SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THEREOF

    公开(公告)号:US20210229978A1

    公开(公告)日:2021-07-29

    申请号:US16751567

    申请日:2020-01-24

    Abstract: A method of manufacturing a semiconductor device includes providing a semiconductor layer having a first-type region and a second-type region that are stacked and interface with each other to form a p-n junction, the first-type region defining a first side of the semiconductor layer and the second-type region defining a second side of the semiconductor layer. The method further includes providing an insulating layer on the second side of the semiconductor layer and etching the semiconductor layer from the first side of the semiconductor layer toward the second side of the semiconductor layer to form a trench. The first-type region corresponds to one of a n-type region and a p-type region, and the second-type region corresponds to the other of the n-type region and the p-type region.

    DUAL PROOF-MASS RESONATORS WITH LOW SUPPORT LOSS

    公开(公告)号:US20240186975A1

    公开(公告)日:2024-06-06

    申请号:US18061234

    申请日:2022-12-02

    CPC classification number: H03H9/02433 H03H9/2452 H03H2009/0244

    Abstract: Mechanical resonator includes two identical proof-masses, at least one connecting beam connecting the two identical proof-masses adapted to oscillate in a same phase in a direction perpendicular to a direction of a connecting beam, and at least one anchor attached to a middle of the at least one connecting beam. Two identical proof-masses are resonant plates, and the at least anchor is anchored to a substrate. The at least anchor may comprise two anchors attached to a middle of the at least one connecting beam in opposite directions. Also, the at least one connecting beam comprises an outer ring at a middle thereof, and the at least anchor is disposed at a center of the outer ring and is connected to the outer ring via two sub-connecting beams. The outer ring may be in a rectangular ring shape. Alternatively, the outer ring may be in a circular ring shape.

    SINGLE ANCHOR RESONATORS
    3.
    发明公开

    公开(公告)号:US20240186976A1

    公开(公告)日:2024-06-06

    申请号:US18061252

    申请日:2022-12-02

    Abstract: A mechanical resonator includes two identical plates, and a decoupling structure comprising at least two first connectors, each first connector connecting the decoupling structure to a respective one of the two identical plates, and an anchor disposed at a center of the decoupling structure. Each of the two identical plates may be a square plate adapted to resonate in Lamé-mode. Further, each of the two identical plates may comprise a plurality of square plates, each square plate disposed next to one another. The decoupling structure further comprises a first ring connected to each of the two identical plates via a respective one of the at least two first connectors. The decoupling structure may further comprise a second ring connected to an inside of the first ring via at least two second connectors, wherein the anchor is disposed at a center of the second ring.

    APPARATUS AND METHOD FOR QUADRATURE REDUCTION IN VIBRATORY GYROSCOPES

    公开(公告)号:US20250116517A1

    公开(公告)日:2025-04-10

    申请号:US18482403

    申请日:2023-10-06

    Abstract: A gyroscope includes a vibratory plate with at least one notch, wherein each notch is a positive notch that is a formed by adding a mass to the vibratory plate, or a negative notch that is formed by removing a mass from the vibratory plate, and an anchor configured to support the vibratory plate. Across the wafer, a gyro design with a few different notch sizes can be designed to counteract the quadrature pattern. Depending on the type and magnitude of imperfection, a notch size and its location can be determined. The locations to add or remove a mass on the disk may be identified as follows. The locations where one gyro mode has a larger displacement while the second gyro mode has no displacement or a smaller displacement can be used to substantially impact the frequency of one of the first resonance mode or the second resonance mode. Alternatively, the locations where both gyro modes have the substantially same displacement amplitude can be used to impact the coupling between the two modes.

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