MEMS actuation device with sparse pulses

    公开(公告)号:US11802042B2

    公开(公告)日:2023-10-31

    申请号:US17117469

    申请日:2020-12-10

    Inventor: Davide Terzi

    CPC classification number: B81B7/008 G02B7/182 B81B2201/042 G02B26/08

    Abstract: A method of operating a MEMS device includes generating a MEMS drive signal, and generating and modifying the MEMS drive signal based upon a control signal to produce a modified drive signal. The method further includes generating the control signal by determining when a feedback signal from the MEMS device is at its peak value, comparing the peak value to a desired value when the feedback signal is as its peak, and generating the control signal depending upon whether the peak value is at least equal to a desired value. The modification of the MEMS drive signal based upon the control signal to produce the modified drive signal includes skipping generation of a next pulse of the modified drive signal when the control signal indicates the peak value is at least equal to the desired value.

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