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公开(公告)号：US20210129535A1
公开(公告)日：2021-05-06
申请号：US16472783
申请日：2017-12-05
Inventor： Daisuke YAMADA , Motoki TAKABE , Yasuyiikl MATSUMOTO , Yoichi NAGANUMA , Eiju HIRAI
Abstract: Provided are an MEMS device, a liquid ejecting head, a liquid ejecting apparatus, a manufacturing method of a MEMS device, a manufacturing method of a liquid ejecting head and a manufacturing method of a liquid ejecting apparatus. Provided is a MEMS device that includes a first substrate on which a flexibly deformable thin film member is laminated, a second substrate disposed at an interval with respect to the first substrate, and an adhesion layer that adheres the first substrate to the second substrate, in which an end of the thin film member extends to the outside of the end of the first substrate in an in-plane direction of the first substrate.
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公开(公告)号：US20240326420A1
公开(公告)日：2024-10-03
申请号：US18622222
申请日：2024-03-29
Applicant: SEIKO EPSON CORPORATION
Inventor： Yoichi NAGANUMA , Shohei MIZUTA , Yuki WATANABE , Madoka GOI
IPC: B41J2/14
CPC classification number: B41J2/1404 , B41J2/14233
Abstract: A liquid ejecting head has a piezoelectric element, a diaphragm, and a pressure chamber substrate having a pressure chamber coupled to a nozzle and contributing to ejection of a liquid by applying pressure on the liquid through vibration of the diaphragm and a dummy pressure chamber not contributing to ejection of the liquid. Each of the pressure chamber and the dummy pressure chamber opens on a surface opposite to a surface facing the diaphragm of the pressure chamber substrate, and is a recess having a depth in a direction toward the diaphragm along the lamination direction. Furthermore, the pressure chamber and the dummy pressure chamber are arranged in an arrangement direction perpendicular to the lamination direction, and a first depth as the depth of the dummy pressure chamber is shallower than a second depth as the depth of the pressure chamber.
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3.发明申请公开(公告)号：US20190143691A1
公开(公告)日：2019-05-16
申请号：US16191282
申请日：2018-11-14
Applicant: SEIKO EPSON CORPORATION
Inventor： Shohei MIZUTA , Eiju HIRAI , Daisuke YAMADA , Yoichi NAGANUMA , Motoki TAKABE
IPC: B41J2/14 , B41J2/16 , H01L41/047 , H01L41/313
Abstract: A MEMS device which includes an adhesive which adheres a first substrate and a second substrate to each other, in which a first space which includes an electrode, an individual electrode, a common electrode, a bump electrode, and a piezoelectric element and which is configured as a closed space which is isolated from an atmosphere by the first substrate, the second substrate, and the adhesive is disposed in a space between the first substrate and the second substrate, and in which a second space which does not include any of the electrode, the individual electrode, the common electrode, the bump electrode, or the piezoelectric element and which communicates with the atmosphere due to a through-hole which penetrates at least one of the first substrate and the second substrate is disposed in the space between the first substrate and the second substrate.
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公开(公告)号：US20170225464A1
公开(公告)日：2017-08-10
申请号：US15422261
申请日：2017-02-01
Applicant: SEIKO EPSON CORPORATION
Inventor： Eiju HIRAI , Motoki TAKABE , Katsutomo TSUKAHARA , Yoichi NAGANUMA , Munehide SAIMEN
IPC: B41J2/14 , H01L41/047 , H01L41/053 , H01L41/09
CPC classification number: B41J2/14201 , B41J2/04521 , B41J2/14072 , B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1626 , B41J2/1631 , B41J2/1643 , B41J2/1646 , B41J2002/14419 , B41J2002/14491 , B41J2202/18 , H01L41/0475 , H01L41/053 , H01L41/09 , H01L41/0973
Abstract: A piezoelectric device includes an actuator substrate that includes a plurality of piezoelectric element rows having a plurality of piezoelectric elements, and a wiring substrate that is disposed so as to face the actuator substrate. The piezoelectric element rows include a common electrodes common to the plurality of the piezoelectric elements. The actuator substrate includes a plurality of first common wirings connected to each of the common electrodes of the plurality of the piezoelectric element rows. The wiring substrate includes a plurality of second common wirings connected to each of the first common wirings of the plurality of piezoelectric element rows, and a plurality of auxiliary wirings buried in a groove portion formed in the wiring substrate. The auxiliary wirings are connected to each of the second common wirings, and the plurality of auxiliary wirings are not connected to each other.
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公开(公告)号：US20160263894A1
公开(公告)日：2016-09-15
申请号：US15009527
申请日：2016-01-28
Applicant: SEIKO EPSON CORPORATION
Inventor： Toshiaki HAMAGUCHI , Eiju HIRAI , Yoichi NAGANUMA , Motoki TAKABE
CPC classification number: B41J2/161 , B41J2/14233 , B41J2/1623 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1634 , B41J2/1642 , B41J2/1643 , B41J2/1645 , B41J2/1646 , B41J2002/14419 , B41J2002/14491 , B41J2202/18 , Y10T29/49401
Abstract: Provided is a manufacturing method of a head which includes a channel formation substrate having two piezoelectric actuator rows formed thereon, a driving circuit, and a driving circuit board which is provided with a first bump and a second bump. In the method, the first bump is provided on the outside of the piezoelectric actuator row, on the driving circuit board, an adhesive layer is provided on both sides of the first bump and the second bump, a first through hole and a second through hole are provided on the driving circuit board, a first connection wiring and a second connection wiring which are connected to the driving circuit are provided, and a first electrode of the piezoelectric actuator is electrically connected to the first connection wiring via the first bump and a second electrode is electrically connected to the second connection wiring via the second bump.
