LASER IRRADIATION METHOD AND LASER IRRADIATION APPARATUS

    公开(公告)号:US20200185222A1

    公开(公告)日:2020-06-11

    申请号:US16592087

    申请日:2019-10-03

    Abstract: A laser irradiation method includes a first scanning wherein a laser beam is scanned in a first region having a width in the X direction and a length in the Y direction by moving a laser irradiation area on the surface of the substrate along the Y direction using a spot laser beam, and a second scanning wherein laser beam is scanned in a second region having a width in the X direction and a length in the Y direction by moving a laser irradiation area on the surface of the substrate along the Y direction using the spot laser beam. A center of the second region is spaced apart from a center of the first region in the X direction.

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