公开(公告)号：US20230193449A1

公开(公告)日：2023-06-22

申请号：US17981716

申请日：2022-11-07

Applicant: Samsung Display Co., Ltd.

Inventor： JEONGKUK KIM ,  MINHO MOON ,  SEUNGYONG SONG ,  KYU HWAN HWANG

IPC: C23C14/04 ,  C23C14/24

CPC classification number: C23C14/042 ,  C23C14/24 ,  H01L27/3246

Abstract: A mask assembly includes an open mask provided with an opening and disposed on a frame, a unit mask disposed on the open mask, the unit mask including a deposition portion and welding portion, deposition openings are defined on the deposition portion to overlap the opening in a plan view, and the welding portions each protrude from the deposition portion in a protrusion direction away from the deposition portion, welding protrusions respectively disposed on the welding portions, and at least one residual structure including a residual welding portion separated from the unit mask and a residual welding protrusion disposed on the residual welding portion. The at least one residual structure is disposed between the welding portions.

公开(公告)号：US20230154941A1

公开(公告)日：2023-05-18

申请号：US17949346

申请日：2022-09-21

Applicant: Samsung Display Co., Ltd.

Inventor： JEONGKUK KIM ,  HWI KIM ,  YOUNGMIN MOON ,  SEUNGYONG SONG ,  AREUM LEE ,  EUNBEE JO ,  KYU HWAN HWANG

IPC: H01L27/12 ,  H01L51/00

CPC classification number: H01L27/1288 ,  H01L51/0011 ,  H01L51/0014

Abstract: A mask assembly includes a frame including a frame opening, and a mask disposed on the frame. The mask includes a body portion including an upper surface and a lower surface opposing each other and deposition openings spaced apart from each other, protrusions protruding from the upper surface and surrounding the corresponding deposition openings, and at least one step formation pattern overlapping the protrusions in a plan view and disposed in the body portion.

公开(公告)号：US20240301542A1

公开(公告)日：2024-09-12

申请号：US18402248

申请日：2024-01-02

Applicant: Samsung Display Co., Ltd.

Inventor： JEONGKUK KIM ,  DUCKJUNG LEE ,  WONJE CHO

IPC: C23C14/04

CPC classification number: C23C14/042

Abstract: A method for manufacturing a mask assembly includes disposing a preliminary mask assembly including a frame having a frame opening and an open sheet having a plurality of first openings and including a first portion and a second portion, welding a preliminary unit mask to the first portion of the open sheet after stretching the preliminary unit mask on the preliminary mask assembly, welding the preliminary unit mask to the second portion of the open sheet, forming a plurality of unit masks by emitting laser onto the preliminary unit mask overlapping the second portion of the open sheet, and forming, in the plurality of unit masks, a plurality of deposition openings overlapping the plurality of first openings by emitting laser. The first portion overlaps the frame, and the second portion extends from the first portion and is disposed between the plurality of first openings.

公开(公告)号：US20230366075A1

公开(公告)日：2023-11-16

申请号：US18298539

申请日：2023-04-11

Applicant: Samsung Display Co., Ltd.

Inventor： JEONGKUK KIM ,  YOUNGMIN MOON ,  SEUNGYONG SONG ,  KYU HWAN HWANG

IPC: C23C14/04

CPC classification number: C23C14/042 ,  H10K71/166

Abstract: A mask assembly including a frame including a frame opening, an open sheet physically connected to the frame including sheet openings corresponding to the frame opening, and hole groups each of which includes adsorption holes spaced apart from a corresponding sheet opening among the sheet openings, and masks each of which includes deposition openings, and is physically connected to the open sheet so as to be aligned with a corresponding sheet opening among the sheet openings. Each of the masks may overlap the adsorption holes of a corresponding hole group among the hole groups.

公开(公告)号：US20220035250A1

公开(公告)日：2022-02-03

申请号：US17330841

申请日：2021-05-26

Applicant: Samsung Display Co., Ltd.

