公开(公告)号：US12083563B2

公开(公告)日：2024-09-10

申请号：US17016438

申请日：2020-09-10

申请人： SCREEN Holdings Co., Ltd.

发明人： Kazuhiko Nakazawa ,  Yuichi Takayama ,  Toshihito Morioka ,  Hiromichi Kaba ,  Takuya Sato

IPC分类号： B08B3/04 ,  B08B3/08 ,  B08B3/10 ,  B08B5/02 ,  B08B13/00 ,  H01L21/67 ,  H01L21/683 ,  H01L21/687

CPC分类号： B08B3/041 ,  B08B3/08 ,  B08B3/10 ,  B08B5/023 ,  B08B13/00 ,  H01L21/67051 ,  H01L21/6838 ,  H01L21/68742 ,  H01L21/68764

摘要： Disclosed is a substrate treating apparatus for treating a substrate with a treating liquid, the apparatus including the following: a rotating member including a plurality of through-holes formed therein; a plurality of support pins attached to the through-holes with a non-sealing structure, and configured to support a substrate in such a manner that the substrate is spaced apart; a supply nozzle configured to supply a treating liquid to the substrate; a cover spaced apart below the rotating member; a rotational drive device configured to drive the rotating member rotationally in a horizontal plane; and a drive device configured to drive the support pins.

公开(公告)号：US11521881B2

公开(公告)日：2022-12-06

申请号：US17014072

申请日：2020-09-08

申请人： SCREEN Holdings Co., Ltd.

发明人： Yuichi Takayama ,  Kazuhiko Nakazawa ,  Hiromichi Kaba ,  Toshihito Morioka ,  Takuya Sato

IPC分类号： H01L21/677 ,  H01L21/687 ,  B65G47/91 ,  H01L21/67 ,  H01L21/683

摘要： A substrate treating apparatus includes a carrier platform, a transport mechanism, and a controller. The carrier platform places a carrier thereon. The carrier includes a plurality of shelves arranged in an up-down direction. The shelves are each configured to place one substrate thereon in a horizontal posture. The transport mechanism is configured to transport a substrate to a carrier placed on the carrier platform. The controller controls the transport mechanism. The transport mechanism includes a hand and a hand driving unit. The hand supports a substrate. The hand driving unit moves the hand. The controller changes a height position of the hand when the hand is inserted between two of the shelves adjacent to each other in the up-down direction, depending on a shape of a substrate taken from or placed on one of the shelves by the transport mechanism.

公开(公告)号：US11850623B2

公开(公告)日：2023-12-26

申请号：US17014036

申请日：2020-09-08

申请人： SCREEN Holdings Co., Ltd.

发明人： Yuichi Takayama ,  Kazuhiko Nakazawa ,  Hiromichi Kaba ,  Toshihito Morioka ,  Takuya Sato ,  Noriyuki Kikumoto

IPC分类号： B05C13/00 ,  B25B11/00 ,  H01L21/683

CPC分类号： B05C13/00 ,  B25B11/005 ,  H01L21/683

摘要： Disclosed are a substrate treating apparatus and a substrate transporting method. The substrate treating apparatus includes a first transport mechanism. The first transport mechanism includes a hand. A hand includes a base, a suction portion, a first receiver, a second receiver, and a receiver driving unit. The suction portion is attached to the base. The suction portion flows gas along a top face of a substrate, and sucks the substrate upward without contacting the substrate. The first receiver and the second receiver are supported on the base. The first receiver and the second receiver are disposed below the substrate sucked by the suction portion. The first receiver and the second receiver can receive a back face of the substrate. The receiver driving unit moves the second receiver with respect to the base. The receiver driving unit causes the second receiver to access the first receiver and to move away from the first receiver.

公开(公告)号：US11948823B2

公开(公告)日：2024-04-02

申请号：US18051144

申请日：2022-10-31

申请人： SCREEN Holdings Co., Ltd.

发明人： Yuichi Takayama ,  Kazuhiko Nakazawa ,  Hiromichi Kaba ,  Toshihito Morioka ,  Takuya Sato

IPC分类号： H01L21/677 ,  B65G47/91 ,  H01L21/67 ,  H01L21/687 ,  H01L21/683

CPC分类号： H01L21/67778 ,  B65G47/911 ,  H01L21/67196 ,  H01L21/67766 ,  H01L21/68707 ,  H01L21/67167 ,  H01L21/67769 ,  H01L21/6838

摘要： A substrate treating apparatus includes a carrier platform, a transport mechanism, and a controller. The carrier platform places a carrier thereon. The carrier includes a plurality of shelves arranged in an up-down direction. The shelves are each configured to place one substrate thereon in a horizontal posture. The transport mechanism is configured to transport a substrate to a carrier placed on the carrier platform. The controller controls the transport mechanism. The transport mechanism includes a hand and a hand driving unit. The hand supports a substrate. The hand driving unit moves the hand. The controller changes a height position of the hand when the hand is inserted between two of the shelves adjacent to each other in the up-down direction, depending on a shape of a substrate taken from or placed on one of the shelves by the transport mechanism.