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公开(公告)号：US08362408B2
公开(公告)日：2013-01-29
申请号：US12603725
申请日：2009-10-22
Applicant: Robert J. Carlson
Inventor： Robert J. Carlson
IPC: F41G7/00
CPC classification number: F42B10/663 , F42B10/40
Abstract: A steerable projectile comprises a pressure chamber to hold gas in a pressurized state; and a body section coupled to the pressure chamber, the body section having a flight system to use the pressurized gas for adjusting a trajectory of the projectile. The pressure chamber comprises an orifice in a wall of the pressure chamber; and a check valve corresponding to the orifice, the check valve configured to allow gas that results from ignition of a propellant to enter the pressure chamber via the corresponding orifice and to prevent the gas, once inside the pressure chamber, from exiting the pressure chamber via the corresponding orifice.
Abstract translation: 可操纵的抛射体包括用于将气体保持在加压状态的压力室; 以及联接到所述压力室的主体部分，所述主体部分具有使用所述加压气体来调节所述弹丸的轨迹的飞行系统。 所述压力室包括在所述压力室的壁中的孔口; 以及与所述孔对应的止回阀，所述止回阀构造成允许由推进剂的点燃引起的气体经由相应的孔口进入压力室，并且一旦在压力室内部阻止气体离开压力室经由 相应的孔。
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公开(公告)号：US4922277A
公开(公告)日：1990-05-01
申请号：US277082
申请日：1988-11-28
Applicant: Robert J. Carlson , Michael D. Grimm
Inventor： Robert J. Carlson , Michael D. Grimm
IPC: G03F7/30
CPC classification number: G03F7/3028 , G03F7/30 , Y10S134/902
Abstract: To provide for improved uniformity of photoresist developing of silicon wafers, developer solution is injected via an inlet port through a set of holes in a surface in a chuck and distributed across the wafer thereby developing the wafer pattern. A second set of holes in the same surface of the chuck act as exhaust outlets for the used developer. An end point detector is associated with an outlet duct. This design provides great uniformity potential since it is a single wafer system, and the holes and fluid flows can be adjusted as needed. Also, this design requires minimum developer volume which means end point detection can take place using the waste developer at the outlet. Test such as optical density or color, PH or normality, density, or others can detect photoresist content in effluent to determine completion.
Abstract translation: 为了提供硅晶片的光致抗蚀剂显影的均匀性，显影剂溶液通过入口通过卡盘表面中的一组孔注入并分布在晶片上，从而显影晶片图案。 在卡盘的相同表面中的第二组孔用作用于显影剂的排气口。 端点检测器与出口管道相关联。 该设计提供了巨大的均匀性，因为它是单个晶片系统，并且孔和流体流可以根据需要进行调整。 此外，该设计需要最小显影剂体积，这意味着可以使用出口处的废弃显影剂进行终点检测。 诸如光密度或颜色，PH或正常度，密度等的测试可以检测流出物中的光致抗蚀剂含量以确定完成。
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公开(公告)号：US08851442B2
公开(公告)日：2014-10-07
申请号：US12017944
申请日：2008-01-22
Applicant: Robert J. Carlson
Inventor： Robert J. Carlson
CPC classification number: B29C33/3842 , B29C41/00 , B29C59/14 , B29C59/16 , B29K2909/00 , B29K2995/0037 , B81B7/00 , B81B2201/05 , B81B2201/058 , B81B2203/0127 , B81C99/009 , B81C2201/0132 , B81C2201/0143 , B81C2201/034 , C23F1/02 , H01L21/30604 , Y10T428/24496
Abstract: The invention is directed to a patterned aerogel-based layer that serves as a mold for at least part of a microelectromechanical feature. The density of an aerogel is less than that of typical materials used in MEMS fabrication, such as poly-silicon, silicon oxide, single-crystal silicon, metals, metal alloys, and the like. Therefore, one may form structural features in an aerogel-based layer at rates significantly higher than the rates at which structural features can be formed in denser materials. The invention further includes a method of patterning an aerogel-based layer to produce such an aerogel-based mold. The invention further includes a method of fabricating a microelectromechanical feature using an aerogel-based mold. This method includes depositing a dense material layer directly onto the outline of at least part of a microelectromechanical feature that has been formed in the aerogel-based layer.
