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公开(公告)号：US09758373B2
公开(公告)日：2017-09-12
申请号：US14262437
申请日：2014-04-25
Applicant: STMicroelectronics S.r.l.
Inventor： Stefano Losa , Raffaella Pezzuto , Roberto Campedelli , Matteo Perletti , Luigi Esposito , Mikel Azpeitia Urquia
CPC classification number: H01L21/02178 , B81B7/0032 , B81B2201/0235 , B81B2201/0242 , B81C1/00595 , B81C1/00801 , B81C2201/014 , B81C2201/053 , H01L21/0228
Abstract: A method for manufacturing a protective layer for protecting an intermediate structural layer against etching with hydrofluoric acid, the intermediate structural layer being made of a material that can be etched or damaged by hydrofluoric acid, the method comprising the steps of: forming a first layer of aluminum oxide, by atomic layer deposition, on the intermediate structural layer; performing a thermal crystallization process on the first layer of aluminum oxide, forming a first intermediate protective layer; forming a second layer of aluminum oxide, by atomic layer deposition, above the first intermediate protective layer; and performing a thermal crystallization process on the second layer of aluminum oxide, forming a second intermediate protective layer and thereby completing the formation of the protective layer. The method for forming the protective layer can be used, for example, during the manufacturing steps of an inertial sensor such as a gyroscope or an accelerometer.
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公开(公告)号：US10125009B2
公开(公告)日：2018-11-13
申请号：US15636380
申请日：2017-06-28
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Enri Duqi , Mikel Azpeitia Urquia , Lorenzo Baldo
Abstract: Method of manufacturing a transducer module, comprising the steps of: forming, on a substrate, a first MEMS transducer, in particular a gyroscope, and a second MEMS transducer, in particular an accelerometer, having a suspended membrane; forming, on the substrate, a conductive layer and defining the conductive layer in order to provide, simultaneously, at least one conductive strip electrically coupled to the first MEMS transducer and the membrane of the second MEMS transducer.
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3.发明授权公开(公告)号：US11513016B2
公开(公告)日：2022-11-29
申请号：US17168059
申请日：2021-02-04
Applicant: STMICROELECTRONICS S.r.l.
Inventor： Mikel Azpeitia Urquia , Giorgio Allegato
Abstract: A semiconductor device for ambient sensing including: a cap traversed by a hole; and a main body mechanically coupled to the cap so as to delimit a cavity, which is interposed between the main body and the cap. The main body includes a semiconductor body and a coupling structure, which is interposed between the semiconductor body and the cap and laterally delimits a channel, which fluidically couples the cavity and the hole. The channel performs a mechanical filtering that is finer than the mechanical filtering performed by the hole.
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公开(公告)号：US12113140B2
公开(公告)日：2024-10-08
申请号：US17668739
申请日：2022-02-10
Applicant: STMicroelectronics S.r.l.
Inventor： Luca Seghizzi , Linda Montagna , Giuseppe Visalli , Mikel Azpeitia Urquia
IPC: H01L31/0232 , G02B26/08 , H01L31/02 , H01L31/0203 , H01L31/113 , H02N1/00
CPC classification number: H01L31/02325 , G02B26/0841 , H01L31/02005 , H01L31/0203 , H01L31/1136 , H02N1/004
Abstract: Disclosed herein is an integrated component formed by a first wafer having first and second trenches defined in a top surface thereof, and a second wafer coupled to the first wafer and formed by a substrate with a structural layer thereon that integrated an electromagnetic radiation detector overlying the second trench. A first cap is coupled to the second wafer, overlies the electromagnetic radiation detector, and serves to define a first air-tight chamber in which the electromagnetic radiation detector is positioned. A stator, a rotor, and a mobile mass are integrated within the substrate and form a drive assembly for driving the mobile mass. The rotor overlies the first trench. A second cap is coupled to the second wafer, overlies the mobile mass, and serving to define a second air-tight chamber in which the mobile mass is positioned.
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5.发明授权公开(公告)号：US11802805B2
公开(公告)日：2023-10-31
申请号：US17958761
申请日：2022-10-03
Applicant: STMICROELECTRONICS S.r.l.
Inventor： Mikel Azpeitia Urquia , Giorgio Allegato
CPC classification number: G01L19/0636 , G01L9/08 , G01L9/12
Abstract: A semiconductor device for ambient sensing including: a cap traversed by a hole; and a main body mechanically coupled to the cap so as to delimit a cavity, which is interposed between the main body and the cap. The main body includes a semiconductor body and a coupling structure, which is interposed between the semiconductor body and the cap and laterally delimits a channel, which fluidically couples the cavity and the hole. The channel performs a mechanical filtering that is finer than the mechanical filtering performed by the hole.
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Patent Agency Ranking
公开(公告)号：US11276789B2
公开(公告)日：2022-03-15
申请号：US16744865
申请日：2020-01-16
Applicant: STMicroelectronics S.r.l.
