SEMICONDUCTOR MEMORY DEVICE, METHOD OF TESTING THE SAME AND TEST SYSTEM

    公开(公告)号:US20220076778A1

    公开(公告)日:2022-03-10

    申请号:US17239651

    申请日:2021-04-25

    Abstract: A semiconductor memory device included in each of a plurality of chips which are divided by a scribe lane and formed on an upper surface of a wafer, includes a memory core and a built-in self test (BIST) circuit. The memory core includes a memory cell array that stores data and a data input/output circuit connected to a data input/output pad. The BIST circuit is connected to a test pad that is separate from the data input/output pad. The BIST circuit generates test pattern data including first parallel bits based on commands and addresses received from an external automatic test equipment (ATE) during a wafer level test process performed on the semiconductor memory device. The BIST circuit tests the memory core by applying the test pattern data to the memory cell array through the data input/output circuit.

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