Abstract translation: 本发明涉及用作至少部分微机电特征的模具的图案化气凝胶基层。 气凝胶的密度小于MEMS制造中使用的典型材料的密度，例如多晶硅，氧化硅，单晶硅，金属，金属合金等。 因此，可以以明显高于在较致密的材料中形成结构特征的速率的速率在气凝胶层中形成结构特征。 本发明还包括一种图案化气凝胶层以产生这种基于气凝胶的模具的方法。 本发明还包括使用基于气凝胶的模具制造微机电特征的方法。 该方法包括将致密材料层直接沉积在已经形成在气凝胶层中的微机电特征的至少一部分的轮廓上。
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公开(公告)号：US20090184088A1
公开(公告)日：2009-07-23
申请号：US12017944
申请日：2008-01-22
Applicant: Robert J. Carlson
Inventor： Robert J. Carlson
CPC classification number: B29C33/3842 , B29C41/00 , B29C59/14 , B29C59/16 , B29K2909/00 , B29K2995/0037 , B81B7/00 , B81B2201/05 , B81B2201/058 , B81B2203/0127 , B81C99/009 , B81C2201/0132 , B81C2201/0143 , B81C2201/034 , C23F1/02 , H01L21/30604 , Y10T428/24496
Abstract: The invention is directed to a patterned aerogel-based layer that serves as a mold for at least part of a microelectromechanical feature. The density of an aerogel is less than that of typical materials used in MEMS fabrication, such as poly-silicon, silicon oxide, single-crystal silicon, metals, metal alloys, and the like. Therefore, one may form structural features in an aerogel-based layer at rates significantly higher than the rates at which structural features can be formed in denser materials. The invention further includes a method of patterning an aerogel-based layer to produce such an aerogel-based mold. The invention further includes a method of fabricating a microelectromechanical feature using an aerogel-based mold. This method includes depositing a dense material layer directly onto the outline of at least part of a microelectromechanical feature that has been formed in the aerogel-based layer.
Abstract translation: 本发明涉及用作至少部分微机电特征的模具的图案化气凝胶基层。 气凝胶的密度小于MEMS制造中使用的典型材料的密度，例如多晶硅，氧化硅，单晶硅，金属，金属合金等。 因此，可以以明显高于在较致密的材料中形成结构特征的速率的速率在气凝胶层中形成结构特征。 本发明还包括一种图案化气凝胶层以产生这种基于气凝胶的模具的方法。 本发明还包括使用基于气凝胶的模具制造微机电特征的方法。 该方法包括将致密材料层直接沉积在已经形成在气凝胶层中的微机电特征的至少一部分的轮廓上。
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5.发明申请APPARATUS AND METHOD FOR PROVIDING ISOLATION BETWEEN COMPONENTS IN MICROFABRICATED DEVICES 审中-公开用于在微型化装置中提供组分之间的分离的装置和方法公开(公告)号：US20120219760A1
公开(公告)日：2012-08-30
申请号：US13036922
申请日：2011-02-28
Applicant: James F. Detry , Robert J. Carlson , Pamela Marie Norris , Arthur Weston Lichtenberger , Roy Matthews , Casey Marie Nabors Bauer , Matthew Linton Bauer
Inventor： James F. Detry , Robert J. Carlson , Pamela Marie Norris , Arthur Weston Lichtenberger , Roy Matthews , Casey Marie Nabors Bauer , Matthew Linton Bauer
CPC classification number: B81B3/0081 , B81B3/0086 , B81B7/0012 , Y10T428/24496 , Y10T428/249953 , Y10T428/249981 , Y10T428/24999
Abstract: An apparatus and method for providing isolation between components in microfabricated devices is provided. In one embodiment, a microfabricated device comprises: a base layer; a microfabricated component; and a non-sacrificial aerogel layer in contact with the microfabricated component and supporting the microfabricated thermal component on the base layer. The non-sacrificial aerogel layer is positioned to provide at least one of thermal, electrical or acoustic isolation between the microfabricated thermal component and the base layer.
Abstract translation: 提供了一种用于提供微加工装置中的部件之间的隔离的装置和方法。 在一个实施例中，微加工装置包括：基层; 微加成分; 以及与所述微细成分接触并且在所述基底层上支撑所述微细加热的热成分的非牺牲气凝胶层。 非牺牲气凝胶层被定位成提供微加工热组分和基层之间的热，电或声隔离中的至少一种。
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Patent Agency Ranking
公开(公告)号：US4704188A
公开(公告)日：1987-11-03
申请号：US564793
申请日：1983-12-23
Applicant: Robert J. Carlson , Paulette S. Shelburne
Inventor： Robert J. Carlson , Paulette S. Shelburne
IPC: C23F1/26 , H01C17/075 , H01L21/02 , H01L21/311 , B44C1/22
CPC classification number: H01L28/24 , C23F1/26 , H01C17/075 , H01L21/31111
Abstract: Thin films of chromium/silicon/nitrogen are etched in a solution of HF, H.sub.2 O.sub.2, HCl, and H.sub.2 O.
