Image sensors and methods of forming the same

    公开(公告)号:US10032819B2

    公开(公告)日:2018-07-24

    申请号:US14994230

    申请日:2016-01-13

    Abstract: An image sensor includes a substrate including a plurality of pixel regions and having a trench between the pixel regions, a photoelectric conversion part in the substrate of each of the pixel regions, and a device isolation pattern in the trench. The device isolation pattern defines an air gap. The device isolation pattern has an intermediate portion and an upper portion narrower than the intermediate portion.

    Image sensors and methods of forming the same

    公开(公告)号:US10418403B2

    公开(公告)日:2019-09-17

    申请号:US16026265

    申请日:2018-07-03

    Abstract: An image sensor includes a substrate including a plurality of pixel regions and having a trench between the pixel regions, a photoelectric conversion part in the substrate of each of the pixel regions, and a device isolation pattern in the trench. The device isolation pattern defines an air gap. The device isolation pattern has an intermediate portion and an upper portion narrower than the intermediate portion.

    IMAGE SENSOR INCLUDING GRID STRUCTURE

    公开(公告)号:US20250120211A1

    公开(公告)日:2025-04-10

    申请号:US18767607

    申请日:2024-07-09

    Abstract: An image sensor includes photoelectric conversion devices provided in a substrate comprising first and second surfaces, first and second photoelectric conversion elements in the substrate, first and second separation structures in the substrate, first and second grid structures on the first and second separation structures. The second photoelectric conversion element is disposed between the first separation structure and the second separation structure. The first and second grid structure are vertically overlapping with the first and second separation structure. The first grid structure comprises an air gap and N plurality of layers on an external side surface of the air gap. Each of the N plurality of layers extends in a first direction. The second grid structures comprises M plurality of layers on an external side surface of the second grid structure and extends in the first direction.

    Image sensors and methods of forming the same

    公开(公告)号:US11211420B2

    公开(公告)日:2021-12-28

    申请号:US17014269

    申请日:2020-09-08

    Abstract: An image sensor includes a substrate including a plurality of pixel regions and having a trench between the pixel regions, a photoelectric conversion part in the substrate of each of the pixel regions, and a device isolation pattern in the trench. The device isolation pattern defines an air gap. The device isolation pattern has an intermediate portion and an upper portion narrower than the intermediate portion.

    Image sensors and methods of forming the same

    公开(公告)号:US10797095B2

    公开(公告)日:2020-10-06

    申请号:US16570142

    申请日:2019-09-13

    Abstract: An image sensor includes a substrate including a plurality of pixel regions and having a trench between the pixel regions, a photoelectric conversion part in the substrate of each of the pixel regions, and a device isolation pattern in the trench. The device isolation pattern defines an air gap. The device isolation pattern has an intermediate portion and an upper portion narrower than the intermediate portion.

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