公开(公告)号：US20150091007A1

公开(公告)日：2015-04-02

申请号：US14567060

申请日：2014-12-11

Applicant: Pyreos Ltd.

Inventor： Carsten Giebeler ,  Matthias Schreiter ,  Thorsten Steinkopff ,  Wolfram Wersing

IPC: H01L31/09 ,  H01L31/18 ,  H01L31/032

CPC classification number: H01L31/09 ,  C23C14/0036 ,  C23C14/025 ,  C23C14/088 ,  G01J5/34 ,  H01L31/032 ,  H01L31/18 ,  H01L37/04 ,  H01L41/316

Abstract: A method for producing a micro system, said method comprising: providing a substrate (2) made of aluminum oxide; producing a thin film (6) on the substrate (2) by depositing lead zirconate titanate onto the substrate (2) with a thermal deposition method such that the lead zirconate titanate in the thin film (6) is self-polarized and is present predominantly in the rhombohedral phase; and cooling down the substrate (2) together with the thin film (6).

Abstract translation: 一种微系统的制造方法，所述方法包括：提供由氧化铝制成的基板（2）; 通过以热沉积方法将锆钛酸铅沉积到衬底（2）上，使得薄膜（6）中的锆钛酸铅是自偏振的并主要存在的方式在衬底（2）上产生薄膜（6） 在菱形相中; 并与薄膜（6）一起冷却基板（2）。

公开(公告)号：US09601649B2

公开(公告)日：2017-03-21

申请号：US14567060

申请日：2014-12-11

Applicant: Pyreos Ltd.

Inventor： Carsten Giebeler ,  Matthias Schreiter ,  Thorsten Steinkopff ,  Wolfram Wersing

IPC: H01L21/4763 ,  H01L31/09 ,  C23C14/00 ,  C23C14/02 ,  C23C14/08 ,  G01J5/34 ,  H01L37/04 ,  H01L41/316 ,  H01L31/032 ,  H01L31/18

CPC classification number: H01L31/09 ,  C23C14/0036 ,  C23C14/025 ,  C23C14/088 ,  G01J5/34 ,  H01L31/032 ,  H01L31/18 ,  H01L37/04 ,  H01L41/316

Abstract: A method for producing a micro system, said method comprising: providing a substrate (2) made of aluminum oxide; producing a thin film (6) on the substrate (2) by depositing lead zirconate titanate onto the substrate (2) with a thermal deposition method such that the lead zirconate titanate in the thin film (6) is self-polarized and is present predominantly in the rhombohedral phase; and cooling down the substrate (2) together with the thin film (6).