Abstract translation: 在HF，H 2 O 2，HCl和H 2 O的溶液中蚀刻铬/硅/氮的薄膜。
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公开(公告)号：US06178593B2
公开(公告)日：2001-01-30
申请号：US09178283
申请日：1998-10-23
Applicant: Robert J. Carlson
Inventor： Robert J. Carlson
IPC: E05F502
CPC classification number: E05F7/005 , E05F5/025 , E05Y2900/531 , Y10T16/532 , Y10T16/5324 , Y10T16/53257 , Y10T16/557 , Y10T16/61
Abstract: A cylindrical cam apparatus attached to the lower hinge of an automobile door; adjusted as such to automatically spread the hinge leaves apart during closing thereof, thus compensating for hinge assembly wear, restoring smooth and complete latching function of vehicle door.
Abstract translation: 安装在汽车门的下铰链上的圆柱形凸轮装置; 调整为在关闭时自动地将铰链叶片分开，从而补偿铰链组件的磨损，恢复车门的平滑和完全的闩锁功能。
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公开(公告)号：US5388931A
公开(公告)日：1995-02-14
申请号：US137729
申请日：1993-10-18
Applicant: Robert J. Carlson
Inventor： Robert J. Carlson
CPC classification number: E02D19/18 , E02D19/185 , Y10T403/61
Abstract: Methods and structural configurations of modular barrier systems and cutoff walls used to isolate contaminated soils from the environment in situ. The cutoff walls comprise plastic sheets, preferably of high density polyethylene, inserted in or adjacent to dense soil (such as bentonite modified) walls, and they are connected to each other with tubular connectors having flaps to which the plastic sheets are connected, preferably by welding.
Abstract translation: 用于将受污染土壤与原位环境隔离的模块化屏障系统和截流墙的方法和结构配置。 切断壁包括插入密实土壤（例如膨润土改性的）壁中或邻近密实的土壤（例如膨润土改性的）壁的塑料片，优选为高密度聚乙烯，并且它们彼此连接，管状连接器具有与塑料片相连的折片，优选地通过 焊接。
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公开(公告)号：US4445966A
公开(公告)日：1984-05-01
申请号：US505624
申请日：1983-06-20
Applicant: Robert J. Carlson , Daniel W. Youngner
Inventor： Robert J. Carlson , Daniel W. Youngner
IPC: H01L21/3213 , C23F1/02 , B44C1/22 , C03C15/00 , C03C25/06
CPC classification number: H01L21/32136 , H01L21/32137
Abstract: A method of etching a thin film containing chromium using fluorine or a fluorine containing compound without leaving an electrically conductive residue is described.
Abstract translation: 描述了使用氟或含氟化合物蚀刻含铬的薄膜而不留下导电残留物的方法。
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公开(公告)号：US20110094372A1
公开(公告)日：2011-04-28
申请号：US12603725
申请日：2009-10-22
Applicant: Robert J. Carlson
Inventor： Robert J. Carlson
CPC classification number: F42B10/663 , F42B10/40
Abstract: A steerable projectile comprises a pressure chamber to hold gas in a pressurized state; and a body section coupled to the pressure chamber, the body section having a flight system to use the pressurized gas for adjusting a trajectory of the projectile. The pressure chamber comprises an orifice in a wall of the pressure chamber; and a check valve corresponding to the orifice, the check valve configured to allow gas that results from ignition of a propellant to enter the pressure chamber via the corresponding orifice and to prevent the gas, once inside the pressure chamber, from exiting the pressure chamber via the corresponding orifice.
Abstract translation: 可操纵的抛射体包括用于将气体保持在加压状态的压力室; 以及联接到所述压力室的主体部分，所述主体部分具有使用所述加压气体来调节所述弹丸的轨迹的飞行系统。 所述压力室包括在所述压力室的壁中的孔口; 以及与所述孔对应的止回阀，所述止回阀构造成允许由推进剂的点燃引起的气体经由相应的孔口进入压力室，并且一旦在压力室内部阻止气体离开压力室经由 相应的孔。
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