摘要:
A method of inhibiting combustion within a vacuum pump is provided. The method steps include monitoring and composition of a fluid within the pump and supplying purge gas to the pump to inhibit the onset of a combustion of the fluid. There is also provided a pumping arrangement comprising a vacuum pump (1) together with means (8) for supplying purge gas to the pump. Sensor means (21a, 21b, 21c) are provided for outputting a signal indicative of the onset of a combustion condition within the pump. Control means (22) receive the signal and, in turn, actuate the supply means (9) dependant on the signal received.
摘要:
A pump having a rotor, a stator, a housing enclosing the rotor and the stator, the housing having an inlet for a fluid, and a port for receiving a fluid which acts on deposits on a surface of the rotor and on a surface of the stator positioned downstream from the inlet.
摘要:
Apparatus for detecting a flammable atmosphere within a compressor during operation thereof is provided. The apparatus comprising a test chamber which is selectably connected between the compressor and an exhaust duct of the compressor using isolation means; an ignition device which is located within the test chamber for igniting any flammable fluid mixture present therein; and sensing means associated with the test chamber for monitoring a parameter indicative of combustion within the test chamber and for outputting a signal indicative of the parameter to a controller.
摘要:
Apparatus for detecting a flammable atmosphere within a compressor during operation thereof is provided. The apparatus comprising a test chamber which is selectably connected between the compressor and an exhaust duct of the compressor using isolation device; an ignition device which is located within the test chamber for igniting any flammable fluid mixture present therein; and sensor associated with the test chamber for monitoring a parameter indicative of combustion within the test chamber and for outputting a signal indicative of the parameter to a controller.
摘要:
Apparatus is described for inhibiting the propagation of a flame front ignited by a pumping mechanism drawing a waste stream from a process chamber. A combustion chamber comprises an inlet for receiving the waste stream exhaust from the pumping mechanism and means for generating a flame for burning a flammable component of the waste stream. A pressure detector detects a pressure at a location through which the waste stream is drawn by the pumping mechanism, and a flame detector detects the presence of a flame in th combustion chamber. A controller regulates the delivery of at least one process fluid to the process chamber if the detected pressure is greater than a pressure above which the flame front can be sustained by the waste stream, or if there is no flame present in the combustion chamber.