Abstract translation: 提供一种头的制造方法，其包括具有形成在其上的两个压电致动器行的沟道形成基板，驱动电路和设置有第一凸块和第二凸起的驱动电路板。 在该方法中，第一凸块设置在压电致动器列的外侧，在驱动电路板上，在第一凸块和第二凸块的两侧设置粘接层，第一通孔和第二通孔 设置在所述驱动电路板上，连接到所述驱动电路的第一连接布线和第二连接布线，并且所述压电致动器的第一电极经由所述第一凸块电连接到所述第一连接布线， 电极通过第二凸块电连接到第二连接布线。
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Patent Agency Ranking
公开(公告)号：US20230294401A1
公开(公告)日：2023-09-21
申请号：US18185170
申请日：2023-03-16
Applicant: SEIKO EPSON CORPORATION
Inventor： Sosuke YAMASAKI , Shohei MIZUTA , Yoichi NAGANUMA , Yuma FUKUZAWA
IPC: B41J2/14
CPC classification number: B41J2/14201
Abstract: A liquid ejecting head includes a pressure chamber substrate having a pressure chamber, a drive element, a communication substrate having a supply communication flow path communicating with the pressure chamber and a nozzle communication flow path communicating with the pressure chamber and communicating with a nozzle for ejecting a liquid at a position different from the supply communication flow path, and a coupling substrate disposed between the pressure chamber substrate and the communication substrate, the coupling substrate having a supply port located between the pressure chamber and the supply communication flow path and a discharge port located between the pressure chamber and the nozzle communication flow path, in which a flow path cross-sectional area of the supply port is smaller than a flow path cross-sectional area of the supply communication flow path, and the coupling substrate is made of a photosensitive resist film.
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公开(公告)号：US20230043344A1
公开(公告)日：2023-02-09
申请号：US17880708
申请日：2022-08-04
Applicant: SEIKO EPSON CORPORATION
Inventor： Yoichi NAGANUMA , Yuma FUKUZAWA , Shohei MIZUTA
IPC: B41J2/14
Abstract: A liquid ejecting head includes a first pressure compartment extending in a first direction; a second pressure compartment extending in the first direction; a first communication passage continuous from the first pressure compartment and extending in the first direction; a second communication passage continuous to the second pressure compartment and extending in the first direction; a third communication passage continuous from the first communication passage and extending in a second direction intersecting with the first direction; a fourth communication passage continuous to the second communication passage and extending in the second direction; a fifth communication passage continuous from the third communication passage and continuous to the fourth communication passage and extending in the first direction; and a nozzle provided on the fifth communication passage.
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公开(公告)号：US20210323303A1
公开(公告)日：2021-10-21
申请号：US17233900
申请日：2021-04-19
Applicant: SEIKO EPSON CORPORATION
Inventor： Yuma FUKUZAWA , Eiju HIRAI , Yoichi NAGANUMA , Shotaro TAMAI , Akinori TANIUCHI
IPC: B41J2/045
Abstract: A liquid ejecting head includes: a first pressure chamber that applies pressure to a liquid; a second pressure chamber that applies pressure to the liquid; a nozzle channel that extends in a first direction and includes a nozzle that ejects the liquid; a first communication channel that extends in a second direction crossing the first direction and enables the first pressure chamber and the nozzle channel to communicate with each other; a second communication channel that extends in the second direction and enables the second pressure chamber and the nozzle channel to communicate with each other; and a first branch channel that has a portion extending in the first direction and enables the first pressure chamber and the nozzle channel to communicate with each other through a path different from a path of the first communication channel.
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公开(公告)号：US20210237439A1
公开(公告)日：2021-08-05
申请号：US17160449
申请日：2021-01-28
Applicant: SEIKO EPSON CORPORATION
Inventor： Yoichi NAGANUMA , Yuma FUKUZAWA , Hitoshi TAKAAI , Shotaro TAMAI
Abstract: a first sloped portion that is provided between the first wall surface and the third wall surface includes a first constituting surface that extends in a third direction between the first direction and the second direction.
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公开(公告)号：US20210162760A1
公开(公告)日：2021-06-03
申请号：US17108366
申请日：2020-12-01
Applicant: SEIKO EPSON CORPORATION
Inventor： Yuma FUKUZAWA , Shotaro TAMAI , Yoichi NAGANUMA , Akira MIYAGISHI , Kazuaki UCHIDA
Abstract: A liquid ejecting head including: an individual flow path row in which a plurality of individual flow paths communicating with a nozzle that ejects a liquid in a first axis direction are arranged in parallel along a second axis orthogonal to a first axis, and a first common liquid chamber communicating with the plurality of individual flow paths, in which each of the plurality of individual flow paths has a pressure chamber that stores a liquid.
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