220205110A1

公开(公告)日：2022-06-30

申请号：US17566427

申请日：2021-12-30

Applicant: Samsung Display Co., Ltd.

Inventor： BONG-KYUN KIM ,  CHANGWOO KWON ,  SEUNGBO SHIM ,  ILBAE AHN ,  SEOKJUN JANG ,  JINSUEK KIM ,  JI-HUN PARK ,  YONG-SU LEE ,  YANGIL JEON ,  GYU-PO KIM ,  SANG-WOO KIM ,  HYUN-CHEOL SHIN

IPC: C23F1/26 ,  C23F1/18 ,  H01L21/027

Abstract: An etchant composition of an embodiment may etch a multi-layered film of titanium/copper and may include about 5 wt % to about 20 wt % of persulfate, about 0.1 wt % to about 5 wt % of phosphoric acid or phosphate, about 0.01 wt % to about 2 wt % of a carbonyl ring compound, about 0.01 wt % to about 1 wt % of a 3-nitrogen ring compound, about 0.1 wt % to about 2 wt % of a 4-nitrogen ring compound, about 0.1 wt % to about 0.9 wt % of a fluorine compound, about 0.1 wt % to about 0.5 wt % of hydrogen about 1 wt % to about 3 wt % of a zwitterionic compound, and sulfate, water which is included in an amount that makes the total weight of the entire composition about 100 wt %.