公开(公告)号：US20250052667A1

公开(公告)日：2025-02-13

申请号：US18754702

申请日：2024-06-26

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Jooyoun KANG ,  Gideok KIM ,  Kwangsoo KIM ,  Wookrae KIM ,  Jaeseok SON ,  Eunjoo LEE ,  Soonhong Charles HWANG

IPC: G01N21/21 ,  G01N21/95 ,  G01N21/956

Abstract: An optical measurement apparatus includes a first light emitter configured to emit a first light on a surface of a sample, a second light emitter configured to emit a second light on the surface of the sample on which the first light is focused, a physical property detector configured to obtain physical property information of the sample by detecting a change in an amount of light of the second light due to a photothermal effect of the first light on the surface of the sample, and at least one structure detector configured to obtain structural information of the sample by detecting a reflected light of at least one of the first light and the second light that is reflected from the surface of the sample.