-
公开(公告)号:US20230230832A1
公开(公告)日:2023-07-20
申请号:US18095243
申请日:2023-01-10
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Donggeon GU , Won-Jun LEE , Changyup PARK , Dongho AHN , Yewon KIM , Kwonyoung KIM , Okhyeon KIM
IPC: H01L21/02 , C23C16/455 , C23C16/06 , C23C16/56
CPC classification number: H01L21/02568 , H01L21/0262 , H01L21/02614 , C23C16/45527 , C23C16/06 , C23C16/56 , H10B63/10
Abstract: A method of forming a germanium antimony tellurium (GeSbTe) layer includes forming a germanium antimony (GeSb) layer by repeatedly performing a GeSb supercycle; and forming the GeSbTe layer by performing a tellurization operation on the GeSb layer, wherein the GeSb supercycle includes performing at least one GeSb cycle; and performing at least one Sb cycle, the GeSbTe has a composition of Ge2Sb2+aTe5+b, in which a and b satisfy the following relations: −0.2
-
公开(公告)号:US20200090944A1
公开(公告)日:2020-03-19
申请号:US16375092
申请日:2019-04-04
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Won-Jun LEE , Da-Hye SHIN , Yil-Hyung LEE
IPC: H01L21/311 , H01L21/02 , H01L21/768
Abstract: A semiconductor device includes a conductive structure on a substrate, an etch stop layer on the conductive structure, an insulation layer on the etch stop layer, and a contact plug extending through the etch stop layer and the insulation layer and contacting the conductive structure. The contact plug may include first and second conductive pattern structures sequentially stacked and contacting with each other. A width of an upper surface of the first conductive pattern structure may be greater than that of a lower surface of the second conductive pattern structure. At least an upper portion of the first conductive pattern structure may have a sidewall not perpendicular but inclined to an upper surface of the substrate.
-
公开(公告)号:US20180359795A1
公开(公告)日:2018-12-13
申请号:US16003530
申请日:2018-06-08
Inventor: Young-Kyo BAEK , Jung-Je SON , Sung-Hoon KIM , Sang-Heon PACK , Ho-Yeon LEE , Han-Eul KO , Won-Jun LEE , Cheng Long SHAO , Jae-Wook LEE , Hee-Jun ROH , Tae-Kyung KIM , Sun-Jae KIM
Abstract: The present disclosure relates to a 5G or pre-5G communication system for supporting higher data transmission rates beyond 4G communication systems such as LTE systems. A method for establishing a plurality of protocol data unit (PDU) sessions between a user equipment (UE) and a data network (DN) by the UE may comprise transmitting a message to establish the plurality of PDU sessions to at least one network function (NF) of a plurality of NFs, exchanging a signal to establish the plurality of PDU sessions among the UE, a radio access network (RAN), and the plurality of NFs based on the message, and establishing the plurality of PDU sessions between the UE and the DN according to predetermined priority and based on the signal, wherein each of the plurality of PDU sessions corresponds to a network slice (NS) for a particular service, wherein the message includes information about the particular service corresponding to the plurality of PDU sessions, and wherein the priority is determined based on the information about the particular service.
-
-