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1.发明授权Determining positional error of an optical component using structured light patterns 有权使用结构化光图案确定光学部件的位置误差公开(公告)号：US07599071B2
公开(公告)日：2009-10-06
申请号：US11910646
申请日：2006-04-04
Applicant: Robert F. Dillon , Roy D. Allen , Neil Judell , Yi Qian
Inventor： Robert F. Dillon , Roy D. Allen , Neil Judell , Yi Qian
CPC classification number: G01B11/2441 , G01B11/2527
Abstract: Described is an interferometric surface contour measurement system for projecting structured light patterns onto an object. The measurement system includes an interferometric projector, an imager, and a processor. The imager is rigidly coupled to the projector to maintain a stable relationship to the projected, structured light pattern. The imager receives the structured light pattern and together with the processor, determines whether the projected image includes a positional error. In some embodiments, the projector is a multi-channel projector, each channel having an optical axis spatially separated from the others, one of the channels including the imager and dedicated for determining positional error. In other embodiments, the projector is a single-channel projector projecting a structured light pattern onto the object, a portion of the structured light pattern being tapped-off for determining positional error.
Abstract translation: 描述了一种用于将结构光图案投影到物体上的干涉测量表面轮廓测量系统。 测量系统包括干涉式投影仪，成像器和处理器。 成像器刚性耦合到投影仪以保持与投影的结构化光图案的稳定关系。 成像器接收结构化光图案并与处理器一起确定投影图像是否包括位置误差。 在一些实施例中，投影仪是多通道投影仪，每个通道具有与其它通道在空间上分离的光轴，其中一个通道包括成像器，专用于确定位置误差。 在其他实施例中，投影仪是将结构化光图案投射到物体上的单通道投影仪，结构化光图案的一部分被分接以确定位置误差。
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2.发明申请Determining Positional Error of an Optical Component Using Structured Light Patterns 有权使用结构光模式确定光学部件的位置误差公开(公告)号：US20080180693A1
公开(公告)日：2008-07-31
申请号：US11910646
申请日：2006-04-04
Applicant: Robert F. Dillon , Roy D. Allen , Neil Judell , Yi Qian
Inventor： Robert F. Dillon , Roy D. Allen , Neil Judell , Yi Qian
IPC: G01B9/02
CPC classification number: G01B11/2441 , G01B11/2527
Abstract: Described is an interferometric surface contour measurement system for projecting structured light patterns onto an object. The measurement system includes an interferometric projector, an imager, and a processor. The imager is rigidly coupled to the projector to maintain a stable relationship to the projected, structured light pattern. The imager receives the structured light pattern and together with the processor, determines whether the projected image includes a positional error. In some embodiments, the projector is a multi-channel projector, each channel having an optical axis spatially separated from the others, one of the channels including the imager and dedicated for determining positional error. In other embodiments, the projector is a single-channel projector projecting a structured light pattern onto the object, a portion of the structured light pattern being tapped-off for determining positional error.
Abstract translation: 描述了一种用于将结构光图案投影到物体上的干涉测量表面轮廓测量系统。 测量系统包括干涉式投影仪，成像器和处理器。 成像器刚性耦合到投影仪以保持与投影的结构化光图案的稳定关系。 成像器接收结构化光图案并与处理器一起确定投影图像是否包括位置误差。 在一些实施例中，投影仪是多通道投影仪，每个通道具有与其它通道在空间上分离的光轴，其中一个通道包括成像器，专用于确定位置误差。 在其他实施例中，投影仪是将结构化光图案投射到物体上的单通道投影仪，结构化光图案的一部分被分接以确定位置误差。
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公开(公告)号：US07751063B2
公开(公告)日：2010-07-06
申请号：US11910638
申请日：2006-04-04
Applicant: Robert F. Dillon , Neil Judell , Yi Qian , Yunqing Zhu , D. Scott Ackerson , Gurpreet Singh
Inventor： Robert F. Dillon , Neil Judell , Yi Qian , Yunqing Zhu , D. Scott Ackerson , Gurpreet Singh
CPC classification number: G01B11/2441 , G01B11/2527
Abstract: Described is a multiple channel interferometric surface contour measurement system. The measurement system includes a multiple channel interferometer projector, a digital camera and a processor. The projector includes two or more interferometer channels. Each channel has an optical axis spatially separate from the optical axes of the other channels. Each channel projects a fringe pattern onto the surface of an object to be measured. Image data for the fringe patterns projected on the object surface are acquired by the digital camera. The processor controls the projection of the fringe patterns of different spatial frequencies, adjusts the phase of each fringe pattern and generates surface contour data in response to the camera image data. The multiple channel interferometric surface contour measurement system provides numerous advantages over conventional single channel interferometric systems, including reduced sensitivity to optical noise, improved stability and increased measurement accuracy.
