公开(公告)号：US07489987B2

公开(公告)日：2009-02-10

申请号：US11462134

申请日：2006-08-03

Applicant: Peter Heiland ,  Peter A. Kropp

Inventor： Peter Heiland ,  Peter A. Kropp

IPC: G05B13/00

CPC classification number: F16F15/002

Abstract: Control of an active vibration isolation system with a digital controller, which includes an FPGA system (5) as the control unit. The FPGA system (5) is made up of freely programmable gate arrays with a sensor control matrix (51), which calculates axis signals in required degrees of freedom, with a control cascade block (53) for the axis signals containing several biquad filters (531, 532, 533, 534, 535), and with an output signal calculation block (55) for calculating digital actuator actuation signals. A digital signal processor (9) is connected in parallel with the FPGA system (5) in order to calculate controls with low phase loss requirements.

Abstract translation: 使用数字控制器控制主动隔振系统，其中包括一个FPGA系统（5）作为控制单元。 FPGA系统（5）由具有传感器控制矩阵（51）的可自由编程的门阵列组成，传感器控制矩阵（51）利用包含若干双二进制滤波器的轴信号的控制级联块（53）来计算所需自由度的轴信号 以及用于计算数字致动器致动信号的输出信号计算块（55）。 数字信号处理器（9）与FPGA系统（5）并联连接，以便计算具有低相位损耗要求的控制。

公开(公告)号：US08592777B2

公开(公告)日：2013-11-26

申请号：US13540783

申请日：2012-07-03

Applicant: Peter A. Kropp

Inventor： Peter A. Kropp

IPC: H01J37/147

CPC classification number: H01J37/1475 ,  H01J37/09 ,  H01J37/1471 ,  H01J37/26

Abstract: An arrangement and a method for imaging, examining and processing a sample using electrons. The arrangement comprises an electron microscope for providing electrons, a chamber with a sample holder on which a sample is positionable such that it can be imaged, examined and processed using the electrons. A system for magnetic field compensation in at least one spatial direction, including a compensation coil, wherein a wall of the chamber has an accommodation area, in sections thereof, for a portion of the compensation coil. Generally, only the chamber in which the sample is arranged is considered as a compensation volume. It suffice to reduce the compensation volume to the sensitive region of the electron microscope, since it is in the chamber, shortly following a final focusing and filtering, where the electron beam is most sensitive in terms of image quality when subjected to external electromagnetic interference.

Abstract translation: 使用电子对样品进行成像，检查和处理的装置和方法。 该装置包括用于提供电子的电子显微镜，具有样品保持器的室，样品可定位在其上，使得其可以使用电子进行成像，检查和处理。 一种用于在至少一个空间方向上进行磁场补偿的系统，包括补偿线圈，其中所述腔室的壁具有用于所述补偿线圈的一部分的部分的容纳区域。 一般而言，仅将样品排列的室视为补偿量。 由于在室内进行最终的聚焦和滤波，电子束在受到外部电磁干扰时在图像质量方面最为敏感，所以将补偿量减小到电子显微镜的敏感区域就足够了。

公开(公告)号：US20130009056A1

公开(公告)日：2013-01-10

申请号：US13540783

申请日：2012-07-03

Applicant: Peter A. Kropp

Inventor： Peter A. Kropp

IPC: H01J37/04 ,  G21K5/04

CPC classification number: H01J37/1475 ,  H01J37/09 ,  H01J37/1471 ,  H01J37/26

Abstract: An arrangement and a method for imaging, examining and processing a sample using electrons. The arrangement comprises an electron microscope for providing electrons, a chamber with a sample holder on which a sample is positionable such that it can be imaged, examined and processed using the electrons. A system for magnetic field compensation in at least one spatial direction, including a compensation coil, wherein a wall of the chamber has an accommodation area, in sections thereof, for a portion of the compensation coil. Generally, only the chamber in which the sample is arranged is considered as a compensation volume. It suffice to reduce the compensation volume to the sensitive region of the electron microscope, since it is in the chamber, shortly following a final focusing and filtering, where the electron beam is most sensitive in terms of image quality when subjected to external electromagnetic interference.