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公开(公告)号:US20210229978A1
公开(公告)日:2021-07-29
申请号:US16751567
申请日:2020-01-24
Inventor: Amir RAHAFROOZ , Thomas Kieran NUNAN , Diego EMILIO SERRANO , Ijaz JAFRI
Abstract: A method of manufacturing a semiconductor device includes providing a semiconductor layer having a first-type region and a second-type region that are stacked and interface with each other to form a p-n junction, the first-type region defining a first side of the semiconductor layer and the second-type region defining a second side of the semiconductor layer. The method further includes providing an insulating layer on the second side of the semiconductor layer and etching the semiconductor layer from the first side of the semiconductor layer toward the second side of the semiconductor layer to form a trench. The first-type region corresponds to one of a n-type region and a p-type region, and the second-type region corresponds to the other of the n-type region and the p-type region.
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公开(公告)号:US20240186975A1
公开(公告)日:2024-06-06
申请号:US18061234
申请日:2022-12-02
Inventor: Amir RAHAFROOZ , Diego EMILIO SERRANO
CPC classification number: H03H9/02433 , H03H9/2452 , H03H2009/0244
Abstract: Mechanical resonator includes two identical proof-masses, at least one connecting beam connecting the two identical proof-masses adapted to oscillate in a same phase in a direction perpendicular to a direction of a connecting beam, and at least one anchor attached to a middle of the at least one connecting beam. Two identical proof-masses are resonant plates, and the at least anchor is anchored to a substrate. The at least anchor may comprise two anchors attached to a middle of the at least one connecting beam in opposite directions. Also, the at least one connecting beam comprises an outer ring at a middle thereof, and the at least anchor is disposed at a center of the outer ring and is connected to the outer ring via two sub-connecting beams. The outer ring may be in a rectangular ring shape. Alternatively, the outer ring may be in a circular ring shape.
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公开(公告)号:US20240186976A1
公开(公告)日:2024-06-06
申请号:US18061252
申请日:2022-12-02
Inventor: Amir RAHAFROOZ , Diego EMILIO SERRANO , Thomas Kieran NUNAN , Ijaz JAFRI
CPC classification number: H03H9/02433 , H03H9/2405 , H03H2009/0244 , H03H2009/2442
Abstract: A mechanical resonator includes two identical plates, and a decoupling structure comprising at least two first connectors, each first connector connecting the decoupling structure to a respective one of the two identical plates, and an anchor disposed at a center of the decoupling structure. Each of the two identical plates may be a square plate adapted to resonate in Lamé-mode. Further, each of the two identical plates may comprise a plurality of square plates, each square plate disposed next to one another. The decoupling structure further comprises a first ring connected to each of the two identical plates via a respective one of the at least two first connectors. The decoupling structure may further comprise a second ring connected to an inside of the first ring via at least two second connectors, wherein the anchor is disposed at a center of the second ring.
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公开(公告)号:US20220107181A1
公开(公告)日:2022-04-07
申请号:US17420751
申请日:2019-12-27
Inventor: Amir RAHAFROOZ , Diego Emilio SERRANO , Ijaz Hussain JAFRI
IPC: G01C19/5712 , G01P1/00 , G01P15/125
Abstract: A sensing device includes a resonant member that is movable in a first mode and a second mode, and an electrode. The resonant member has a capacitive surface portion that faces and is capacitively coupled to a capacitive surface portion of the electrode. Displacement for each point along the capacitive surface portion of the resonant member in the first mode is substantially tangent to the point.
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公开(公告)号:US20250116517A1
公开(公告)日:2025-04-10
申请号:US18482403
申请日:2023-10-06
Inventor: Amir RAHAFROOZ , Diego EMILIO SERRANO , Ijaz JAFRI
IPC: G01C19/5677
Abstract: A gyroscope includes a vibratory plate with at least one notch, wherein each notch is a positive notch that is a formed by adding a mass to the vibratory plate, or a negative notch that is formed by removing a mass from the vibratory plate, and an anchor configured to support the vibratory plate. Across the wafer, a gyro design with a few different notch sizes can be designed to counteract the quadrature pattern. Depending on the type and magnitude of imperfection, a notch size and its location can be determined. The locations to add or remove a mass on the disk may be identified as follows. The locations where one gyro mode has a larger displacement while the second gyro mode has no displacement or a smaller displacement can be used to substantially impact the frequency of one of the first resonance mode or the second resonance mode. Alternatively, the locations where both gyro modes have the substantially same displacement amplitude can be used to impact the coupling between the two modes.
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公开(公告)号:US20240223169A1
公开(公告)日:2024-07-04
申请号:US18149275
申请日:2023-01-03
Inventor: Duane YOUNKIN , Ronald Joseph LIPKA , Ryan HENNESSY , Diego EMILIO SERRANO , Chihchuan CHE , Amir RAHAFROOZ , Mohammad Maymandi Nejad
CPC classification number: H03K5/00006 , H03K21/02 , H03K2005/00286
Abstract: Systems and methods disclosed herein include a correction circuit. The correction circuit may include frequency division circuitry that is configured to receive and condition a reference signal. The correction circuit may include drive circuitry that is configured to receive the reference signal. The correction circuit may include a first resonator that is configured to receive the reference signal. The correction circuit may include sense circuitry that is configured to receive the reference signal from the first resonator. The correction circuit may include phase detector circuitry that is configured to generate at least one output signal based on receipt of a plurality of input signals from the drive circuitry and the sense circuitry. The correction circuit may include a proportional integral derivative controller that is configured to generate a temperature correction signal to correct frequency error in an oscillator based on receipt of the at least one output signal.
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公开(公告)号:US20240077312A1
公开(公告)日:2024-03-07
申请号:US17930173
申请日:2022-09-07
Inventor: Diego EMILIO SERRANO , Sagnik PAL , Amir RAHAFROOZ , Thomas Kieran NUNAN , Ijaz JAFRI
IPC: G01C19/5698
CPC classification number: G01C19/5698
Abstract: Systems and methods disclosed herein include a device with a bulk acoustic wave resonator and one or more trenches that are configured to impede the flow of acoustic energy to the bulk acoustic wave resonator.
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公开(公告)号:US20220316881A9
公开(公告)日:2022-10-06
申请号:US17420751
申请日:2019-12-27
Inventor: Amir RAHAFROOZ , Diego Emilio SERRANO , Ijaz Hussain JAFRI
IPC: G01C19/5712 , G01P1/00 , G01P15/125
Abstract: A sensing device includes a resonant member that is movable in a first mode and a second mode, and an electrode. The resonant member has a capacitive surface portion that faces and is capacitively coupled to a capacitive surface portion of the electrode. Displacement for each point along the capacitive surface portion of the resonant member in the first mode is substantially tangent to the point.
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