Abstract translation: 描述了多通道干涉测量表面轮廓测量系统。 测量系统包括多通道干涉仪投影仪，数码相机和处理器。 该投影仪包括两个或更多个干涉仪通道。 每个通道具有与其他通道的光轴在空间上分开的光轴。 每个通道将条纹图案投射到要测量的对象的表面上。 通过数码相机获取投影在物体表面上的条纹图案的图像数据。 处理器控制不同空间频率的条纹图案的投影，调整每个条纹图案的相位并响应于相机图像数据生成表面轮廓数据。 多通道干涉测量表面轮廓测量系统提供了许多优于传统单通道干涉测量系统的优点，包括降低对光学噪声的灵敏度，改进的稳定性和增加的测量精度。
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公开(公告)号：US20080165341A1
公开(公告)日：2008-07-10
申请号：US11910638
申请日：2006-04-04
Applicant: Robert F. Dillon , Neil Judell , Yi Qian , Yuqing Zhu , D. Scott Ackerson , Gurpreet Singh
Inventor： Robert F. Dillon , Neil Judell , Yi Qian , Yuqing Zhu , D. Scott Ackerson , Gurpreet Singh
CPC classification number: G01B11/2441 , G01B11/2527
Abstract: Described is a multiple channel interferometric surface contour measurement system. The measurement system includes a multiple channel interferometer projector, a digital camera and a processor. The projector includes two or more interferometer channels. Each channel has an optical axis spatially separate from the optical axes of the other channels. Each channel projects a fringe pattern onto the surface of an object to be measured. Image data for the fringe patterns projected on the object surface are acquired by the digital camera. The processor controls the projection of the fringe patterns of different spatial frequencies, adjusts the phase of each fringe pattern and generates surface contour data in response to the camera image data. The multiple channel interferometric surface contour measurement system provides numerous advantages over conventional single channel interferometric systems, including reduced sensitivity to optical noise, improved stability and increased measurement accuracy.
Abstract translation: 描述了多通道干涉测量表面轮廓测量系统。 测量系统包括多通道干涉仪投影仪，数码相机和处理器。 该投影仪包括两个或更多个干涉仪通道。 每个通道具有与其他通道的光轴在空间上分开的光轴。 每个通道将条纹图案投射到要测量的对象的表面上。 通过数码相机获取投影在物体表面上的条纹图案的图像数据。 处理器控制不同空间频率的条纹图案的投影，调整每个条纹图案的相位并响应于相机图像数据生成表面轮廓数据。 多通道干涉测量表面轮廓测量系统提供了许多优于传统单通道干涉测量系统的优点，包括降低对光学噪声的灵敏度，改进的稳定性和增加的测量精度。
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公开(公告)号：US20090324212A1
公开(公告)日：2009-12-31
申请号：US12553526
申请日：2009-09-03
Applicant: Robert F. Dillon , Neil Judell , Yi Qian , Yuqing Zhu , D. Scott Ackerson , Gurpreet Singh
Inventor： Robert F. Dillon , Neil Judell , Yi Qian , Yuqing Zhu , D. Scott Ackerson , Gurpreet Singh
IPC: G03B17/00
CPC classification number: G01B11/2441 , G01B11/2527
Abstract: Described is a multiple channel interferometric surface contour measurement system. The measurement system includes a multiple channel interferometer projector, a digital camera and a processor. The projector includes two or more interferometer channels. Each channel has an optical axis spatially separate from the optical axes of the other channels. Each channel projects a fringe pattern onto the surface of an object to be measured. Image data for the fringe patterns projected on the object surface are acquired by the digital camera. The processor controls the projection of the fringe patterns of different spatial frequencies, adjusts the phase of each fringe pattern and generates surface contour data in response to the camera image data. The multiple channel interferometric surface contour measurement system provides numerous advantages over conventional single channel interferometric systems, including reduced sensitivity to optical noise, improved stability and increased measurement accuracy.
