公开(公告)号：US3869611A

公开(公告)日：1975-03-04

申请号：US6792270

申请日：1970-08-28

Applicant: SIEMENS AG

Inventor： THON FRIEDRICH

IPC: H01J37/26 ,  H01J37/04 ,  H01J37/28

CPC classification number: H01J37/04 ,  H01J37/28

Abstract: A raster type particle-beam device has an electro-optical axis and defines a specimen locality on the axis. The device has a beam generator for issuing a particle beam along the axis toward the specimen locality, a condenser lens for focussing the beam onto the specimen locality, the lens being disposed ahead of the specimen locality and coaxial with the axis, a deflection system arranged about the axis intermediate the beam generator and the condenser lens, an imaging surface disposed beyond the specimen locality in coaxial relation to the axis for receiving the rays of the beam passing through the specimen, and a beam modifying structure for modifying the imaging properties of the beam, the beam modifying structure being disposed in the path of the beam intermediate the deflection system and the specimen locality.

Abstract translation: 光栅型粒子束装置具有电光轴并且在轴上限定了样本位置。 该装置具有一个光束发生器，用于沿着轴线朝向标本位置发射一个粒子束，一个用于将光束聚焦在样本位置上的聚焦透镜，该透镜设置在样本位置之前并与该轴同轴，一个偏转系统被布置 关于光束发生器和聚光透镜之间的轴线，设置在与轴线同轴的位置之外的成像表面，用于接收通过样本的光束的射线;以及光束修改结构，用于修改光束发生器和聚光透镜的成像特性 光束修改结构设置在偏转系统和样本位置之间的光束路径中。

公开(公告)号：US3504176A

公开(公告)日：1970-03-31

申请号：US3504176D

申请日：1967-07-12

Applicant: SIEMENS AG

Inventor： THON FRIEDRICH

IPC: G01Q30/02 ,  H01J37/21 ,  H01J37/26

CPC classification number: H01J37/21