REDUCED-SIZE GUIDED-SURFACE ACOUSTIC WAVE (SAW) DEVICES

    公开(公告)号:US20200274519A1

    公开(公告)日:2020-08-27

    申请号:US16281629

    申请日:2019-02-21

    申请人: Qorvo US, Inc.

    摘要: Reduced-size guided-surface acoustic wave (SAW) resonators are disclosed. Guided-SAW resonators can achieve high acoustic coupling and acoustic quality Q, but may have a larger surface area compared with a traditional temperature compensated (TC)-SAW resonator. In an exemplary aspect, a guided-SAW device is fabricated with a metal-insulator-metal (MIM) capacitor to produce a guided-SAW which has the same high Q with a surface area which is the same or less than traditional TC-SAW resonators.

    Acoustic filtering circuitry including capacitor

    公开(公告)号:US10476481B2

    公开(公告)日:2019-11-12

    申请号:US15670066

    申请日:2017-08-07

    申请人: Qorvo US, Inc.

    IPC分类号: H03H9/64 H03H9/02 H03H3/08

    摘要: Acoustic filtering circuitry includes a piezoelectric layer, a dielectric layer, a plurality of acoustic resonators, and a capacitor. The dielectric layer is over a surface of the piezoelectric layer. The plurality of acoustic resonators each includes a transducer on the surface of the piezoelectric layer such that the transducer is between the piezoelectric layer and the dielectric layer. The capacitor includes a first plate on the surface of the piezoelectric layer such that the first plate is between the piezoelectric layer and the dielectric layer and a second plate over the first plate such that the second plate and the first plate are separated by at least a portion of the dielectric layer.

    Reduced-size guided-surface acoustic wave (SAW) devices

    公开(公告)号:US10886893B2

    公开(公告)日:2021-01-05

    申请号:US16281629

    申请日:2019-02-21

    申请人: Qorvo US, Inc.

    摘要: Reduced-size guided-surface acoustic wave (SAW) resonators are disclosed. Guided-SAW resonators can achieve high acoustic coupling and acoustic quality Q, but may have a larger surface area compared with a traditional temperature compensated (TC)-SAW resonator. In an exemplary aspect, a guided-SAW device is fabricated with a metal-insulator-metal (MIM) capacitor to produce a guided-SAW which has the same high Q with a surface area which is the same or less than traditional TC-SAW resonators.

    Guided acoustic wave device
    5.
    发明授权

    公开(公告)号:US10469050B2

    公开(公告)日:2019-11-05

    申请号:US15679467

    申请日:2017-08-17

    申请人: Qorvo US, Inc.

    摘要: An acoustic wave device includes a piezoelectric layer, an interdigital transducer, and a slow wave propagation overlay over a portion of the interdigital transducer. By providing electrode fingers of the interdigital transducer such that a portion of the width thereof is dependent on an electrode period, a desirable wave mode may be maintained in the acoustic wave device. Further, by varying a width of the slow wave propagation overlay based on the electrode period, the desirable wave mode may be further maintained.