Inventor： Luca Seghizzi , Linda Montagna , Giuseppe Visalli , Mikel Azpeitia Urquia
IPC: H01L31/0232 , H01L31/02 , H01L31/0203 , H01L31/113 , H02N1/00 , G02B26/08
Abstract: A first wafer of semiconductor material has a surface. A second wafer of semiconductor material includes a substrate and a structural layer on the substrate. The structural layer integrates a detector device for detecting electromagnetic radiation. The structural layer of the second wafer is coupled to the surface of the first wafer. The substrate of the second wafer is shaped to form a stator, a rotor, and a mobile mass of a micromirror. The stator and the rotor form an assembly for capacitively driving the mobile mass.
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7.发明授权公开(公告)号：US10676347B2
公开(公告)日：2020-06-09
申请号：US15866380
申请日：2018-01-09
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Enri Duqi , Lorenzo Baldo , Marco Del Sarto , Mikel Azpeitia Urquia
Abstract: A micro-electro-mechanical device, comprising a monolithic body of semiconductor material accommodating a first buried cavity; a sensitive region facing the first buried cavity; a second cavity facing the first buried cavity; a decoupling trench extending from the monolithic body and separating the sensitive region from a peripheral portion of the monolithic body; a cap die, forming an ASIC, bonded to and facing the first face of the monolithic body; and a first gap between the cap die and the monolithic body. The device also comprises at least one spacer element between the monolithic body and the cap die; at least one stopper element between the monolithic body and the cap die; and a second gap between the stopper element and one between the monolithic body and the cap die. The second gap is smaller than the first gap.
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8.发明授权公开(公告)号：US11358862B2
公开(公告)日：2022-06-14
申请号：US16869159
申请日：2020-05-07
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Enri Duqi , Lorenzo Baldo , Marco Del Sarto , Mikel Azpeitia Urquia
Abstract: A micro-electro-mechanical device, comprising a monolithic body of semiconductor material accommodating a first buried cavity; a sensitive region facing the first buried cavity; a second cavity facing the first buried cavity; a decoupling trench extending from the monolithic body and separating the sensitive region from a peripheral portion of the monolithic body; a cap die, forming an ASIC, bonded to and facing the first face of the monolithic body; and a first gap between the cap die and the monolithic body. The device also comprises at least one spacer element between the monolithic body and the cap die; at least one stopper element between the monolithic body and the cap die; and a second gap between the stopper element and one between the monolithic body and the cap die. The second gap is smaller than the first gap.
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公开(公告)号：US09824882B2
公开(公告)日：2017-11-21
申请号：US14982380
申请日：2015-12-29
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Stefano Losa , Raffaella Pezzuto , Roberto Campedelli , Matteo Perletti , Luigi Esposito , Mikel Azpeitia Urquia
CPC classification number: H01L21/02178 , B81B7/0032 , B81B2201/0235 , B81B2201/0242 , B81C1/00595 , B81C1/00801 , B81C2201/014 , B81C2201/053 , H01L21/0228
Abstract: A method for manufacturing a protective layer for protecting an intermediate structural layer against etching with hydrofluoric acid, the intermediate structural layer being made of a material that can be etched or damaged by hydrofluoric acid, the method comprising the steps of: forming a first layer of aluminum oxide, by atomic layer deposition, on the intermediate structural layer; performing a thermal crystallization process on the first layer of aluminum oxide to form a first intermediate protective layer; forming a second layer of aluminum oxide, by atomic layer deposition, above the first intermediate protective layer; and performing a thermal crystallization process on the second layer of aluminum oxide to form a second intermediate protective layer and thereby completing the formation of the protective layer. The method for forming the protective layer can be used, for example, during the manufacturing steps of an inertial sensor such as a gyroscope or an accelerometer.
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10.发明授权公开(公告)号：US09388038B2
公开(公告)日：2016-07-12
申请号：US14265116
申请日：2014-04-29
Applicant: STMicroelectronics S.r.l.
Inventor： Roberto Campedelli , Raffaella Pezzuto , Stefano Losa , Marco Mantovani , Mikel Azpeitia Urquia
CPC classification number: B81B7/0006 , B81B3/0086 , B81B7/007 , B81B2201/0235 , B81B2201/0242 , B81B2207/07 , B81B2207/097 , B81C1/00476 , H01L29/84
Abstract: A MEMS device formed by a body; a cavity, extending above the body; mobile and fixed structures extending above the cavity and physically connected to the body via anchoring regions; and electrical-connection regions, extending between the body and the anchoring regions and electrically connected to the mobile and fixed structures. The electrical-connection regions are formed by a conductive multilayer including a first semiconductor material layer, a composite layer of a binary compound of the semiconductor material and of a transition metal, and a second semiconductor material layer.
Abstract translation: 由身体形成的MEMS器件; 一个在身体上方延伸的空腔; 移动和固定结构延伸到腔体之上并通过锚定区域物理地连接到身体; 以及电连接区域，其在主体和锚定区域之间延伸并且电连接到移动和固定结构。 电连接区域由包括第一半导体材料层，半导体材料的二元化合物和过渡金属的复合层和第二半导体材料层的导电多层形成。
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