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    Interferometer
    1.
    发明申请
    Interferometer 有权

    公开(公告)号：US20240393180A1

    公开(公告)日：2024-11-28

    申请号：US18672380

    申请日：2024-05-23

    Applicant: SEIKO EPSON CORPORATION

    Inventor： Kohei YAMADA ,  Tetsuro MATSUMOTO

    IPC: G01J3/453 ,  G01B21/02

    Abstract: An interferometer including an analysis unit and a length measurement unit, wherein the analysis unit includes an analysis optical system that includes a first light source configured to emit an analysis light, a moving mirror that reflects the analysis light, and a first light receiving element that receives the analysis light, and is used for analysis of the sample using interference of the analysis light, and a mirror drive unit that drives the moving mirror based on a mirror drive signal, the length measurement unit includes a length measurement optical system that includes a laser source, a light modulator that adds a modulation component by modulating a frequency of the laser beam using a vibrating element, and a second light receiving element that receives the laser beam including the length measurement component and the modulation component generated when the moving mirror is irradiated with the laser beam, and outputs a second received light signal, and is used for detection of a position of the moving mirror using interference of the laser beam, and the vibrating element is a signal source of the mirror drive signal.

    PRESSURE DISTRIBUTION SENSOR, METHOD OF MEASURING PRESSURE DISTRIBUTION, AND ROBOT HAND
    3.
    发明申请
    PRESSURE DISTRIBUTION SENSOR, METHOD OF MEASURING PRESSURE DISTRIBUTION, AND ROBOT HAND 审中-公开
    压力分布传感器，测量压力分布的方法和机器人手

    公开(公告)号：US20150285698A1

    公开(公告)日：2015-10-08

    申请号：US14669846

    申请日：2015-03-26

    Applicant: SEIKO EPSON CORPORATION

    Inventor： Tetsuro MATSUMOTO

    IPC: G01L5/18 ,  B25J15/02 ,  B25J9/16 ,  B25J19/02

    CPC classification number: B25J9/1612 ,  B25J13/082 ,  G01L1/205 ,  G01L1/2287 ,  G01L5/228

    Abstract: A pressure distribution sensor includes a sensor element having plurality of current-driven actuator segments each having a first electrode and second electrode arranged in a first direction and a second direction different from the first direction, and a corresponding number of sensing circuits to the number of the actuator segments. The sensing circuits each include a first terminal electrically connected to the first electrode, a second terminal electrically connected to the second electrode, a third terminal to which an electrode selection signal for selecting one of the first electrode and the second electrode is input, a fourth terminal to which a segment selection signal for selecting the actuator segment out of the plurality of actuator segments is input, and a fifth terminal adapted to output a signal obtained via the electrode selected by the electrode selection signal from the electrodes of the actuator segment selected by the segment selection signal.

    Abstract translation: 压力分布传感器包括具有多个电流驱动致动器段的传感器元件，每个电流驱动致动器段具有沿第一方向排列的第一电极和第二电极以及与第一方向不同的第二方向，以及相应数量的感测电路 致动器部分。 检测电路各自包括电连接到第一电极的第一端子，电连接到第二电极的第二端子，输入用于选择第一电极和第二电极之一的电极选择信号的第三端子，第四端子 输入用于从多个致动器段中选择致动器段的段选择信号的端子，以及第五端子，适于输出通过由电极选择信号选择的电极获得的信号，来自由致动器段选择的电极 段选择信号。

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