Abstract translation: 描述了多通道干涉测量表面轮廓测量系统。 测量系统包括多通道干涉仪投影仪，数码相机和处理器。 该投影仪包括两个或更多个干涉仪通道。 每个通道具有与其他通道的光轴在空间上分开的光轴。 每个通道将条纹图案投射到要测量的对象的表面上。 通过数码相机获取投影在物体表面上的条纹图案的图像数据。 处理器控制不同空间频率的条纹图案的投影，调整每个条纹图案的相位并响应于相机图像数据生成表面轮廓数据。 多通道干涉测量表面轮廓测量系统提供了许多优于传统单通道干涉测量系统的优点，包括降低对光学噪声的灵敏度，改进的稳定性和增加的测量精度。
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Patent Agency Ranking
公开(公告)号：US07595892B2
公开(公告)日：2009-09-29
申请号：US11910642
申请日：2006-04-04
Applicant: Neil Judell , Robert F. Dillon
Inventor： Neil Judell , Robert F. Dillon
CPC classification number: G01B11/2441 , G01B11/2527
Abstract: Described are a multiple channel interferometric surface contour measurement system and methods of determining surface contour data for the same. The measurement system includes a multiple channel interferometer projector, a digital camera and a processor. Fringe patterns generated by spatially separate channels in the projector are projected onto an object surface to be measured. The digital camera acquires images of the fringe patterns and the processor determines surface contour data from the fringe patterns. More specifically, fringe numbers are determined for points on the object surface based on image data. The fringe numbers are modified according to collinear adjustment values so that the modified fringe numbers correspond to a common, collinear axis for the interferometer projector. After unwrapping the modified fringe numbers, the unwrapped values are modified by the collinear adjustment values to obtain accurate fringe numbers for the pixels in each interferometer channel.
Abstract translation: 描述了多通道干涉测量表面轮廓测量系统以及确定其表面轮廓数据的方法。 测量系统包括多通道干涉仪投影仪，数码相机和处理器。 将通过投影仪中的空间分离的通道产生的边缘图案投影到要测量的物体表面上。 数码相机获取条纹图案的图像，并且处理器从边缘图案确定表面轮廓数据。 更具体地说，基于图像数据确定物体表面上的点的条纹数。 根据共线调整值修改条纹数，使得修改的条纹数对应于用于干涉仪投影仪的共同的共线轴。 在展开修改的条纹编号之后，通过共线调整值修改展开的值，以获得每个干涉仪通道中的像素的精确边缘数。
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公开(公告)号：US20080259348A1
公开(公告)日：2008-10-23
申请号：US11910642
申请日：2006-04-04
Applicant: Neil Judell , Robert F. Dillon
Inventor： Neil Judell , Robert F. Dillon
IPC: G01B11/24
CPC classification number: G01B11/2441 , G01B11/2527
Abstract: Described are a multiple channel interferometric surface contour measurement system and methods of determining surface contour data for the same. The measurement system includes a multiple channel interferometer projector, a digital camera and a processor. Fringe patterns generated by spatially separate channels in the projector are projected onto an object surface to be measured. The digital camera acquires images of the fringe patterns and the processor determines surface contour data from the fringe patterns. More specifically, fringe numbers arc determined for points on the object surface based on image data. The fringe numbers are modified according to collinear adjustment values so that the modified fringe numbers correspond to a common, collinear axis for the interferometer projector. After unwrapping the modified fringe numbers, the unwrapped values are modified by the collinear adjustment values to obtain accurate fringe numbers for the pixels in each interferometer channel.