Inventor： JEONGKUK KIM ,  HWI KIM ,  AREUM LEE ,  DA-HEE JEONG ,  KYU HWAN HWANG ,  KANGHYUN NAM ,  SEUNGMIN JIN ,  JAEMIN HONG

IPC: G03F7/20 ,  B23K26/352 ,  G03F1/50

Abstract: A mask includes a mask sheet provided with a plurality of open areas defined therein in a plan view and a mask frame which supports the mask sheet. The mask sheet includes a first portion including a first surface, where the first surface is configured to be in contact with a target substrate, and a second portion disposed on the first portion, extending from a top of the first portion in a first direction and including a second surface defining the open area. The second surface is an inclined surface inclined downward with respect to the first direction, and the first direction is parallel to a plane in which the first surface is included.

公开(公告)号：US20230374655A1

公开(公告)日：2023-11-23

申请号：US18125178

申请日：2023-03-23

Applicant: Samsung Display Co., Ltd.

Inventor： JEONGKUK KIM ,  SEUNGYONG SONG ,  WONJE CHO ,  EUNBEE JO ,  KYU HWAN HWANG

IPC: C23C16/04

CPC classification number: C23C16/042 ,  H10K59/12

Abstract: A mask replacement method includes providing the mask assembly including a frame including an opening, a first mask disposed on the frame, and first welding portions overlapping the first mask in a plan view, removing the first mask from the frame, and forming a second mask and second welding portions overlapping the second mask in a plan view on the frame on which the first welding portions are disposed. The first welding portions may be spaced apart from the second mask, and the first welding portions and the second welding portions may be arranged in a direction.

公开(公告)号：US20230201868A1

公开(公告)日：2023-06-29

申请号：US18175273

申请日：2023-02-27

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： HWI KIM ,  JEONGKUK KIM ,  DA-HEE JEONG ,  SEUNGYONG SONG ,  AREUM LEE ,  HYE YONG CHU ,  KYU HWAN HWANG

IPC: B05C21/00 ,  B23K26/362

CPC classification number: B05C21/005 ,  B23K26/362

Abstract: Provided is a mask manufacturing method which includes preparing a mask sheet and a frame, stretching the mask sheet, and fixing the stretched mask sheet to the frame, and forming cell openings in the mask sheet fixed to the frame.

公开(公告)号：US20220399531A1

公开(公告)日：2022-12-15

申请号：US17713729

申请日：2022-04-05

Applicant: Samsung Display Co., Ltd.

Inventor： JEONGKUK KIM ,  HWI KIM ,  AREUM LEE ,  KYU HWAN HWANG

IPC: H01L51/56 ,  C23C14/04 ,  B23K26/0622 ,  B23K26/38 ,  B23K26/06

Abstract: A mask includes a mask sheet including an upper surface and a lower surface facing the upper surface, the mask sheet including an opening passing through the upper surface and the lower surface; and a mask frame that supports the mask sheet, the mask sheet includes a protrusion adjacent to the opening and protruding from the lower surface, and a recess adjacent to the protrusion and recessed from the lower surface toward the upper surface of the mask sheet.

公开(公告)号：US20220062945A1

公开(公告)日：2022-03-03

申请号：US17318298

申请日：2021-05-12

Applicant: Samsung Display Co., Ltd.

Inventor： HWI KIM ,  JEONGKUK KIM ,  DA-HEE JEONG ,  SEUNGYONG SONG ,  AREUM LEE ,  HYE YONG CHU ,  KYU HWAN HWANG

IPC: B05C21/00 ,  B23K26/362

Abstract: Provided is a mask manufacturing method which includes preparing a mask sheet and a frame, stretching the mask sheet, and fixing the stretched mask sheet to the frame, and forming cell openings in the mask sheet fixed to the frame.

公开(公告)号：US20250102904A1

公开(公告)日：2025-03-27

申请号：US18888542

申请日：2024-09-18

Applicant: Samsung Display Co., LTD.

Inventor： JINWOO LEE ,  JEONGKUK KIM ,  DUCKJUNG LEE ,  SUGWOO JUNG ,  SUNGWON CHO ,  JUNHO JO

IPC: G03F1/80 ,  G03F7/40

Abstract: A mask includes a frame including an opening and a mask sheet disposed on the frame, including a first surface and a second surface opposite to the first surface, and including a plurality of holes that penetrate the first surface and the second surface. A width of each of the plurality of holes increases as being closer to the second surface from the first surface.