THIN FILM TRANSISTOR, THIN FILM TRANSISTOR SUBSTRATE, DISPLAY APPARATUS AND METHOD OF MANUFACTURING THIN FILM TRANSISTOR
    2.
    发明申请
    THIN FILM TRANSISTOR, THIN FILM TRANSISTOR SUBSTRATE, DISPLAY APPARATUS AND METHOD OF MANUFACTURING THIN FILM TRANSISTOR 有权
    薄膜晶体管,薄膜晶体管基板,显示装置及制造薄膜晶体管的方法

    公开(公告)号:US20150255278A1

    公开(公告)日:2015-09-10

    申请号:US14478273

    申请日:2014-09-05

    Abstract: A thin film transistor including a gate electrode; an active layer insulated from the gate electrode; a source electrode and a drain electrode that are insulated from the gate electrode and are electrically connected to the active layer; a first etch stopper layer that is formed of an insulation material and contacts a portion of the active layer located between areas of the active layer that are electrically connected to the source electrode and the drain electrode; a second etch stopper layer on the first etch stopper layer, the second etch stopper layer being formed of an insulation material of a same type as the insulation material used to form the first etch stopper layer, the second etch stopper layer having a higher density than the first etch stopper layer; and a third etch stopper layer on the second etch stopper layer.

    Abstract translation: 一种薄膜晶体管,包括栅电极; 与栅电极绝缘的有源层; 源电极和漏电极,与栅电极绝缘并且电连接到有源层; 第一蚀刻停止层,其由绝缘材料形成并且与位于有源层的与源电极和漏电极电连接的区域之间的有源层的一部分接触; 在第一蚀刻停止层上的第二蚀刻停止层,第二蚀刻停止层由与用于形成第一蚀刻停止层的绝缘材料相同类型的绝缘材料形成,第二蚀刻停止层的密度高于 第一蚀刻停止层; 以及第二蚀刻停止层上的第三蚀刻停止层。

    THIN FILM TRANSISTOR SUBSTRATE AND METHOD OF MANUFACTURING THE SAME
    3.
    发明申请
    THIN FILM TRANSISTOR SUBSTRATE AND METHOD OF MANUFACTURING THE SAME 有权
    薄膜晶体管基板及其制造方法

    公开(公告)号:US20150069382A1

    公开(公告)日:2015-03-12

    申请号:US14467848

    申请日:2014-08-25

    Abstract: A thin film transistor substrate includes a substrate, a data line disposed on the substrate and which extends substantially in a predetermined direction, a light blocking layer disposed on the substrate and including a metal oxide including zinc manganese oxide, zinc cadmium oxide, zinc phosphorus oxide or zinc tin oxide, a gate electrode disposed on the light blocking layer, a signal electrode including a source electrode and a drain electrode spaced apart from the source electrode, where the source electrode is connected to the data line, and a semiconductor pattern disposed between the source electrode and the drain electrode.

    Abstract translation: 薄膜晶体管基板包括基板,设置在基板上并且基本上沿预定方向延伸的数据线,设置在基板上的遮光层,并且包括包含氧化锰锌,氧化锌锌,氧化锌锌的金属氧化物 或氧化锌锡,设置在所述遮光层上的栅电极,包括源电极和与所述源电极间隔开的漏电极的信号电极,所述源电极与所述数据线连接,以及设置在所述源电极之间的半导体图案, 源电极和漏电极。

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