Abstract translation: 描述了多通道干涉测量表面轮廓测量系统以及确定其表面轮廓数据的方法。 测量系统包括多通道干涉仪投影仪，数码相机和处理器。 将通过投影仪中的空间分离的通道产生的边缘图案投影到要测量的物体表面上。 数码相机获取条纹图案的图像，并且处理器从边缘图案确定表面轮廓数据。 更具体地，基于图像数据，对物体表面上的点确定条纹数。 根据共线调整值修改条纹数，使得修改的条纹数对应于用于干涉仪投影仪的共同的共线轴。 在展开修改的条纹编号之后，通过共线调整值修改展开的值以获得每个干涉仪通道中的像素的精确边缘数。
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公开(公告)号：US08553215B2
公开(公告)日：2013-10-08
申请号：US13709493
申请日：2012-12-10
Applicant: Richard E. Bills , Neil Judell
Inventor： Richard E. Bills , Neil Judell
IPC: G01N21/00
CPC classification number: G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
Abstract: An optical collection system for use in a surface inspection system for inspecting a surface of a workpiece. The surface inspection system has an incident beam projected through a back quartersphere and toward a location on the surface of the workpiece to impinge on the surface. This forms a reflected beam that extends along a light channel axis in a front quartersphere, and forms scattered light having a haze scatter portion. The incident beam and the light channel axis form an incident plane. The optical collection system includes back collectors that are positioned in the back quartersphere for collecting the scattered light, where each of the back collectors is disposed in the back quartersphere outside the incident plane, and at a relative minimum in the Rayleigh scatter.
Abstract translation: 一种用于表面检查系统中用于检查工件表面的光学收集系统。 表面检查系统具有通过背面四分之一球并且朝向工件表面上的位置投射的入射光束撞击在表面上。 这形成沿着前四分之一圆的光通道轴延伸的反射光束，并形成具有雾度散射部分的散射光。 入射光束和光通道轴形成入射平面。 光学收集系统包括位于后方四分之一圈中的后收集器，用于收集散射光，其中每个后收集器设置在入射平面外侧的后四分之一圆周中，并且在瑞利散射中相对最小。
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公开(公告)号：US08537350B2
公开(公告)日：2013-09-17
申请号：US13242065
申请日：2011-09-23
Applicant: Neil Judell , Ian T. Kohl , Songping Gao , Richard E. Bills
Inventor： Neil Judell , Ian T. Kohl , Songping Gao , Richard E. Bills
IPC: G01N21/88
CPC classification number: G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features a variable polarization a polarizing relay assembly arranged to selectively permit the scattered light having a selected polarization orientation to pass along a detector optical axis to a light detection unit in the detection subsystem. The system also features a collector output width varying subsystem for varying the width of an output slit in response to changes in the location of the location scanned on the workpiece.
Abstract translation: 提供了表面检查系统，以及相关的部件和方法。 表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。 该系统具有可变极化，偏振继电器组件被布置成选择性地允许具有选定的偏振取向的散射光沿着检测器光轴传递到检测子系统中的光检测单元。 系统还具有收集器输出宽度变化子系统，用于响应于在工件上扫描的位置的位置的变化而改变输出狭缝的宽度。
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公开(公告)号：US08059268B2
公开(公告)日：2011-11-15
申请号：US12604052
申请日：2009-10-22
Applicant: Neil Judell , Ian T. Kohl , Songping Gao , Richard E. Bills
Inventor： Neil Judell , Ian T. Kohl , Songping Gao , Richard E. Bills
IPC: G01N21/88
CPC classification number: G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features a variable polarization a polarizing relay assembly arranged to selectively permit the scattered light having a selected polarization orientation to pass along a detector optical axis to a light detection unit in the detection subsystem. They system also features a collector output width varying subsystem for varying the width of an output slit in response to changes in the location of the location scanned on the workpiece.
Abstract translation: 提供了表面检查系统，以及相关的部件和方法。 表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。 该系统具有可变极化，偏振继电器组件被布置成选择性地允许具有选定的偏振取向的散射光沿着检测器光轴传递到检测子系统中的光检测单元。 它们还具有收集器输出宽度变化子系统，用于响应于在工件上扫描的位置的位置的变化来改变输出狭缝的宽度。
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