公开(公告)号：US20170178946A1

公开(公告)日：2017-06-22

申请号：US15124036

申请日：2015-04-05

申请人： ORBOTECH LTD.

发明人： Michael Zenou ,  Zvi Kotler ,  Jonathan Ankri ,  Abraham Rotnemer ,  Oleg Ermak

IPC分类号： H01L21/70 ,  H05K3/12

CPC分类号： H01L21/705 ,  H01L21/4867 ,  H01L23/15 ,  H05K1/097 ,  H05K3/02 ,  H05K3/105 ,  H05K2203/107 ,  H05K2203/1492

摘要： A method for manufacturing includes coating a substrate (22) with a matrix (28) containing a material to be patterned on the substrate. A pattern is fixed in the matrix by directing a pulsed energy beam to impinge on a locus of the pattern so as to cause adhesion of the material to the substrate along the pattern without fully sintering the material in the pattern. The matrix remaining on the substrate outside the fixed pattern is removed, and after removing the matrix, the material in the pattern is sintered.

公开(公告)号：US20180090314A1

公开(公告)日：2018-03-29

申请号：US15709486

申请日：2017-09-20

申请人： Orbotech Ltd.

发明人： Zvi Kotler ,  Jonathan Ankri

IPC分类号： H01L21/02 ,  H01L21/683

CPC分类号： H01L21/02266 ,  B05D1/286 ,  B05D3/06 ,  B41J2/005 ,  H01L21/683 ,  H05K3/046 ,  H05K3/305 ,  H05K3/321 ,  H05K3/3484 ,  H05K2203/0528 ,  H05K2203/107

摘要： A method for disposing material includes positioning a donor film including a donor material at a predefined distance from an acceptor substrate, the donor film facing toward the acceptor substrate. One or more pulses of laser radiation are directed to impinge on the donor film at a given location so as to induce formation of a protrusion made from the donor material. A distal tip of the protrusion touches the acceptor substrate and disposes thereon while the protrusion is still in contact with the donor film. A spot of the donor material is formed on the acceptor substrate by increasing a separation between the donor film and the acceptor substrate so as to detach the distal tip of the protrusion from the donor film.