Vacuum pump
    1.
    发明授权
    Vacuum pump 有权
    真空泵

    公开(公告)号:US08105051B2

    公开(公告)日:2012-01-31

    申请号:US11629650

    申请日:2005-06-13

    IPC分类号: F04B49/00

    摘要: A method of inhibiting combustion within a vacuum pump is provided. The method steps include monitoring and composition of a fluid within the pump and supplying purge gas to the pump to inhibit the onset of a combustion of the fluid. There is also provided a pumping arrangement comprising a vacuum pump (1) together with means (8) for supplying purge gas to the pump. Sensor means (21a, 21b, 21c) are provided for outputting a signal indicative of the onset of a combustion condition within the pump. Control means (22) receive the signal and, in turn, actuate the supply means (9) dependant on the signal received.

    摘要翻译: 提供了一种在真空泵内抑制燃烧的方法。 方法步骤包括监测和组合泵内的流体并将清洗气体供应到泵以抑制流体燃烧的开始。 还提供了一种泵送装置,其包括真空泵(1)以及用于向泵供应净化气体的装置(8)。 传感器装置(21a,21b,21c)用于输出指示泵内燃烧状态开始的信号。 控制装置(22)接收该信号,并依次接收所接收的信号致动供应装置(9)。

    Apparatus for Inhibiting the Propagation of a Flame Front
    5.
    发明申请
    Apparatus for Inhibiting the Propagation of a Flame Front 审中-公开
    用于抑制火焰前沿传播的装置

    公开(公告)号:US20080273995A1

    公开(公告)日:2008-11-06

    申请号:US11885720

    申请日:2006-02-21

    IPC分类号: F04B49/00

    CPC分类号: F04D19/04 F04D27/0292

    摘要: Apparatus is described for inhibiting the propagation of a flame front ignited by a pumping mechanism drawing a waste stream from a process chamber. A combustion chamber comprises an inlet for receiving the waste stream exhaust from the pumping mechanism and means for generating a flame for burning a flammable component of the waste stream. A pressure detector detects a pressure at a location through which the waste stream is drawn by the pumping mechanism, and a flame detector detects the presence of a flame in th combustion chamber. A controller regulates the delivery of at least one process fluid to the process chamber if the detected pressure is greater than a pressure above which the flame front can be sustained by the waste stream, or if there is no flame present in the combustion chamber.

    摘要翻译: 描述了用于抑制由泵送机构引燃的火焰前沿的传播的装置,该泵送机构从处理室抽取废物流。 燃烧室包括用于接收来自泵送机构的废物流排气的入口和用于产生用于燃烧废物流的可燃组分的火焰的装置。 压力检测器检测通过泵送机构吸收废物流的位置处的压力,并且火焰检测器检测燃烧室中是否存在火焰。 如果检测到的压力大于其中火焰前端可被废物流维持的压力,或者如果在燃烧室中不存在火焰,则控制器调节至少一个过程流体向处理室的输送。