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    Active matrix programmable mirror
    2.
    发明授权
    Active matrix programmable mirror 有权

    公开(公告)号：US12061331B2

    公开(公告)日：2024-08-13

    申请号：US17207433

    申请日：2021-03-19

    Applicant: Obsidian Sensors, Inc.

    Inventor： John Hong ,  Tallis Chang ,  Bing Wen ,  Edward Chan ,  Sean Andrews ,  Heesun Shin

    IPC: G02B26/08 ,  B81B7/02 ,  B81C1/00

    CPC classification number: G02B26/0833 ,  B81B7/02 ,  B81C1/00373 ,  B81B2201/042 ,  B81B2207/015

    Abstract: Microelectromechanical system (MEMS) devices, methods of operating the MEMS device, and methods of manufacturing the MEMS device are disclosed. In some embodiments, the MEMS device includes a glass substrate; an electrode on the glass substrate; a hinge mechanically coupled to the electrode; a membrane mirror mechanically coupled to the hinge; a TFT on the glass substrate and electrically coupled to the electrode; and a control circuit comprising: a multiplexer configured to turn on or turn off the TFT; and a drive source configured to provide a drive signal for charging the electrode through the TFT. An amplitude of the drive signal corresponds to an amount of charge, and the amount of charge generates an electrostatic force for actuating the hinge and a portion of the membrane mirror mechanically coupled to the hinge.

    MEMS sensors and systems
    4.
    发明授权
    MEMS sensors and systems 有权

    公开(公告)号：US11624657B2

    公开(公告)日：2023-04-11

    申请号：US17267789

    申请日：2019-08-09

    Applicant: Obsidian Sensors, Inc.

    Inventor： John Hong ,  Bing Wen ,  Edward Chan ,  Tallis Chang ,  Sean Andrews

    IPC: G01J5/02 ,  B81B3/00 ,  G01J5/20 ,  H04N5/33

    Abstract: Disclosed herein are MEMS devices and systems and methods of manufacturing or operating the MEMS devices and systems for transmitting and detecting radiation. The devices and methods described herein are applicable to terahertz radiation. In some embodiments, the MEMS devices and systems are used in imaging applications. In some embodiments, a microelectromechanical system comprises a glass substrate configured to pass radiation from a first surface of the glass substrate through a second surface of the glass substrate, the glass substrate comprising TFT circuitry; a lid comprising a surface; spacers separating the lid and glass substrate; a cavity defined by the spacers, surface of the lid, and second surface of the glass substrate; a pixel in the cavity, positioned on the second surface of the glass substrate, electrically coupled to the TFT circuitry, and comprising an absorber to detect the radiation; and a reflector to direct the radiation to the absorbers and positioned on the lid.

    Readout circuits and methods
    5.
    发明授权
    Readout circuits and methods 有权

    公开(公告)号：US11555744B2

    公开(公告)日：2023-01-17

    申请号：US17048046

    申请日：2019-04-17

    Applicant: Obsidian Sensors, Inc.

    Inventor： Edward Chan ,  Bing Wen ,  John Hong ,  Tallis Chang ,  Seung-Tak Ryu

    IPC: G01J5/24 ,  G01J1/42 ,  G01J1/46 ,  G01J5/02 ,  H04N5/33 ,  G01J1/44 ,  G01J5/80

    Abstract: Methods of sensor readout and calibration and circuits for performing the methods are disclosed. In some embodiments, the methods include driving an active sensor at a voltage. In some embodiments, the methods include use of a calibration sensor, and the circuits include the calibration sensor. In some embodiments, the methods include use of a calibration current source and circuits include the calibration current source. In some embodiments, a sensor circuit includes a Sigma-Delta ADC. In some embodiments, a column of sensors is readout using first and second readout circuits during a same row time.

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