公开(公告)号：US11695384B2

公开(公告)日：2023-07-04

申请号：US17884888

申请日：2022-08-10

Applicant: Qorvo Biotechnologies, LLC

Inventor： Matthew Ryder ,  Rio Rivas ,  Thayne Edwards

IPC: H03H9/02 ,  G01N29/02 ,  G01N29/036 ,  G01N33/536 ,  H03H3/02 ,  H03H9/13 ,  H03H9/17 ,  H03H9/15

CPC classification number: H03H9/02015 ,  G01N29/022 ,  G01N29/036 ,  G01N33/536 ,  H03H3/02 ,  H03H9/131 ,  H03H9/175 ,  G01N2291/0255 ,  G01N2291/0256 ,  G01N2291/0426 ,  H03H2003/027 ,  H03H2009/155

Abstract: A micro-electrical-mechanical system (MEMS) resonator device includes at least one functionalization material arranged over at least a central portion, but less than an entirety, of a top side electrode. For an active region exhibiting greatest sensitivity at a center point and reduced sensitivity along its periphery, omitting functionalization material over at least one peripheral portion of a resonator active region prevents analyte binding in regions of lowest sensitivity. The at least one functionalization material extends a maximum length in a range of from about 20% to about 95% of an active area length and extends a maximum width in a range of from about 50% to 100% of an active area width. Methods for fabricating MEMS resonator devices are also provided.

公开(公告)号：US11444595B2

公开(公告)日：2022-09-13

申请号：US15334459

申请日：2016-10-26

Applicant: Qorvo Biotechnologies, LLC

Inventor： Matthew Ryder ,  Rio Rivas ,  Thayne Edwards

IPC: H03B5/30 ,  H03H9/02 ,  G01N29/02 ,  G01N29/036 ,  G01N33/536 ,  H03H3/02 ,  H03H9/13 ,  H03H9/17 ,  H03H9/15

Abstract: A micro-electrical-mechanical system (MEMS) resonator device includes at least one functionalization material arranged over at least a central portion, but less than an entirety, of a top side electrode. For an active region exhibiting greatest sensitivity at a center point and reduced sensitivity along its periphery, omitting functionalization material over at least one peripheral portion of a resonator active region prevents analyte binding in regions of lowest sensitivity. The at least one functionalization material extends a maximum length in a range of from about 20% to about 95% of an active area length and extends a maximum width in a range of from about 50% to 100% of an active area width. Methods for fabricating MEMS resonator devices are also provided.

公开(公告)号：US20220385262A1

公开(公告)日：2022-12-01

申请号：US17884888

申请日：2022-08-10

Applicant: Qorvo Biotechnologies, LLC

Inventor： Matthew Ryder ,  Rio Rivas ,  Thayne Edwards

IPC: H03H9/02 ,  G01N29/02 ,  G01N29/036 ,  G01N33/536 ,  H03H3/02 ,  H03H9/13 ,  H03H9/17

Abstract: A micro-electrical-mechanical system (MEMS) resonator device includes at least one functionalization material arranged over at least a central portion, but less than an entirety, of a top side electrode. For an active region exhibiting greatest sensitivity at a center point and reduced sensitivity along its periphery, omitting functionalization material over at least one peripheral portion of a resonator active region prevents analyte binding in regions of lowest sensitivity. The at least one functionalization material extends a maximum length in a range of from about 20% to about 95% of an active area length and extends a maximum width in a range of from about 50% to 100% of an active area width. Methods for fabricating MEMS resonator devices are also provided.