Surface emitting laser device, light-emitting device including the same and manufacturing method thereof

    公开(公告)号:US12051886B2

    公开(公告)日:2024-07-30

    申请号:US17256571

    申请日:2019-06-28

    IPC分类号: H01S5/183 H01S5/30

    CPC分类号: H01S5/18377 H01S5/3086

    摘要: An embodiment relates to a surface-emitting laser element, a light-emitting device comprising same, and a method for manufacturing same. A surface-emitting laser element according to an embodiment may comprise: a substrate; a first reflective layer disposed on the substrate; an active layer disposed on the first reflective layer; an aperture region disposed on the active layer and including an aperture and an insulation region; and a second reflective layer disposed on the aperture region. The doping level of the aperture region may be (X+3)×XE18 (atoms/cm3) A ratio (b/a) of a second minimum diameter (b) to a first maximum diameter (a) of the aperture may be [95.0−(2X/3)]% to [99.9−(X/3)]%, wherein X may be 0 to 3.

    Surface-emitting laser device and light emitting device including the same

    公开(公告)号:US11942762B2

    公开(公告)日:2024-03-26

    申请号:US17043144

    申请日:2019-04-04

    IPC分类号: H01S5/183

    摘要: A surface-emitting laser device according to an embodiment comprises: a first electrode; a substrate arranged on the first electrode; a first reflection layer arranged on the substrate; an active region arranged on the first reflection layer and including a cavity; an opening region arranged on the active region and including an aperture and an insulation region; a second reflection layer arranged on the opening region; a second electrode arranged on the second reflection layer; and a delta doping layer arranged in the opening region. The thickness of the insulation region becomes thinner in the direction of the aperture, and the delta doping layer can be arranged at the aperture.