公开(公告)号：US20240423004A1

公开(公告)日：2024-12-19

申请号：US18822525

申请日：2024-09-03

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： TAKANORI DOI ,  JUNJI HIRASE ,  RYOTA SAKAIDA ,  SHUNSUKE ISONO ,  YUUKO TOMEKAWA

IPC: H10K39/32

Abstract: An image sensor includes a photoelectric conversion film, an upper electrode, and a connector. The upper electrode is located on or above the photoelectric conversion film. The connector is electrically connected to the upper electrode. On a first section parallel to a direction perpendicular to the photoelectric conversion film, the connector is in contact with the side surface of the photoelectric conversion film. On the first section, the upper electrode extends to a position outward of the outer edge of the upper surface of the photoelectric conversion film.

公开(公告)号：US20230268371A1

公开(公告)日：2023-08-24

申请号：US18303604

申请日：2023-04-20

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： YUUKO TOMEKAWA ,  KAZUKO NISHIMURA

IPC: H01L27/146

CPC classification number: H01L27/14641 ,  H01L27/14609 ,  H01L27/14645 ,  H01L27/14649 ,  H01L27/14658

Abstract: An imaging device includes a first photoelectric converter, a second photoelectric converter, and a first capacitive element. The first photoelectric converter converts light having a wavelength in a first wavelength region into first electric charge. The second photoelectric converter converts light having a wavelength in a second wavelength region into second electric charge. The second photoelectric converter is arranged at a different height from the first photoelectric converter in a thickness direction of the imaging device. The first capacitive element accumulates the first electric charge and the second electric charge.

公开(公告)号：US20230114451A1

公开(公告)日：2023-04-13

申请号：US18051866

申请日：2022-11-01

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： DAISUKE WAKABAYASHI ,  YUUKO TOMEKAWA

IPC: H10K39/32

Abstract: An imaging device includes: a photoelectric conversion film; a first electrode located above the photoelectric conversion film; a second electrode; a plug coupled to the second electrode; a protective film located above the second electrode; and a wiring line that electrically couples the first electrode to the second electrode. The protective film overlaps the entire plug and does not overlap the photoelectric conversion film in plan view. The second electrode includes a non-overlapping portion that does not overlap the protective film in plan view, and the wiring line is coupled to the non-overlapping portion of the second electrode.

公开(公告)号：US20240186343A1

公开(公告)日：2024-06-06

申请号：US18442157

申请日：2024-02-15

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： JUNJI HIRASE ,  AKIO NAKAJUN ,  YUUKO TOMEKAWA

IPC: H01L27/146 ,  H01L31/0224 ,  H01L31/055

CPC classification number: H01L27/14605 ,  H01L27/14618 ,  H01L27/14623 ,  H01L31/022425 ,  H01L31/055

Abstract: An imaging device includes: a semiconductor substrate; an effective pixel region including an effective pixel; a non-effective pixel region that is located around the effective pixel region and that does not include the effective pixel; a photoelectric converter that is located above the semiconductor substrate and that includes a first portion located in the effective pixel region and a second portion located in the non-effective pixel region; a light-shielding film that is located above the second portion of the photoelectric converter and that contains titanium or tantalum; and a functional film that is located on the light-shielding film and that is in contact with the light-shielding film. The functional film has a thickness less than a thickness of the light-shielding film.

公开(公告)号：US20210013253A1

公开(公告)日：2021-01-14

申请号：US17028627

申请日：2020-09-22

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： MASAYUKI TAKASE ,  SHUNSUKE ISONO ,  YUUKO TOMEKAWA

IPC: H01L27/146

Abstract: An electronic device includes: a capacitor; an insulating layer; at feast one trench provided in the insulating layer; and a first conductive plug, at least part of which is surrounded by the insulating layer. The capacitor includes: a first lower electrode provided along an inner wall of the at least one trench, a dielectric layer provided on the first lower electrode, and an upper electrode provided on the dielectric layer. At least part of the first conductive plug is positioned between an upper surface of the insulating layer and a lowermost portion of the at least one trench.

公开(公告)号：US20190181178A1

公开(公告)日：2019-06-13

申请号：US16174156

申请日：2018-10-29

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： MASAYUKI TAKASE ,  YUUKO TOMEKAWA ,  YOSHIHIRO SATO

IPC: H01L27/146 ,  H04N5/363 ,  H04N5/3745 ,  H01L49/02

Abstract: An image capture device includes pixels and a signal line that is arranged across two or more of the pixels. Each pixel includes: a semiconductor substrate, a photoelectric converter including a first electrode, a second electrode, and a photoelectric conversion layer; a first transistor including first and second impurity regions in the substrate; a wiring layer between the substrate and the second electrode; and a capacitor arranged between the wiring layer and the substrate in a normal direction of the substrate and including a third electrode, a fourth electrode between the third electrode and the substrate, and a dielectric layer. The first impurity region is electrically connected to the second electrode, the fourth electrode is electrically connected to one of the first and second impurity regions, and at least either the third or fourth electrodes covers the first impurity region when viewed along the normal direction.

公开(公告)号：US20230309332A1

公开(公告)日：2023-09-28

申请号：US18303603

申请日：2023-04-20

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： YUUKO TOMEKAWA

IPC: H10K39/32

CPC classification number: H10K39/32

Abstract: An imaging device includes a first photoelectric converter, a first capacitive element, a second photoelectric converter, and a second capacitive element. The first photoelectric converter converts light having a wavelength in a first wavelength region into first electric charge. The first capacitive element accumulates the first electric charge. The first capacitive element includes a first electrode, a second electrode, and a first dielectric. The second photoelectric converter is arranged at a different height from the first photoelectric converter in a thickness direction of the imaging device. The second photoelectric converter converts light having a wavelength in a second wavelength region into second electric charge. The second capacitive element accumulates the second electric charge. The second capacitive element includes a third electrode, a fourth electrode, and a second dielectric.

公开(公告)号：US20210313378A1

公开(公告)日：2021-10-07

申请号：US17347447

申请日：2021-06-14

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： DAISUKE WAKABAYASHI ,  YUUKO TOMEKAWA

IPC: H01L27/146

Abstract: A photoelectric conversion device includes: a substrate; a photodetection film including a first surface facing the substrate and a second surface opposing the first surface; first electrodes provided between the substrate and the photodetection film; a second electrode provided between the substrate and the photodetection film and including a first portion overlapped with the first surface and a second portion not overlapped therewith when viewed from a normal direction of the substrate; a third electrode provided on the second surface of the photodetection film and including a third surface facing the second surface; wiring allowing for conduction between the second and third electrodes; and a first conductive plug connected with the first portion and extending toward the substrate. Material of the first conductive plug differs from that of the second electrode. The wiring is in contact with a side surface of the photodetection film and the second portion.

公开(公告)号：US20210273020A1

公开(公告)日：2021-09-02

申请号：US17324181

申请日：2021-05-19

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： TAKAHIRO KOYANAGI ,  YUUKO TOMEKAWA

IPC: H01L27/30 ,  H01L51/42 ,  H01L51/44

Abstract: An imaging device includes a first electrode, a second electrode, a photoelectric conversion layer that is arranged between the first electrode and the second electrode, and an electron blocking layer that suppresses movement of electrons from the first electrode to the photoelectric conversion layer. The electron blocking layer contains carbon and an oxide of chromium and is arranged between the first electrode and the photoelectric conversion layer.

公开(公告)号：US20190252488A1

公开(公告)日：2019-08-15

申请号：US16259102

申请日：2019-01-28

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： TAKAHIRO KOYANAGI ,  YUUKO TOMEKAWA ,  TAKESHI HARADA ,  YOSHIO KAWASHIMA

IPC: H01L49/02 ,  H01L21/3215 ,  H01L21/285 ,  H01L21/02

CPC classification number: H01L28/40 ,  H01L21/02181 ,  H01L21/02189 ,  H01L21/02205 ,  H01L21/0228 ,  H01L21/28568 ,  H01L21/3215 ,  H01L27/10814 ,  H01L27/10852 ,  H01L27/14609 ,  H01L28/60 ,  H01L28/91

Abstract: A capacitor includes a first electrode; a second electrode facing the first electrode; and a dielectric layer which is disposed between the first electrode and the second electrode and which is in contact with the first electrode. The first electrode includes a first portion including an interface between the first electrode and the dielectric layer, the dielectric layer includes a second portion including the interface, and the first portion and the second portion each contain silicon. A concentration distribution of the silicon along a thickness direction of the first portion and the second portion includes a convex portion intersecting the interface.